Granted Patent B2

US 12,315,539 · App. 18/234,248 · Granted May 27, 2025

Inventors: Sung Hun Wee (Santa Clara, CA); Shawn Tanner (San Jose, CA); Hamid Balamane (Portola Valley, CA); Pradeep Senanayake (Fremont, CA); Takuya Matsumoto (San Jose, CA)

Assignee: Western Digital Technologies, Inc.

G11B5/314G11B5/3163G11B5/4866G11B5/6088G11B13/08G11B2005/0021

Abstract

Claims (57)

1. A heat assisted magnetic recording (HAMR) write head comprising:

a main pole;

a waveguide; and

a near-field transducer comprising:

an antenna disposed between the waveguide and the main pole; and

a thermal shunt in direct contact with the antenna, wherein:

a first portion of the antenna includes a layer stack of three or more gold-based component layers that contain a waveguide-side outermost gold-based component layer, a pole-side outermost gold-based component layer, and one or more intermediate gold-based component layers;

a second portion of the antenna is disposed between the first portion of the antenna and the main pole, the second portion comprising a metallic material having a higher melting point than gold, wherein the pole-side outermost gold-based component layer and the one or more intermediate gold-based component layers are in direct contact with the second portion of the antenna and the thermal shunt; and

an intermediate gold-based component layer of the one or more intermediate gold-based component layers includes at least one platinum group metal (PGM) at a maximum total atomic percentage that is greater than a total atomic percentage of the at least one PGM in the waveguide-side outermost gold-based component layer and is greater than a total atomic percentage of the at least one PGM in the pole-side outermost gold-based component layer.

2. The HAMR write head of claim 1 , wherein:

the maximum total atomic percentage of the at least one PGM in the intermediate gold-based component layer is in a range from 0.2% to 0.5%; and

the PGM comprises Rh.

3. The HAMR write head of claim 1 , wherein the one or more intermediate gold-based component layers comprises:

a waveguide-side PGM-containing gold-based component layer that is more proximal to the waveguide than the intermediate gold-based component layer is to the waveguide; and

a pole-side PGM-containing gold-based component layer that is more proximal to the main pole than the intermediate gold-based component layer is to the main pole,

wherein each of the waveguide-side PGM-containing gold-based component layer and the pole-side PGM-containing gold-based component layer comprises the at least one PGM at a lower atomic percentage than the maximum total atomic percentage.

4. The HAMR write head of claim 1 , wherein a surface segment of the waveguide-side outermost gold-based component layer forms a portion of an air bearing surface of the HAMR write head.

5. The HAMR write head of claim 1 , wherein the pole-side outermost gold-based component layer is free of the at least one PGM.

6. The HAMR write head of claim 1 , further comprising at least one dielectric matrix layer embedding at least a portion of the near field transducer.

7. The HAMR write head of claim 6 , wherein:

the waveguide-side outermost gold-based component layer is in direct contact with the at least one dielectric matrix layer; and

the waveguide-side outermost gold-based component layer is free of the at least one PGM.

8. The HAMR write head of claim 6 , wherein the thermal shunt is embedded in the at least one dielectric matrix layer.

9. The HAMR write head of claim 8 , wherein the at least one dielectric matrix layer comprises:

a first dielectric matrix layer embedding the antenna; and

a second dielectric matrix layer embedding and in direct contact with the thermal shunt.

10. The HAMR write head of claim 1 , wherein the metallic material of the second portion of the antenna comprises at least one material that is selected from Rh, Co, Ni, Pt, Pd, Ru, B, Mo, Nb, Ta, W, Ti, Os, Ir, or Re.

11. The HAMR write head of claim 1 , wherein:

the thermal shunt is in direct contact with the pole-side outermost gold-based component layer and the intermediate gold-based component layer; and

the waveguide-side outermost gold-based component layer is not in direct contact with the thermal shunt.

12. The HAMR write head of claim 1 , wherein the three or more gold-based component layers have a respective material composition of Au 1-x M x , in which M comprises at least one of Rh, Ir, Pd or Pt, and x is in a range from 0 to 0.1, where x is greater than 0 in at least two of the three or more gold-based component layers.

13. A hard disk drive, comprising:

the HAMR write head of claim 1 ;

a magnetic read head; and

a magnetic media.

14. A method of forming a heat assisted magnetic recording (HAMR) write head, comprising:

forming a waveguide over a substrate;

forming a first dielectric matrix layer over the waveguide;

forming a recess cavity in the first dielectric matrix layer, the recess cavity having a tapered surface;

sequentially depositing a layer stack of three or more gold-based component layers that contain a waveguide-side outermost gold-based component layer, a pole-side outermost gold-based component layer, and one or more intermediate gold-based component layers in the recess cavity, wherein an intermediate gold-based component layer of the one or more intermediate gold-based component layers includes at least one platinum group metal (PGM) at a maximum total atomic percentage that is greater than a total atomic percentage of the at least one PGM in the waveguide-side outermost gold-based component layer and is greater than a total atomic percentage of the at least one PGM in the pole-side outermost gold-based component layer;

removing a portion of the layer stack that overlies a top surface of the first dielectric matrix layer by performing a planarization process to form an antenna-having, the antenna comprising:

a first portion that includes a remaining portion of the layer stack after the planarization process; and

a second portion comprising a metallic material having a higher melting point than gold;

forming a second dielectric matrix layer over the antenna and the first dielectric matrix layer;

forming a thermal shunt through the second dielectric matrix layer and into the antenna; and

forming a main pole over the thermal shunt body portion, wherein:

the second portion of the antenna is disposed between the first portion of the antenna and the main pole; and

the pole-side outermost gold-based component layer and the one or more intermediate gold-based component layers are in direct contact with the second portion of the antenna and the thermal shunt.

15. The method claim 14 , wherein the second portion is formed by deposition and patterning of a metallic material selected from Rh, Co, Ni, Pt, Pd, Ru, B, Mo, Nb, Ta, W, Ti, Os, Ir, or Re.

16. The method of claim 14 , wherein:

the maximum total atomic percentage of the at least one PGM in the intermediate gold-based component layer is in a range from 0.2% to 0.5%; and

the PGM comprises Rh.

17. The method of claim 14 , wherein the one or more intermediate gold-based component layers comprises:

a waveguide-side PGM-containing gold-based component layer that is more proximal to the waveguide than the intermediate gold-based component layer is to the waveguide; and

a pole-side PGM-containing gold-based component layer that is more proximal to the main pole than the intermediate gold-based component layer is to the main pole,

wherein each of the waveguide-side PGM-containing gold-based component layer and the pole-side PGM-containing gold-based component layer comprises the at least one PGM at a lower atomic percentage than the maximum total atomic percentage.

18. The method of claim 14 , further comprising providing an air bearing surface by polishing the main pole, the second dielectric matrix layer, the antenna, and the first dielectric matrix layer, wherein a polished surface segment of the waveguide-side outermost gold-based component layer forms a portion of the air bearing surface.

Assignments (3)

Continuity (3)

References Cited (23)