Semiconductor memory device
A semiconductor memory device comprises: memory layers arranged in a first direction; and a first and a second via wirings having different positions in a second direction. The memory layer comprises: a first transistor electrically connected to the first via wiring; a memory portion electrically connected to the first transistor; a wiring electrically connected to the first transistor; a second transistor electrically connected to the second via wiring; and an electrode provided in a current path between the second transistor and the wiring. The second transistor comprises: a semiconductor layer electrically connected to the electrode and the second via wiring; and a gate electrode facing the semiconductor layer. The semiconductor layer faces at least one of surfaces on one side or the other side in the first direction of the gate electrode. The electrode includes a portion arranged with the second via wiring in a third direction.
1. A semiconductor memory device comprising:
a substrate;
a plurality of memory layers arranged in a first direction intersecting a surface of the substrate; and
a first via wiring and a second via wiring that extend in the first direction, and have different positions from each other in a second direction intersecting the first direction, wherein
the plurality of memory layers each comprise:
a first transistor which is electrically connected to the first via wiring;
a memory portion which is electrically connected to the first transistor;
a first wiring which is electrically connected to the first transistor, and extends in the second direction;
a second transistor which is electrically connected to the second via wiring, and is electrically connected to the first wiring;
an electrode which is electrically connected to the second transistor, and is provided in a current path between the second transistor and the first wiring; and
a second wiring which is electrically connected to the second transistor, and extends in a third direction intersecting the first direction and the second direction,
the second transistor comprises:
a first semiconductor layer which is electrically connected to the electrode and the second via wiring;
a first gate electrode which is connected to the second wiring, and faces the first semiconductor layer; and
a first gate insulating film which is provided between the first semiconductor layer and the first gate electrode,
the first semiconductor layer faces at least one of surfaces on one side or the other side in the first direction of the first gate electrode, and
the electrode includes a portion arranged with the second via wiring in the third direction.
2. The semiconductor memory device according to claim 1 comprising:
a first position and a second position which respectively correspond to end portions of the first semiconductor layer on a first wiring side and an opposite side to the first wiring side in the second direction; and
a third position which is a center position of the first position and the second position in the second direction, wherein
a side surface of the first semiconductor on one side in the third direction comprises a first portion provided at the third position,
a side surface of the first semiconductor on the other side in the third direction comprises a second portion provided at the third position, and
one or both of the first portion and the second portion is/are connected to the electrode.
3. The semiconductor memory device according to claim 2 , wherein
an end portion of the electrode on an opposite side to the first wiring in the second direction reaches the second position.
4. The semiconductor memory device according to claim 2 , wherein
an end portion of the electrode on an opposite side to the first wiring in the second direction is further from the first wiring than the second position.
5. The semiconductor memory device according to claim 2 , wherein
an end portion, on an opposite side to the first wiring, of a connecting surface between the first semiconductor layer and the electrode reaches the second position.
6. The semiconductor memory device according to claim 2 , wherein
an end portion of the second via wiring on an opposite side to the first wiring in the second direction reaches the second position.
7. The semiconductor memory device according to claim 6 , wherein
the end portion of the second via wiring on the opposite side to the first wiring in the second direction is further from the first wiring than the second position.
8. The semiconductor memory device according to claim 2 , wherein
an end portion of the second via wiring on an opposite side to the first wiring in the second direction does not reach the second position.
9. The semiconductor memory device according to claim 1 , wherein
a length of the second via wiring in the second direction is larger than a length of the second via wiring in the third direction.
10. The semiconductor memory device according to claim 1 , wherein
a length of the first semiconductor layer in the second direction is larger than a length of the first semiconductor layer in the third direction.
11. The semiconductor memory device according to claim 1 , comprising
a third via wiring that extends in the first direction, wherein
the third via wiring is arranged in the second direction with the second via wiring, and
the first semiconductor layer is electrically connected to the third via wiring.
12. The semiconductor memory device according to claim 11 , wherein
the second via wiring and the third via wiring are electrically common.
13. The semiconductor memory device according to claim 11 , wherein
the second via wiring and the third via wiring are separated in the second direction.
14. The semiconductor memory device according to claim 2 , wherein
both of the first portion and the second portion are connected to the electrode.
15. The semiconductor memory device according to claim 2 , wherein
one of the first portion and the second portion is connected to the electrode, and the other of the first portion and the second portion is not connected to the electrode.
16. The semiconductor memory device according to claim 1 , wherein
the memory portion is a capacitor.
17. The semiconductor memory device according to claim 1 , wherein
the first transistor comprises:
a second semiconductor layer which is electrically connected to the memory portion and the first via wiring;
a second gate electrode which is connected to the first wiring, and faces the second semiconductor layer; and
a second gate insulating film which is provided between the second semiconductor layer and the second gate electrode, and
the second semiconductor layer faces at least one of surfaces on one side or the other side in the first direction of the second gate electrode.
18. The semiconductor memory device according to claim 1 , wherein
the first semiconductor layer includes an oxide semiconductor.
19. The semiconductor memory device according to claim 1 , wherein
the first semiconductor layer includes: at least one element of gallium (Ga) or aluminum (Al); indium (In); zinc (Zn); and oxygen (O).