IP Library Granted Patent US 12,339,717
Granted Patent B2
US 12,339,717 · App. 18/582,482 · Granted Jun 24, 2025

Discrete time loop based thermal control

Inventors: Jui-Cheng Huang (Hsinchu, TW); Yi-Hsing Hsiao (Hsin-Chu, TW); Yu-Jie Huang (Hsin-Chu, TW); Tung-Tsun Chen (Hsinchu, TW); Allen Timothy Chang (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G06F1/206G06F1/04
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Quick Facts
Patent No.
US 12,339,717
App. No.
18/582,482
Granted
Jun 24, 2025
Kind
B2
Abstract

In an embodiment, a circuit includes: an error amplifier; a temperature sensor, wherein the temperature sensor is coupled to the error amplifier; a discrete time controller coupled to the error amplifier, wherein the discrete time controller comprises digital circuitry; a multiple bits quantizer coupled to the discrete time controller, wherein the multiple bits quantizer produces a digital code output; and a heating array coupled to the multiple bits quantizer, wherein the heating array is configured to generate heat based on the digital code output.

Claims (33)

1. A discrete time loop based control system, comprising:

an error amplifier;

a temperature sensor coupled to an input of the error amplifier;

a discrete time controller coupled to an output of the error amplifier; and

a quantizer configured to produce a digital code for control of a heater, wherein the temperature sensor is configured to produce a value that characterizes the digital code output by the quantizer, wherein the heater comprises a plurality of heating elements each comprising a respective resistor coupled to a respective switch, wherein the respective switch comprises a first terminal, a second terminal and a third terminal, wherein the first terminal is connected to the respective resistor, the second terminal is connected to a ground, and the third terminal is controlled by a respective bit of the digital code output, and wherein the discrete time controller is configured to produce a control signal for controlling the quantizer.

2. The system of claim 1 , wherein the discrete time controller is an integrator controller.

3. The system of claim 2 , wherein the integrator controller comprises an operational amplifier with a first capacitor between an inverting input and an output.

4. The system of claim 3 , wherein, at the operational amplifier, the inverting input is connected with a second switch and a non-inverting input is coupled to the ground.

5. The system of claim 4 , wherein, the second switch is coupled to a third switch and a second capacitor.

6. The system of claim 5 , wherein the second switch is driven by a first clock signal and the-third switch is driven by a second clock signal, wherein the first clock signal and the second clock signal are non-overlapping clock signals with a same period.

7. The system of claim 1 , wherein the digital code output comprises multiple bits that are each configured to control the plurality of heating elements.

8. The system of claim 7 , wherein the discrete time controller is a proportional and integrator controller.

9. The system of claim 7 , wherein the discrete time controller is a proportional integral derivative controller.

10. The system of claim 7 , wherein each of the plurality of heating elements comprises a resistor with one end coupled to a voltage source and another end coupled to a switch to the ground.

11. A circuit, comprising:

an error amplifier;

a sensor, wherein the sensor is coupled to the error amplifier;

a discrete time controller coupled to an output of the error amplifier; and

a quantizer configured to produce a digital code for control of a heater, wherein the sensor is configured to produce a value that characterizes the digital code output by the quantizer, wherein the heater comprises a plurality of heating elements, wherein each of the plurality of heating elements comprises a respective resistor coupled to a respective switch, wherein the respective switch comprises a first terminal, a second terminal and a third terminal, wherein the first terminal is connected to the respective resistor, the second terminal is connected to a ground, and the third terminal is controlled by a respective bit of the digital code output, and wherein the discrete time controller is configured to produce a control signal for controlling the quantizer.

12. The circuit of claim 11 , wherein the heating array is coupled to the quantizer, wherein the digital code is utilized by the heating array to control different switches within the array.

13. The circuit of claim 12 , wherein the plurality of heating elements are monotonic.

14. The circuit of claim 11 , wherein the sensor is a temperature sensor.

15. The circuit of claim 11 , wherein the quantizer is a multiple bit quantizer.

16. A method, comprising:

producing an output of a process, wherein the output is a temperature;

determining an output measurement value based on the output using a temperature sensor;

determining an error between the output measurement value and a reference value;

generating a control signal based on the error; and

using the control signal to control the process with a quantizer, wherein the quantizer utilizes the control signal to generate a digital code, and wherein the digital code individually controls a plurality of heating elements of a heating array, wherein each of the plurality of heating elements comprises a respective resistor coupled to a respective switch, wherein the respective switch comprises a first terminal, a second terminal and a third terminal, wherein the first terminal is connected to the respective resistor, the second terminal is connected to a ground, and the third terminal is controlled by a respective bit of the digital code output.

