IP Library › Granted Patent US 12,340,974
Granted Patent B2
US 12,340,974 · App. 17/861,463 · Granted Jun 24, 2025

Hydrogen supply device, and ion beam irradiation apparatus equipped therewith

Inventors: Yuya Hirai (Koka, JP); Weijiang Zhao (Koka, JP); Suguru Itoi (Koka, JP); Yuta Iwanami (Koka, JP)
Assignee: NISSIN ION EQUIPMENT CO., LTD.
H01J37/3171H01J37/08H01J2237/002
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Quick Facts
Patent No.
US 12,340,974
App. No.
17/861,463
Granted
Jun 24, 2025
Kind
B2
Abstract

A hydrogen supply device disposed in a high-potential section includes a bottle internally provided with a hydrogen absorbing alloy.

Claims (29)

1. A hydrogen supply device disposed in a high-potential section, the hydrogen supply device comprising a bottle internally provided with a hydrogen absorbing alloy.

2. The hydrogen supply device as recited in claim 1 , further comprising a temperature rise prevention part that prevents a temperature rise of the bottle.

3. The hydrogen supply device as recited in claim 1 , further comprising an air jet cooler configured to supply cool air to the bottle.

4. The hydrogen supply device as recited in claim 3 , further comprising a thermal insulator disposed around at least a portion of the bottle.

5. The hydrogen supply device as recited in claim 1 , further comprising a thermal insulator disposed around at least a portion of the bottle.

6. The hydrogen supply device as recited in claim 1 , further comprising a water-cooling jacket disposed around at least a portion of the bottle.

7. The hydrogen supply device as recited in claim 3 , further comprising a controller configured to control the air jet cooler based on a pressure of hydrogen gas supplied from the bottle or a temperature of the bottle.

8. An ion beam irradiation apparatus comprising:

an ion source; and

the hydrogen supply device as recited in claim 1 , the hydrogen supply device that supplies a hydrogen gas to the ion source.

9. The ion beam irradiation apparatus as recited in claim 8 , wherein the hydrogen supply device further comprises a temperature rise prevention part that prevents a temperature rise of the bottle.

10. The ion beam irradiation apparatus as recited in claim 8 , wherein the hydrogen supply device further comprises an air jet cooler configured to supply cool air to the bottle.

11. The ion beam irradiation apparatus as recited in claim 10 , wherein the hydrogen supply device further comprises a thermal insulator disposed around at least a portion of the bottle.

12. The ion beam irradiation apparatus as recited in claim 8 , wherein the hydrogen supply device further comprises a thermal insulator disposed around at least a portion of the bottle.

13. The ion beam irradiation apparatus as recited in claim 8 , wherein the hydrogen supply device further comprises a water-cooling jacket disposed around at least a portion of the bottle.

14. The ion beam irradiation apparatus as recited in claim 8 , further comprising a pipe communicatively connected from the bottle to the ion source,

wherein the hydrogen supply device further comprises cooling tube wrapped around at least a portion of the pipe and configured to receive cooling water.

15. The ion beam irradiation apparatus as recited in claim 10 , wherein the hydrogen supply device further comprises a controller configured to control the air jet cooler based on a pressure of the hydrogen gas or a temperature of the bottle.

16. An ion beam irradiation apparatus comprising:

a housing;

a gas box disposed in the housing;

an ion source disposed in the housing;

one or more insulator disposed between the housing and each of the gas box and the ion source,

wherein the gas box includes the hydrogen supply device as recited in claim 1 , and

the hydrogen supply device supplies a hydrogen gas to the ion source through a pipe that passes through a wall of the gas box.

17. The ion beam irradiation apparatus as recited in claim 16 , wherein the housing is at a potential of several hundred kilovolts (KV), and the gas box and the ion source have an electrical potential different from the potential of the housing by several tens of KV.

18. The ion beam irradiation apparatus as recited in claim 16 , wherein the hydrogen supply device further comprises an air jet cooler configured to supply cool air to the bottle.

19. The ion beam irradiation apparatus as recited in claim 18 , wherein the hydrogen 17 supply device further comprises a thermal insulator disposed around at least a portion of the bottle.

20. The ion beam irradiation apparatus as recited in claim 16 , wherein the hydrogen supply device further comprises a thermal insulator disposed around at least a portion of the bottle.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 11, 2022
From: HIRAI, YUYA; ZHAO, WEIJIANG; ITOI, SUGURU; IWANAMI, YUTA
To: NISSIN ION EQUIPMENT CO., LTD.
Reel/Frame 060471/0208 →
Priority Claims (1)
JP 2021-114967 · Jul 12, 2021 · national
Continuity (1)
Related Publication 20230008178A1 · Jan 12, 2023
References Cited (4)
US 8101488B1 · Smick et al. · 2012 [cited by applicant]
US 20190228943A1 · Colvin et al. · 2019 [cited by applicant]
US 20200395193A1 · Hsu · 2020 [cited by examiner]
JP 07245196A · 1995 [cited by applicant]