Semiconductor package
A semiconductor package includes a redistribution substrate including a first surface and a second surface that are opposite to each other, an antenna substrate on the first surface and including a first insulating portion and antenna patterns on a top surface of the first insulating portion, and a first semiconductor chip on the second surface. The redistribution substrate includes a second insulating portion, and a redistribution pattern in the second insulating portion. The redistribution pattern includes an interconnection portion extending parallel to a top surface of the second insulating portion, and a via portion protruding from the interconnection portion toward the first surface. A width of the via portion decreases as a height in a direction from the second surface toward the first surface increases. The active surface of the first semiconductor chip is adjacent to the second surface.
1. A semiconductor package comprising:
a redistribution substrate including a first surface and a second surface that are opposite to each other;
an antenna substrate on the first surface of the redistribution substrate, the antenna substrate including a first insulating portion and antenna patterns on a top surface of the first insulating portion; and
a first semiconductor chip on the second surface of the redistribution substrate,
wherein the redistribution substrate includes a second insulating portion and a redistribution pattern in the second insulating portion,
wherein the redistribution pattern includes an interconnection portion extending parallel to a top surface of the second insulating portion and a via portion protruding from the interconnection portion toward the first surface of the redistribution substrate,
wherein a width of the via portion decreases as a height in a direction from the second surface toward the first surface of the redistribution substrate increases,
wherein the first semiconductor chip includes an active surface and an inactive surface that are opposite to each other,
wherein the active surface of the first semiconductor chip is adjacent to the second surface of the redistribution substrate, and
wherein the antenna substrate further comprises
via structures penetrating the first insulating portion and electrically connecting to the antenna patterns, respectively, and
a shielding layer being a horizontal structure and between an adjacent pair of the via structures, the shielding layer being apart from the via structures, and
the antenna patterns electrically connect to the first semiconductor chip through the via structures and the redistribution pattern.
2. The semiconductor package of claim 1 , wherein a thickness of the antenna substrate is greater than a thickness of the redistribution substrate.
3. The semiconductor package of claim 1 , further comprising:
a second semiconductor chip on the second surface of the redistribution substrate,
wherein the second semiconductor chip includes an active surface and an inactive surface that are opposite to each other, and
wherein the active surface of the second semiconductor chip is adjacent to the second surface of the redistribution substrate.
4. The semiconductor package of claim 1 ,
a second semiconductor chip on the second surface of the redistribution substrate,
wherein the second semiconductor chip includes an active surface and an inactive surface that are opposite to each other,
wherein the inactive surface of the second semiconductor chip is adjacent to the second surface of the redistribution substrate, and
wherein the second semiconductor chip is electrically connected to the redistribution substrate through a bonding wire.
5. The semiconductor package of claim 1 , further comprising:
a molding layer on the second surface of the redistribution substrate,
wherein the molding layer is in contact with the active surface and the inactive surface of the first semiconductor chip.
6. The semiconductor package of claim 1 , wherein the first insulating portion and the second insulating portion include different materials.
7. The semiconductor package of claim 1 , wherein
conductive terminals are between the first semiconductor chip and the redistribution substrate,
connection terminals are between the antenna substrate and the redistribution substrate, and
a pitch of the connection terminals is greater than a pitch of the conductive terminals.
8. The semiconductor package of claim 1 , wherein
the antenna substrate includes a central portion and an edge portion, and
the redistribution substrate overlaps with the central portion of the antenna substrate, and
the semiconductor package further includes an external terminal bonded to a bottom surface of the edge portion of the antenna substrate and the external terminal is horizontally outside an area of the redistribution substrate and does not overlap the redistribution substrate in a vertical direction.
9. The semiconductor package of claim 8 , wherein a bottom end of the external terminal is lower than a bottom surface of the first semiconductor chip.
