Optical device including laterally guided vertical-cavity surface-emitting lasers (VCSELs) outputs and related methods
An optical device may include a substrate and vertical-cavity surface-emitting lasers (VCSELs) on the substrate. The optical device may also include a coupling layer over the substrate and that includes optical guides aligned with the VCSELs to guide outputs thereof from a vertical path direction to a lateral path direction. The optical device also includes controllable delay elements, each controllable delay element associated with a respective optical guide, and a controller coupled to the controllable delay elements.
1. An optical device comprising:
a substrate and a plurality of vertical-cavity surface-emitting lasers (VCSELs) on the substrate;
a coupling layer over the substrate and comprising a plurality of optical guides aligned with the plurality of VCSELS to guide outputs thereof from a vertical path direction to a lateral path direction, each optical guide comprising a vertical portion having a bend therein and a lateral portion extending from the bend so that lateral portions of the plurality of optical guides are parallel;
a plurality of controllable delay elements, each controllable delay element associated with a respective optical guide; and
a controller coupled to the plurality of controllable delay elements.
2. The optical device of claim 1 wherein each controllable delay element is associated with the lateral path direction of the respective optical guide.
3. The optical device of claim 1 wherein each optical guide comprises at least one of an optical mirror and an optical grating.
4. The optical device of claim 1 comprising a plurality of re-emission elements on the substrate downstream from the plurality of controllable delay elements, each re-emission element associated with a respective optical guide.
5. The optical device of claim 1 wherein the controller is configured to control the plurality of controllable delay elements to shape an output beamwidth for the plurality of VCSELS.
6. The optical device of claim 1 wherein the controller is configured to control the plurality of controllable delay elements to steer an output beam for the plurality of VCSELS.
7. The optical device of claim 1 wherein the controller is configured to modulate the plurality of VCSELS for data transmission.
8. The optical device of claim 1 comprising a plurality of optical detectors on the substrate.
9. The optical device of claim 1 comprising a plurality of phase correction elements, each phase correction element associated with a respective optical guide.
10. The optical device of claim 1 wherein the plurality of VCSELs comprises at least some VCSELs operating at different wavelengths.
11. The optical device of claim 1 wherein the plurality of VCSELs are operable at a wavelength in a range of 390 nm to 510 nm.
12. An optical device comprising:
a substrate and a plurality of vertical-cavity surface-emitting lasers (VCSELs) on the substrate;
a plurality of optical detectors on the substrate;
a coupling layer over the substrate and comprising
a plurality of first optical guides aligned with the plurality of VCSELs to guide outputs thereof from a vertical path direction to a lateral path direction, and
a plurality of second optical guides aligned with the plurality of optical detectors to guide inputs thereto from a horizontal path direction to a vertical path direction;
a plurality of first controllable delay elements, each first controllable delay element associated with a respective first optical guide;
a plurality of second controllable delay elements, each second controllable delay element associated with a respective second optical guide; and
a controller coupled to the plurality of first controllable delay elements and the plurality of second controllable delay elements.
13. The optical device of claim 12 wherein each first controllable delay element is associated with the lateral path direction of the respective first optical guide; and wherein each second controllable delay element is associated with the lateral path direction of the respective second optical guide.
14. The optical device of claim 12 wherein each first optical guide comprises an optical waveguide having a bend therein; and wherein each second optical guide comprises an optical waveguide having a bend therein.
15. The optical device of claim 12 wherein each first optical guide comprises at least one of an optical mirror and an optical grating; and wherein each second optical guide comprises at least one of an optical mirror and an optical grating.
16. The optical device of claim 12 comprising a plurality of re-emission elements on the substrate downstream from the plurality of controllable delay elements, each re-emission element associated with a respective first optical guide.
17. The optical device of claim 12 wherein the controller is configured to control the plurality of first controllable delay elements to shape an output beamwidth for the plurality of VCSELS.
18. The optical device of claim 12 wherein the controller is configured to control the plurality of first controllable delay elements to steer an output beam for the plurality of VCSELS.
19. A method for making an optical device comprising:
forming a plurality of vertical-cavity surface-emitting lasers (VCSELs) on a substrate;
positioning a coupling layer over the substrate and comprising a plurality of optical guides aligned with the plurality of VCSELs to guide outputs thereof from a vertical path direction to a lateral path direction, each optical guide comprising a vertical portion having a bend therein and a lateral portion extending from the bend so that lateral portions of the plurality of optical guides are parallel;
forming a plurality of controllable delay elements, each controllable delay element associated with a respective optical guide; and
coupling a controller to the plurality of controllable delay elements.
20. The method of claim 19 wherein each controllable delay element is associated with the lateral path direction of the respective optical guide.
21. The method of claim 19 wherein each optical guide comprises at least one of an optical mirror and an optical grating.
22. The method of claim 19 comprising forming a plurality of re-emission elements on the substrate downstream from the plurality of controllable delay elements, each re-emission element associated with a respective optical guide.
23. The method of claim 19 comprising forming a plurality of optical detectors on the substrate.
24. The method of claim 19 comprising forming a plurality of phase correction elements, each phase correction element associated with a respective optical guide.
25. The method of claim 19 wherein the plurality of VCSELs are operable at a wavelength in a range of 390 nm to 510 nm.