IP Library › Granted Patent US 12,351,898
Granted Patent B2
US 12,351,898 · App. 17/742,355 · Granted Jul 8, 2025

Deposition mask and method of manufacturing the deposition mask

Inventors: Hwi Kim (Suwon-si, KR); In Bae Kim (Daejeon, KR); Sung Soon Im (Suwon-si, KR); Kyu Hwan Hwang (Seongnam-si, KR)
Assignee: SAMSUNG DISPLAY CO., LTD.
C23C14/042C23C16/042H10K50/00H10K71/00H10K71/166
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Quick Facts
Patent No.
US 12,351,898
App. No.
17/742,355
Granted
Jul 8, 2025
Kind
B2
Abstract

A method of manufacturing a deposition mask includes preparing a mask-target substrate which has one surface on which a sacrificed layer pattern is formed and comprises a cover area covered by the sacrificed layer pattern and a plurality of exposed areas exposed by the sacrificed layer pattern; forming holes in the exposed areas of the mask-target substrate by emitting laser toward the mask-target substrate; and removing the sacrificed layer pattern, wherein the sacrificed layer pattern has a higher reflectance with respect to the laser than a reflectance of the mask-target substrate.

Claims (10)

1. A deposition mask comprising:

a mask body which comprises a plurality of hole areas disposed while being spaced apart from each other and a lip region which surrounds each of the hole areas; and

a dust oxide film disposed on an inner surface of the lip region which faces the hole area of the mask body.

2. The deposition mask of claim 1 , wherein the dust oxide film is not disposed on an upper surface of the lip region of the mask body.

3. The deposition mask of claim 1 , wherein

the mask body comprises an Invar alloy which comprises nickel and iron, and

the dust oxide film comprises a nickel oxide and an iron oxide.

4. The deposition mask of claim 3 , further comprising:

a residual film which is disposed on an upper surface of the lip region of the mask body and comprises a material different from a material of the dust oxide film.

5. The deposition mask of claim 4 , wherein the residual film comprises at least one of aluminum, silver, and magnesium.

Priority Claims (1)
KR 10-2018-0170875 · Dec 27, 2018 · national
Continuity (2)
Continuation 16674997 · Nov 5, 2019
Related Publication 20220267888A1 · Aug 25, 2022
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