Semiconductor arrangement and method of making
View Patent ↗A semiconductor arrangement is provided. The semiconductor arrangement includes a first photodiode in a substrate. The semiconductor arrangement includes a lens array over the substrate. A first plurality of lenses of the lens array overlies the first photodiode. Radiation incident upon the first plurality of lenses is directed by the first plurality of lenses to the first photodiode.
1. A semiconductor arrangement, comprising:
a first photodiode in a substrate;
a grid structure over the first photodiode;
a first dielectric layer over the grid structure;
a color filter layer over the first dielectric layer, wherein the first dielectric layer separates the color filter layer from the first photodiode; and
a lens array over the color filter layer, wherein:
a first plurality of lenses of the lens array overlies the first photodiode such that a vertical projection of each of the first plurality of lenses intersects the first photodiode, wherein:
the first plurality of lenses comprises a first lens and a second lens,
a first plurality of recesses are defined in a top surface of a first portion of the substrate underlying the first lens and overlying the first photodiode such that a vertical projection of each of the first plurality of recesses intersects the first photodiode;
a second plurality of recesses are defined in a top surface of a second portion of the substrate underlying the second lens and overlying the first photodiode such that a vertical projection of each of the second plurality of recesses intersects the first photodiode; and
a top surface of a third portion of the substrate between the first plurality of recesses and the second plurality of recesses and underlying where the first lens abuts the second lens is planar; and
radiation incident upon the first plurality of lenses is directed by the first plurality of lenses to the first photodiode.
2. The semiconductor arrangement of claim 1 , comprising:
a second dielectric layer, wherein a first portion of the second dielectric layer is laterally offset from the first photodiode.
3. The semiconductor arrangement of claim 2 , comprising:
a second photodiode in the substrate, wherein:
the first portion of the second dielectric layer is laterally offset from the second photodiode; and
the first portion of the second dielectric layer is between the first photodiode and the second photodiode.
4. The semiconductor arrangement of claim 3 , wherein:
a second plurality of lenses of the lens array overlies the second photodiode.
5. The semiconductor arrangement of claim 1 , comprising:
a second dielectric layer, wherein:
a first portion of the second dielectric layer overlies the first photodiode;
the first portion of the second dielectric layer has a tapered sidewall; and
the first portion of the substrate separates the first portion of the second dielectric layer from the first photodiode.
6. The semiconductor arrangement of claim 5 , wherein:
a first recess of the first plurality of recesses is defined by a first tapered sidewall of the first portion of the substrate with which the tapered sidewall of the first portion of the second dielectric layer aligns.
7. The semiconductor arrangement of claim 6 , wherein:
a second portion of the second dielectric layer overlies the first photodiode;
the second portion of the second dielectric layer has a tapered sidewall; and
the first recess is defined by a second tapered sidewall of the first portion of the substrate with which the tapered sidewall of the second portion of the second dielectric layer aligns.
8. The semiconductor arrangement of claim 7 , wherein:
the first tapered sidewall of the first portion of the substrate has a first slope;
the second tapered sidewall of the first portion of the substrate has a second slope;
the second slope is opposite in polarity relative to the first slope; and
the second dielectric layer completely fills, from a top of the first tapered sidewall to a bottom of the first tapered sidewall, a region between the first tapered sidewall and the second tapered sidewall.
9. The semiconductor arrangement of claim 5 , wherein:
a second portion of the second dielectric layer overlies the first photodiode;
the second portion of the second dielectric layer has a tapered sidewall;
the second portion of the substrate separates the second portion of the second dielectric layer from the first photodiode;
the first lens of the first plurality of lenses overlies the first portion of the second dielectric layer and the first portion of the substrate; and
the second lens of the first plurality of lenses overlies the second portion of the second dielectric layer and the second portion of the substrate.
10. A semiconductor arrangement, comprising:
a first component in a substrate, wherein the substrate surrounds the first component such that the substrate overlies and underlies the first component such that a vertical projection of the first component intersects a first portion of the substrate above the first component and a second portion of the substrate below the first component;
a first dielectric layer over the substrate;
a first plurality of recesses are defined in a top surface of the first portion of the substrate underlying the first lens and overlying the first component such that a vertical projection of each of the first plurality of recesses intersects the first component;
a second plurality of recesses are defined in a top surface of a third portion of the substrate underlying the second lens and overlying the first component such that a vertical projection of each of the second plurality of recesses intersects the first component; and
a top surface of a fourth portion of the substrate between the first plurality of recesses and the second plurality of recesses and underlying where the first lens abuts the second lens is planar.
11. The semiconductor arrangement of claim 10 , wherein:
the first portion of the substrate has a first tapered sidewall defining a first recess of the first plurality of recesses and with which a first tapered sidewall of the first dielectric layer aligns.
12. The semiconductor arrangement of claim 11 , wherein:
the first portion of the substrate has a second tapered sidewall defining the first recess and with which a second tapered sidewall of the first dielectric layer aligns.
13. The semiconductor arrangement of claim 12 , wherein:
the first tapered sidewall of the first portion of the substrate has a first slope;
the second tapered sidewall of the first portion of the substrate has a second slope; and
the second slope is opposite in polarity relative to the first slope.
14. The semiconductor arrangement of claim 10 , wherein:
a first portion of the first dielectric layer is laterally offset from the first component.
15. The semiconductor arrangement of claim 14 , comprising:
a second component in the substrate, wherein:
the first portion of the first dielectric layer is laterally offset from the second component; and
the first portion of the first dielectric layer is between the first component and the second component.
16. The semiconductor arrangement of claim 15 , wherein:
a third lens of the lens array and a fourth lens of the lens array overlie the second component.
17. The semiconductor arrangement of claim 10 , wherein:
the first component is a photodiode.
18. A semiconductor arrangement, comprising:
a first photodiode in a substrate;
a first lens overlying the first photodiode;
a second lens overlying the first photodiode, wherein:
a first plurality of recesses are defined in a top surface of a first portion of the substrate underlying the first lens and overlying the first photodiode such that a vertical projection of each of the first plurality of recesses intersects the first photodiode;
a second plurality of recesses are defined in a top surface of a second portion of the substrate underlying the second lens and overlying the first photodiode such that a vertical projection of each of the second plurality of recesses intersects the first photodiode; and
a top surface of a third portion of the substrate between the first plurality of recesses and the second plurality of recesses and underlying where the first lens abuts the second lens is planar.
19. The semiconductor arrangement of claim 18 , comprising:
a second photodiode in the substrate; and
a third lens overlying the second photodiode, wherein a trench is defined in the substrate between the first photodiode and the second photodiode.
20. The semiconductor arrangement of claim 19 , wherein a grid structure overlies the trench.