Semiconductor device including spacer layer contacting bit line bottom sidewalls
A method for fabricating a semiconductor device includes: forming a stack body over a substrate; forming channel structures in the stack body, the channel structures having a channel layer penetrating the stack body; forming a contact-level dielectric layer over the stack body and the channel structures; forming a contact hole penetrating the contact-level dielectric layer; forming contact plugs in the contact hole, the contact plugs coupled to the channel layers of the channel structures; recessing the contact plugs to form upper surfaces of the contact plugs that are lower than an upper surface of the contact-level dielectric layer; forming a bit line-level dielectric layer including a spacer layer over the recessed contact plugs; etching the bit line-level dielectric layer to form trenches that expose the recessed contact plugs; and forming a bit line in one or more of the trenches.
1. A semiconductor device, comprising:
a memory cell stack comprising dielectric layers and gate electrodes that are alternately stacked with each other, the memory cell stack positioned over a substrate;
a plurality of channel structures each including a channel layer that penetrates the memory cell stack;
a contact-level dielectric layer formed over the plurality of channel structures and including a contact hole that exposes each of the plurality of channel structures;
recessed contact plugs respectively coupled to the channel layer through the contact hole and having an upper surface which is lower than an upper surface of the contact-level dielectric layer;
a bit line-level dielectric layer formed over the recessed contact plugs; and
a plurality of bit lines formed in the bit line-level dielectric layer,
wherein the bit line-level dielectric layer includes a spacer layer in contact with sidewalls of bottom portions of the plurality of bit lines,
wherein the contact-level dielectric layer includes:
a first inter-layer dielectric layer;
a first etch stop layer over the first inter-layer dielectric layer;
a second inter-layer dielectric layer over the first etch stop layer; and
a second etch stop layer over the second inter-layer dielectric layer,
wherein the second etch stop layer is covered by the spacer layer.
2. The semiconductor device of claim 1 , wherein the spacer layer covers portions of an upper surface of the recessed contact plugs.
3. The semiconductor device of claim 1 , wherein the spacer layer includes silicon nitride.
4. The semiconductor device of claim 1 , wherein the bottom surfaces of the bit lines are self-aligned to the spacer layer.
5. The semiconductor device of claim 1 , wherein the bit lines and the contact plugs are in direct contact with each other.
6. The semiconductor device of claim 1 , wherein the second etch stop layer and the spacer layer include substantially the same material.
7. The semiconductor device of claim 1 , wherein the recessed contact plugs include titanium nitride and tungsten.
8. The semiconductor device of claim 1 , wherein the recessed contact plugs have a greater width than the bit lines.
9. The semiconductor device of claim 1 , wherein the spacer layer includes rounding portions that respectively cover upper surfaces of the recessed contact plugs.
10. The semiconductor device of claim 9 , wherein the rounding portions of the spacer layer cover edges of the second etch stop layer over the contact plug.