Probe card and method for repairing probe card
The purpose of the present invention is to provide a method for repairing a probe card in which a defect has occurred in an alignment symbol or a peripheral region thereof by using a high reflection chip for alignment. The present invention is provided with a probe 16 for contacting an inspection object, a wiring substrate 14 to which the probe 16 is attached, and a high reflection chip 4 for alignment provided to a probe installation surface 17 of the wiring substrate 14 . The high reflection chip 4 includes a metal plate having a fixing through-hole 41 , and has an affixing surface to be attached to the probe installation surface 17 with an adhesive 6 and a mirror-finished high reflection surface on the other side from the affixing surface. The adhesive 6 formed on the affixing surface has a ridge 61 that extends into the fixing through-hole 41.
1. A probe card comprising:
a probe that is brought into contact with an inspection object;
a wiring substrate to which the probe is attached; and
a high reflection chip for alignment provided on a probe installation surface of the wiring substrate, wherein
the high reflection chip is made of a metal plate having a through-hole, and has an affixing surface to be attached to the probe installation surface via an adhesive, and a high reflection surface mirror-finished on an other side of the affixing surface, and has a ridge in which the adhesive formed on the affixing surface extends into the through-hole.
2. The probe card according to claim 1 , comprising:
a low reflection sheet that is formed in a sheet shape having a chip arrangement hole corresponding to the high reflection chip, having a low reflection surface having a light reflectance lower than that of the high reflection surface, and having an attached surface on an other side of the low reflection surface attached to the probe installation surface, wherein
the high reflection chip is attached onto the probe installation surface exposed through the chip arrangement hole.
3. The probe card according to claim 2 , wherein the low reflection sheet is made of a resin sheet containing carbon, and is attached using a double-sided tape.
4. A method for repairing a probe card including a wiring substrate having a probe installation surface on which a probe electrode pad for attaching a probe and an alignment symbol for positioning before inspection are formed, the method comprising:
attaching, on the probe installation surface, an attached surface on an other side of the low reflection surfaces of the low reflection sheet; and
attaching, on the probe installation surface, an affixing surface on an other side of the high reflection surface of a flat plate-shaped high reflection chip having a high reflection surface having a light reflectance higher than that of the low reflection surface, wherein
the high reflection chip is attached onto the alignment symbol exposed in a chip arrangement hole of the low reflection sheet attached onto the wiring substrate via an adhesive, and
the adhesive is cured while entering a through-hole of the high reflection chip from the affixing surface side of the high reflection chip at the time of attaching the high reflection chip.