Display apparatus
A display apparatus includes a driving backplane and a light-emitting element. The driving backplane includes a substrate, a pixel driving circuit disposed on the substrate and a pad electrically connected to the pixel driving circuit. The pad has a first metal layer, a first intermetallic layer and a first diffusion barrier layer, wherein the first metal layer, the first intermetallic layer and the first diffusion barrier layer are sequentially stacked along a direction away from the substrate. The light-emitting element includes an electrode and a conductive bump electrically connected to the electrode. The conductive bump has a second intermetallic layer, and the first diffusion barrier layer is located between the second intermetallic layer and the first intermetallic layer.
1. A display apparatus comprising:
a driving backplane comprising:
a substrate;
a pixel driving circuit disposed on the substrate; and
a pad electrically connected to the pixel driving circuit, wherein the pad comprises a first metal layer, a first intermetallic layer and a first diffusion barrier layer, and the first metal layer, the first intermetallic layer and the first diffusion barrier layer are sequentially stacked along a direction away from the substrate; and
a light-emitting element comprising:
an electrode; and
a conductive bump electrically connected to the electrode, wherein the conductive bump comprises a second intermetallic layer, and the first diffusion barrier layer is located between the second intermetallic layer and the first intermetallic layer.
2. The display apparatus according to claim 1 , wherein the first metal layer comprises copper, and the first intermetallic layer comprises copper and tin.
3. The display apparatus according to claim 1 , wherein the first metal layer comprises copper, and the second intermetallic layer comprises copper and tin.
4. The display apparatus according to claim 1 , wherein the first intermetallic layer comprises (Cu, Ni) 6 Sn 5 , (Cu, Ni) 3 Sn, (Cu, Ni) 3 Sn 4 or a combination of at least two of the above.
5. The display apparatus according to claim 1 , wherein the second intermetallic layer comprises (Cu, Ni) 6 Sn 5 , (Cu, Ni) 3 Sn, (Cu, Ni) 3 Sn 4 , or a combination of at least two of the above.
6. The display apparatus according to claim 1 , wherein the first diffusion barrier layer comprises tungsten and nickel.
7. The display apparatus according to claim 6 , wherein the first diffusion barrier layer further comprises copper, tin, or a combination of copper and tin.
8. The display apparatus according to claim 6 , wherein a weight percentage of tungsten in the first diffusion barrier layer falls within a range of 15% to 70%.
9. The display apparatus according to claim 6 , wherein a weight percentage of nickel in the first diffusion barrier layer is greater than 5%.
10. The display apparatus according to claim 1 , wherein the pad further comprises an auxiliary metal layer and an auxiliary protective layer, and the auxiliary metal layer, the auxiliary protective layer, the first metal layer, the first intermetallic layer, the first diffusion barrier layer and the second intermetallic layer are sequentially stacked along the direction away from the substrate.