Method and mechanical design of a flexure interface for ultra-high-vacuum nanopositioning Invar base near-zero-length feedthrough
A method and a novel flexure interface apparatus are provided for ultrahigh-vacuum (UHV) applications for precision nanopositioning systems. An ultrahigh-vacuum (UHV) metrology base is integrated with an ultrahigh-vacuum (UHV) flange together including a precision and compact flexure interface structure defining a UHV metrology base near-zero-length feedthrough. The UHV metrology base is directly mounted to a flange mounting surface in air with nanopositioning and thermal stability. The precision and compact flexure interface structure has sufficient strength to hold the vacuum force and sufficiently flexible to survive with the thermal expansion stress during bakeout process.
1. A flexure interface apparatus for ultrahigh-vacuum (UHV) applications for precision nanopositioning systems comprising:
an ultrahigh-vacuum (UHV) flange;
an ultrahigh-vacuum (UHV) metrology base integrated with said ultrahigh-vacuum (UHV) flange; said UHV metrology base directly mounted to a support mounting base surface in air with nanopositioning and thermal stability;
said UHV metrology base and said UHV flange cooperatively providing a precision and compact flexure interface structure defining a UHV metrology base near-zero-length feedthrough; and
said precision and compact flexure interface structure having sufficient strength to hold ultrahigh-vacuum force and sufficiently flexible to survive with thermal expansion stress during bakeout process.
2. A flexure interface apparatus as recited in claim 1 wherein said precision and compact flexure interface structure includes said UHV metrology base having a thickness greater than a thickness of said UHV flange by a selected value; said selected value in a range of 2-4 millimeters.
3. A flexure interface apparatus as recited in claim 1 wherein said UHV metrology base is formed of a nickel-iron alloy with a low coefficient of thermal expansion over a wide range of temperatures.
4. A flexure interface apparatus as recited in claim 2 wherein UHV metrology base is formed of an Invar nickel-iron alloy material.
5. A flexure interface apparatus as recited in claim 1 wherein UHV metrology base includes a fully annealed nickel-iron alloy material having predefined strength, machinability, and stability.
6. A flexure interface apparatus as recited in claim 1 said mounting surface includes a mounting base, said support mounting base is formed of a nickel-iron alloy with a low coefficient of thermal expansion over a wide range of temperatures including an Invar nickel-iron alloy material.
7. A flexure interface apparatus as recited in claim 1 wherein said flange is formed of stainless-steel material having high levels of strength and hardness, corrosion resistance, enhanced formability, and machinability.
8. A flexure interface apparatus as recited in claim 1 wherein said precision and compact flexure interface structure defining a UHV metrology base near-zero-length feedthrough includes a flexure structure formed in said UHV metrology base and a flexure structure formed in said UHV flange.
9. A flexure interface apparatus as recited in claim 8 wherein said flexure structures of said UHV metrology base and said UHV flange are welded together.
10. A flexure interface apparatus as recited in claim 9 includes a separate flexure interface integrated with said UHV flange, said separate flexure interface and said UHV flange welded together, and said flexure structure formed in said separate flexure interface.
11. A flexure interface apparatus as recited in claim 10 wherein said UHV flange is formed of a selected one of a stainless-steel (SS) 304 L UHV material and stainless-steel (SS) alloy type 17-4 PH and said integrated separate flexure interface is formed of a selected one of stainless-steel (SS) alloy type 17-4 PH and Inconel-600.
12. A flexure interface apparatus as recited in claim 10 wherein said flexure structure formed in said UHV metrology base is formed of a nickel-iron alloy Invar metrology base material.
13. A flexure interface apparatus as recited in claim 1 wherein a weld surface between a flexure structure formed in said UHV metrology base and a flexure structure formed in said UHV flange is spaced above an air side exterior surface of said UHV metrology base in a range of 2-5 millimeters.
14. A flexure interface apparatus as recited in claim 1 wherein a thickness of said UHV flange is greater than a thickness of said UHV flange in a set range of between 2- and 5 millimeters, providing the near-zero-length feedthrough design.
15. A flexure interface apparatus as recited in claim 1 wherein said precision and compact flexure interface structure defining a UHV metrology base near-zero-length feedthrough provides a linkage between an air side and a vacuum side of said UHV metrology base.
16. A method for implementing flexure interface apparatus for ultrahigh-vacuum (UHV) applications for precision nanopositioning systems comprising:
providing an ultrahigh-vacuum (UHV) flange;
integrating an ultrahigh-vacuum (UHV) metrology base with said ultrahigh-vacuum (UHV) flange;
directly mounting said UHV metrology base to a support mounting base surface in air with nanopositioning and thermal stability;
cooperatively providing a precision and compact flexure interface structure defining a UHV metrology base near-zero-length feedthrough with said UHV metrology base and said UHV flange; and
providing said precision and compact flexure interface structure with sufficient strength to hold ultrahigh-vacuum force and sufficiently flexible to survive with thermal expansion stress during bakeout process.
17. The method as recited in claim 16 wherein cooperatively providing a precision and compact flexure interface structure defining a UHV metrology base near-zero-length feedthrough includes forming a flexure structure in said UHV metrology base and a flexure structure formed with said UHV flange.
18. The method as recited in claim 17 includes welding together said flexure structures of said UHV metrology base and said UHV flange with an electron-beam weld.
19. The method as recited in claim 16 wherein providing an ultrahigh-vacuum (UHV) flange includes forming said UHV flange of a selected stainless-steel material.
20. The method as recited in claim 16 wherein integrating an ultrahigh-vacuum (UHV) metrology base with said ultrahigh-vacuum (UHV) flange includes forming said UHV metrology base of a nickel-iron alloy Invar metrology base material.