Dummy patterns in redundant region of double seal ring
A semiconductor structure includes first and second inner seal rings each having a first section and a second section substantially perpendicular to the first section. The semiconductor structure further includes an outer seal ring. The outer seal ring has a third section, and a fourth section, and a fifth section. The semiconductor structure further includes dummy patterns substantially uniformly distributed in each of regions between the first inner seal ring and the outer seal ring and between the second inner seal ring and the outer seal ring.
1. A semiconductor structure, comprising:
a first inner seal ring having a first linear outer edge extending in a first direction in a top view;
an outer seal ring, the outer seal ring having a second linear inner edge and a second linear outer edge opposing the second linear inner edge, wherein each of the second linear inner edge and the second linear outer edge extend in the first direction in the top view, the outer seal ring further including a corner seal ring structure at a first end of the second linear inner edge, wherein the corner seal ring structure abuts the first linear outer edge of the first inner seal ring in the top view; and
dummy patterns substantially uniformly distributed in a region between the first linear outer edge of the first inner seal ring and the second linear inner edge of the outer seal ring and having a first region end defined by the abutting of the corner seal ring structure and the first linear outer edge of the first inner seal ring, wherein the dummy patterns include a first conductive feature on a first metal layer and a second conductive feature on a second metal layer above the first metal layer.
2. The semiconductor structure of claim 1 , wherein the corner seal ring structure is of triangular-shape in the top view.
3. The semiconductor structure of claim 2 , wherein the outer seal ring further includes another corner seal ring structure at a second end of the second linear inner edge of the outer seal ring.
4. The semiconductor structure of claim 3 , wherein the another corner seal ring structure abuts another inner seal ring in the top view.
5. The semiconductor structure of claim 4 , wherein the region is a trapezoidal-shape in the top view and extends from the first region end to an opposing region end, the opposing region end where the another inner corner seal ring structure abuts the another seal ring.
6. The semiconductor structure of claim 2 , wherein the abutting with the first linear outer edge of the first inner seal ring is at a midpoint of a hypotenuse of the triangular-shape of the corner seal ring structure.
7. The semiconductor structure of claim 1 , wherein the first inner seal ring further includes a second corner seal ring structure.
8. The semiconductor structure of claim 1 , wherein the region is trapezoidal-shape.
9. A semiconductor structure, comprising:
two circuit regions;
two inner seal rings, each of the two inner seal rings surrounding one of the two circuit regions;
an outer seal ring surrounding the two inner seal rings, wherein the outer seal ring has a substantially rectangular periphery and an interior corner seal ring structure in each corner of the substantially rectangular periphery, wherein an exterior corner of one of the inner seal rings abuts each of the interior corner seal ring structures; and
dummy patterns substantially uniformly distributed in regions outside the two inner seal rings and inside the outer seal ring, wherein the dummy patterns include a conductive feature on each of a plurality of vertically adjacent layers.
10. The semiconductor structure of claim 9 , wherein each of the inner seal rings has a substantially rectangular periphery with four interior corner seal ring structures.
11. The semiconductor structure of claim 9 , wherein the dummy patterns at a same layer of the semiconductor structure are separate from each other.
12. The semiconductor structure of claim 11 , wherein at least some of the dummy patterns at two vertically adjacent layers of the semiconductor structure are physically connected.
13. The semiconductor structure of claim 9 , wherein the two inner seal rings have openings, further comprising interconnects going through the openings and connecting the two circuit regions.
14. The semiconductor structure of claim 9 , further comprising an assembly isolation region between each of the two circuit regions and one of the inner seal rings that substantially surrounds the respective circuit region.
15. The semiconductor structure of claim 9 , further comprising scribe lines outside of and surrounding the outer seal ring.
16. A semiconductor structure, comprising:
two circuit regions;
two inner seal rings, each of the two inner seal rings substantially surrounding one of the two circuit regions, wherein the two inner seal rings have openings;
interconnects going through the openings and connecting the two circuit regions;
an outer seal ring surrounding the two inner seal rings, wherein each of the inner seal rings and the outer seal ring has a substantially rectangular periphery with four interior corner seal ring structures; and
dummy patterns substantially uniformly distributed in regions outside the two inner seal rings and inside the outer seal ring, wherein regions outside the two inner seal rings and inside the outer seal ring include four substantially trapezoidal areas and the dummy patterns are substantially uniformly distributed in each of the four substantially trapezoidal areas.
17. The semiconductor structure of claim 16 , wherein some of the dummy patterns are present in a layer below or above another layer where some of the interconnects are present.
18. The semiconductor structure of claim 16 , wherein the dummy patterns are present in each layer of the semiconductor structure in which vertically protruding circuit features are present at the two circuit regions.
19. The semiconductor structure of claim 16 , wherein the dummy patterns include a conductive feature on a first metal layer and another conductive feature on a second metal layer the second metal layer above the first metal layer.