Granted Patent B2

US 12,330,268 · App. 18/908,316 · Granted Jun 17, 2025

Inventors: M Ziaul Karim (San Jose, CA); Dragan Cekic (Princeton, NJ)

Assignee: YIELD ENGINEERING SYSTEMS, INC.

B24C1/086B05B12/18B24C3/12B24C5/04B24C11/00B05B7/066

Abstract

Claims (31)

1. An apparatus to remove at least a portion of a coating from a coated surface of a substrate, comprising:

at least one nozzle extending from a proximal end to a distal end, wherein at least a distal end portion of the at least one nozzle extends along a longitudinal axis, and wherein the at least one nozzle includes,

an inner conduit having an orifice at the distal end, wherein the inner conduit is configured to direct a liquid stream through the orifice to impinge on the coated surface,

an outer conduit coaxially arranged about the inner conduit and defining an annular opening between the inner conduit and the outer conduit, wherein the outer conduit is configured to direct a gas through the annular opening to surround the liquid stream emanating from the orifice, and

wherein the inner conduit extends further along the longitudinal axis than the outer conduit to create a gap between the orifice and the annular opening along the longitudinal axis such that at least a portion of the liquid stream emanating from the orifice impinges on the coated surface without intermixing with the gas emanating from the annular opening; and

an outlet port configured to direct liquid from the liquid stream away from the substrate after the liquid stream impinges the coated surface.

2. The apparatus of claim 1 , further including a heater configured to heat the liquid stream exiting the orifice.

3. The apparatus of claim 1 , wherein the longitudinal axis inclined at an angle θ with the coated surface.

4. The apparatus of claim 3 , wherein the apparatus is configured to vary the angle θ between 0-180°.

5. The apparatus of claim 4 , wherein the apparatus is configured to vary the angle θ between 30-60°.

6. The apparatus of claim 1 , wherein the apparatus is configured to vary a pressure of the liquid stream exiting through the orifice.

7. The apparatus of claim 1 , wherein the apparatus is configured to vary a pressure of the gas exiting through the annular opening.

8. The apparatus of claim 1 , wherein the apparatus is configured to heat the gas exiting through the annular opening.

9. The apparatus of claim 1 , wherein the apparatus is configured to translate the nozzle to trace a path using the liquid stream on the coated surface.

10. An apparatus to remove at least a portion of a coating from a coated surface of a substrate, comprising:

a nozzle extending along a longitudinal axis and including,

an inner conduit configured to direct a liquid stream through an orifice to impinge on the coated surface such that liquid droplets of the liquid stream that impinges on the coated surface have a tear drop shape, wherein the tear drop shape is a shape with one end curved and an opposite end pointed; and

an outer conduit coaxially arranged about the inner conduit and configured to direct a gas through an annular opening between the inner conduit and the outer conduit to surround the liquid stream emanating from the orifice, wherein the gas is directed through the annular opening such that the liquid stream that impinges on the coated surface impacts a first area of the coated surface smaller than a second area, and wherein the second area is an area of the coated surface that would be impacted by the liquid stream if the liquid stream is directed through the orifice without the gas being directed through the annular opening.

11. The apparatus of claim 10 , wherein the orifice is spaced apart from the annular opening along the longitudinal axis such that at least a portion of the liquid stream emanating from the orifice impinges on the coated surface without intermixing with the gas emanating from the annular opening.

12. The apparatus of claim 10 , further including a heater configured to heat the liquid stream exiting the orifice.

13. The apparatus of claim 10 , wherein the longitudinal axis inclined at an angle θ with the coated surface, and wherein the apparatus is configured to vary the angle θ between 0-180°.

14. The apparatus of claim 10 , wherein the apparatus is configured to vary a pressure of the liquid stream exiting through the orifice.

15. The apparatus of claim 10 , wherein the apparatus is configured to vary a pressure and vary a temperature of the gas exiting through the annular opening.

16. The apparatus of claim 10 , wherein the apparatus is configured to translate the nozzle to trace a path using the liquid stream on the coated surface.

17. An apparatus to remove a coating from a coated surface of a substrate, comprising:

a nozzle extending along a longitudinal axis, the nozzle including,

an inner conduit having an orifice configured to release a liquid jet that impinges on the coated surface and removes at a portion of the coating by ablation, etching, or a combination of etching and ablation, and

an outer conduit coaxially arranged about the inner conduit and defining an annular opening between the inner conduit and the outer conduit, wherein the outer conduit is configured to direct a gas through the annular opening to surround the liquid jet emanating from the orifice such that at least a portion of the liquid jet impinges on the coated surface without intermixing with the gas emanating from the annular opening.

18. The apparatus of claim 17 , wherein the inner conduit extends further along the longitudinal axis than the outer conduit such that the orifice and the annular opening are spaced apart along the longitudinal axis.

19. The apparatus of claim 17 , wherein the longitudinal axis inclined at an angle θ with the coated surface, and wherein the apparatus is configured to vary the angle θ between 0-180°.

20. The apparatus of claim 17 , further including a heater configured to heat the liquid jet emanating from the orifice.

Assignments (1)

Continuity (2)

References Cited (26)