Method of manufacturing magnetic random access memory and magnetic random access memory
View Patent ↗Embodiments of the present disclosure provide a method of manufacturing a magnetic random access memory (MRAM) and a MRAM. The method includes: preparing a bottom electrode through hole, a bottom electrode, a magnetic tunnel junction (MTJ), a top electrode, and an insulating layer sequentially on a semiconductor substrate; forming a first interlayer dielectric layer on the insulating layer; forming an etching stop layer on the first interlayer dielectric layer; forming a second interlayer dielectric layer on the etching stop layer; etching a part of the second interlayer dielectric layer above the top electrode to the etching stop layer, and forming a first trench; performing a self-alignment implantation inclined on a part of the first interlayer dielectric layer corresponding to a bottom of the first trench; continuously etching through the first trench to a top end surface of the top electrode, and forming a second trench.
1. A method of manufacturing a magnetic random access memory, comprising:
preparing a bottom electrode through hole, a bottom electrode, a magnetic tunnel junction, a top electrode, and an insulating layer sequentially on a semiconductor substrate;
forming a first interlayer dielectric layer on the insulating layer;
forming an etching stop layer on the first interlayer dielectric layer;
forming a second interlayer dielectric layer on the etching stop layer;
etching a part of the second interlayer dielectric layer above the top electrode to the etching stop layer, and forming a first trench;
performing a self-alignment implantation inclined on a part of the first interlayer dielectric layer corresponding to a bottom of the first trench, and forming a self-alignment implantation region;
continuously etching through the first trench to a top end surface of the top electrode, and forming a second trench, wherein the first trench and the second trench connect to each other to form a through via, and a critical dimension of the second trench gradually decreases from a bottom position of the first trench toward a direction close to the top electrode; and
filling the through via with a top electrode contact; and,
wherein a cross section of the self-alignment implantation region is an inverted trapezoid, an ion implantation concentration of the self-alignment implantation region gradually decreases from a top of the first interlayer dielectric layer toward a direction close to the top electrode, and/or the ion implantation concentration of the self-alignment implantation region gradually decreases from a perpendicular bisector of the cross section of the self-alignment implantation region along the first direction toward two sides away from the perpendicular bisector.
2. The method according to claim 1 , wherein an implantation angle of the self-alignment implantation is an included angle between a direction of the self-alignment implantation and a first direction.
3. The method according to claim 2 , wherein the implantation angle is 70° to 90°.
4. The method according to claim 1 , wherein the inverted trapezoid is an isosceles trapezoid.
5. The method according to claim 1 , wherein an implanted element of the self-alignment implantation is at least one of C, N, O, F, Ar, Ne, B, or Cl.
6. The method according to claim 5 , wherein a maximum critical dimension of the second trench is smaller than or equal to a minimum critical dimension of the first trench.
7. The method according to claim 6 , wherein there is an included angle between a sidewall of the first trench and a sidewall of the second trench, and the included angle is an obtuse angle.
8. The method according to claim 1 , wherein the continuously etching through the first trench to a top end surface of the top electrode, and forming a second trench comprises:
etching the self-alignment implantation region and the insulating layer sequentially from the bottom of the first trench, wherein
an etch selectivity ratio of the self-alignment implantation region in the first interlayer dielectric layer to a part of the first interlayer dielectric layer without the self-alignment implantation is greater than 1.
9. The method according to claim 8 , wherein the first interlayer dielectric layer, the etching stop layer, and the second interlayer dielectric layer are all formed through a deposition process, and the deposition process comprises an atomic layer deposition process, a chemical vapor deposition process, a physical vapor deposition process, or a spin coating process.
10. The method according to claim 1 , wherein the filling the through via with a top electrode contact comprises:
depositing the top electrode contact in the through via and on an upper surface of the second interlayer dielectric layer; and
removing a part of the top electrode contact on the upper surface of the second interlayer dielectric layer and a part of the top electrode contact located at a top of the through via and protrudes from the upper surface of the second interlayer dielectric layer, such that a remaining part of the top electrode contact is flush with the second interlayer dielectric layer.
11. The method according to claim 1 , wherein the top electrode contact is metal tungsten or copper.
12. The method according to claim 1 , wherein the magnetic tunnel junction comprises: a reference layer, a barrier layer, and a memory layer stacked sequentially.
13. The method according to claim 1 , wherein the first interlayer dielectric layer and the second interlayer dielectric layer each comprise at least one of silicon dioxide, silicon oxynitride, silicon nitride, or a low-k dielectric.
14. The method according to claim 1 , wherein the etching stop layer comprises at least one of silicon carbide, silicon nitride, silicon oxide, or silicon oxynitride.
15. The method according to claim 1 , wherein the etching stop layer comprises a plurality of layers, and a material of each of the layers is the same.
16. A magnetic random access memory, manufactured by using the method according to claim 1 .