10. A semiconductor package comprising:
a redistribution substrate including a first surface and a second surface that are opposite to each other;
an antenna substrate on the first surface of the redistribution substrate, the antenna substrate including a first insulating portion and antenna patterns on a top surface of the first insulating portion;
a first semiconductor chip on the second surface of the redistribution substrate; and
a molding layer covering the first semiconductor chip,
wherein at least one of the antenna patterns is electrically connected to the first semiconductor chip,
wherein the redistribution substrate includes a second insulating portion and a redistribution pattern in the second insulating portion,
wherein the redistribution pattern includes an interconnection portion extending parallel to a top surface of the second insulating portion and a via portion protruding from the interconnection portion toward the first surface of the redistribution substrate,
wherein a width of an upper portion of the via portion is less than a width of a lower portion of the via portion,
wherein the molding layer is in contact with an active surface and an inactive surface of the first semiconductor chip that are opposite to each other, and
wherein the antenna substrate further comprises
via structures penetrating the first insulating portion and electrically connecting to the antenna patterns, respectively, and
a shielding layer being a horizontal structure and between an adjacent pair of the via structures, the shielding layer being apart from the via structures.
11. The semiconductor package of claim 10 , wherein the active surface of the first semiconductor chip is adjacent to the second surface of the redistribution substrate.
12. The semiconductor package of claim 10 , further comprising:
a second semiconductor chip and a passive element on the second surface of the redistribution substrate,
wherein an active surface of the second semiconductor chip is adjacent to the second surface of the redistribution substrate.
13. The semiconductor package of claim 10 , wherein
conductive terminals are between the first semiconductor chip and the redistribution substrate,
connection terminals are between the antenna substrate and the redistribution substrate, and
a pitch of the connection terminals is greater than a pitch of the conductive terminals.
14. A semiconductor package comprising:
a redistribution substrate including a first surface and a second surface that are opposite to each other;
an antenna substrate on the first surface of the redistribution substrate, the antenna substrate including a first insulating portion, antenna patterns on a top surface of the first insulating portion, via structures penetrating the first insulating portion and electrically connecting to the antenna patterns, respectively, and a shielding layer being a horizontal structure and between the via structures adjacent to each other;
connection terminals between the antenna substrate and the redistribution substrate;
first connection pads between the redistribution substrate and the connection terminals;
second connection pads between the via structures and the connection terminals;
each of a first semiconductor chip, a second semiconductor chip and a passive element being on the second surface of the redistribution substrate, each of the first and second semiconductor chips including an active surface and an inactive surface that are opposite to each other;
first chip pads adjacent to the active surface of the first semiconductor chip;
second chip pads adjacent to the active surface of the second semiconductor chip;
first conductive terminals between the redistribution substrate and the first chip pads;
second conductive terminals between the redistribution substrate and the second chip pads; and
a molding layer covering the first semiconductor chip and the second semiconductor chip,
wherein the redistribution substrate further includes,
a second insulating portion,
redistribution patterns in the second insulating portion; and
under bump patterns between the redistribution patterns and the first and second conductive terminals,
wherein the redistribution patterns include,
an interconnection portion extending parallel to a top surface of the second insulating portion, and
a via portion protruding from the interconnection portion toward the first surface of the redistribution substrate,
wherein a width of the via portion decreases as a height in a direction from the second surface toward the first surface of the redistribution substrate increases, and
wherein the active surface of each of the first and second semiconductor chips is adjacent to the second surface of the redistribution substrate.
15. The semiconductor package of claim 14 , wherein the molding layer is in contact with the active surface and the inactive surface of the first semiconductor chip.
16. The semiconductor package of claim 14 , wherein a thickness of the antenna substrate is greater than a thickness of the redistribution substrate.
17. The semiconductor package of claim 14 , wherein the first insulating portion and the second insulating portion include different materials.
18. The semiconductor package of claim 14 , wherein
the antenna substrate includes a central portion and an edge portion, and
the redistribution substrate overlaps with the central portion of the antenna substrate, and
the semiconductor package further includes an external terminal bonded to a bottom surface of the edge portion of the antenna substrate and the external terminal is horizontally outside an area of the redistribution substrate and does not overlap the redistribution substrate in a vertical direction.