17. The method of claim 16 , wherein the quantizer comprises a multiple bit quantizer, and the process is performed by the multiple bit quantizer.

18. The method of claim 17 , further comprising turning the heating array on or off based on the process.

19. The method of claim 17 , further comprising turning different coils of the heating array on or off based on the digital code produced by the multiple bit quantizer.

20. The method of claim 16 , wherein the discrete time controller is implemented in digital circuitry.

Continuity (4)
Continuation 17543542 · Dec 6, 2021
Continuation 16441637 · Jun 14, 2019
Provisional Application 62712685 · Jul 31, 2018
Related Publication 20240192744A1 · Jun 13, 2024
References Cited (34)
US 5504306A · Russell et al. · 1996 [cited by applicant]
US 5646672A · Fukushima · 1997 [cited by applicant]
US 5675366A · Hayasaki et al. · 1997 [cited by applicant]
US 6293655B1 · Imanaka et al. · 2001 [cited by applicant]
US 6684941B1 · Cao · 2004 [cited by examiner]
US 8031010B1 · Berquist et al. · 2011 [cited by applicant]
US 9176508B2 · Geissler et al. · 2015 [cited by applicant]
US 9816872B2 · Zhang et al. · 2017 [cited by applicant]
US 11209878B2 · Huang et al. · 2021 [cited by applicant]
US 11510577B2 · Bozsak · 2022 [cited by examiner]
US 20020158652A1 · Okayasu · 2002 [cited by applicant]
US 20040130357A1 · Smith · 2004 [cited by applicant]
US 20050105204A1 · Bloodworth · 2005 [cited by examiner]
US 20080234875A1 · Nomura · 2008 [cited by applicant]
US 20100131211A1 · Shipley · 2010 [cited by examiner]
US 20120105151A1 · Nakamura et al. · 2012 [cited by applicant]
US 20140028774A1 · Caporossi · 2014 [cited by examiner]
US 20140161278A1 · Konno et al. · 2014 [cited by applicant]
US 20150085054A1 · Omoto · 2015 [cited by examiner]
US 20180081308A1 · Cao · 2018 [cited by applicant]
US 20200020366A1 · Tezuka · 2020 [cited by applicant]
US 20200398579A1 · Gardner et al. · 2020 [cited by applicant]
CN 1621977A · 2005 [cited by applicant]
CN 101650223A · 2010 [cited by applicant]
JP S63111504A · 1988 [cited by applicant]
JP H0540525A · 1993 [cited by applicant]
Toumazou, C. et al., “Simultaneous DNA amplification and detection using a pH-sensing semiconductor system”, Nature Methods, Jul. 2013, 10(7):641-648. [cited by applicant]
Scorzoni, A. et al., “Accurate Analog Temperature Control of a Thin Film Microheater on Glass Substrate for Lab-on Chip Applications”, Dept. of Engineering, University of Perugia, Italy, 2014, 4 pages. [cited by applicant]
Janssen, E. et al., “Basics of Sigma-Delta Modulation”, Chapter 2, Look-Ahead Based Sigma-Delta Modulation, Analog Circuits and Signal Processing, 2011, pp. 5-28. [cited by applicant]
Graells, F.S., Integrated Heterogenous Systems Design (42838), “5. Delta-Sigma Modulators for ADC”, pp. 1-46, retrieved from http:/Jwww.cnm.es/-pserra/uab/ihsd/class.html, Jul. 25, 2019. [cited by applicant]
Chen, T.T. et al.,“A Semiconductor Bio-electrical Platform with Addressable Thermal Control Circuits for Accelerated Bioassay Development,” Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, Taiwan, University of Il… [cited by applicant]
Department of Mechanical Engineering, 2.010 Control Systems Principles, Laboratory 8: PIO Position Control, pp. 1-4, retrieved from http:/Jweb.mit.edu/2.010/www.lab/RULES, Jul. 25, 2019. [cited by applicant]
Barranca, Mar, et al., “Using a Floating-Gate MOS Transistor as a Transducer in a MEMS Gas Sensing System,” Sensors 2010, 10:10413-10434. [cited by applicant]
Ejaz, M., “PIO Control: A Tutorial for Physicists,” Lab Engineer (Control Systems Lab), Department of Electrical Engineering LUMS, Apr. 23, 2016, pp. 1-31. [cited by applicant]