Disposable flow velocity measuring device having predetermined sensitivity to pressure change by using various types of ultra-thin films, and microfluidic device capable of removing micro bubbles inside channel by using support patterns protruding from porous ultra-thin film and manufacturing method therefor
A disposable flow velocity measuring device including: a first panel having a flow velocity measuring structure, and having additional micro protrusion patterns formed around the flow velocity measuring structure; a second panel separated from the first panel, and including a fluid channel through which a sample passes; a porous ultra-thin film formed on a portion, at which the first panel and the second panel come in contact with each other, so that the sample passing through the fluid channel does not directly come in contact with the flow velocity measuring structure, thereby separating the first panel and the second panel and removing micro-air bubbles included in the fluid passing through the fluid channel; a non-porous ultra-thin film formed in a partial region of the porous ultra-thin film; and a negative pressure forming means for applying negative pressure in order to adsorb the first panel and the second panel.
1. A microfluidic device, comprising:
an upper panel including a microfluidic channel through which fluid passes;
a porous ultra-thin film which is attached on a lower surface of the microfluidic channel to be integrated with the upper panel and includes a support pattern protruding to remove micro bubbles included in fluid passing through the microfluidic channel in real time;
a lower panel which is in contact with lower surfaces of the upper panel and the porous ultra-thin film; and
a negative pressure forming unit which forms a negative pressure between the microfluidic channel to which the porous ultra-thin film is attached and the lower panel.
2. The microfluidic device of claim 1 , wherein the negative pressure forming unit includes: an air removal passage formed around the microfluidic channel to form a negative pressure; and
a negative pressure applying hole which communicates with the air removal passage to apply a negative pressure to the air removal passage so that the microfluidic channel with the porous ultra-thin film attached thereto is attached to the lower panel.
3. The microfluidic device of claim 2 , wherein the negative pressure forming unit further includes a vacuum pump connected to the negative pressure applying hole.
4. The microfluidic device of claim 2 , wherein the air removal passage is formed on a lower surface of the upper panel so as to enclose around the microfluidic channel and the porous ultra-thin film, and
the negative pressure applying hole is formed to communicate with an upper surface or a side surface of the upper panel.
5. The microfluidic device of claim 1 , wherein the lower panel includes patterning for a specific function of the device.
6. The microfluidic device of claim 1 , wherein the porous ultra-thin film has hydrophobicity so as not to pass the fluid flowing through the microfluidic channel but pass only the micro bubbles included in the fluid to be leaked to the lower panel.
7. The microfluidic device of claim 6 , wherein the porous ultra-thin film is formed of a hydrophobic material or has hydrophobicity by performing a treatment with the hydrophobic material on a surface of the porous ultra-thin film.
8. The microfluidic device of claim 7 , wherein the material of the porous ultra-thin film includes at least one material selected from the group consisting of polydimethyl siloxane (PDMS), polyethylene terephthalate (PET), polyimide (PI), polypropylene (PP), poly(methyl methacrylate) (PMMA), polycaprolactone, polystyrene, propylene carbonate, ethylene carbonate, dimethylcarbonate, diethylcarbonate, polymer plastic, glass, paper, and ceramics.
9. The microfluidic device of claim 1 , wherein the microfluidic channel includes a fluid inlet through which a fluid is injected;
a flow path through which the fluid injected from the fluid inlet flows; and
a fluid outlet through which the fluid flowing through the flow path is discharged.
10. The microfluidic device of claim 9 , wherein the flow path is formed as a groove formed on a lower surface of the upper panel with a predetermined depth and the porous ultra-thin film is attached to a lower surface of the groove so that the flow path through which the fluid flows is formed.
11. The microfluidic device of claim 1 , wherein a velocity at which the micro bubbles in the fluid are leaked is adjusted depending on a thickness of the porous ultra-thin film, a height of the support pattern, an intensity of the negative pressure applied to the negative pressure applying hole, and a size of pores formed on the porous ultra-thin film.