Metal-insulator-metal capacitor structure with enlarged capacitor area
A MIM capacitor and related methods of fabricating the MIM capacitor. The MIM capacitor includes a bottom capacitor plate including a plurality of trenches defined therein, and a top capacitor plate. The MIM capacitor also includes a capacitor insulating layer disposed between the top capacitor plate and the bottom capacitor plate and within the plurality of trenches. Further, the MIM capacitor includes a first electrode electrically connected to the bottom capacitor plate, and a second electrode electrically connected to the top capacitor plate.
1. A method of fabricating a metal-insulator-metal (MIM) capacitor comprising:
providing a dielectric layer;
forming a hardmask layer on an upper surface of the dielectric layer;
forming a plurality of mandrel lines on the upper surface of the hardmask layer;
forming a conformal layer over the plurality of mandrel lines and the hardmask layer;
etching portions of the conformal layer from top portions of the plurality of mandrel lines and from any portion of the hardmask layer that is exposed, wherein other portions of the conformal layer that remain on the hardmask layer form a plurality of spacers;
removing the plurality of mandrel lines;
forming a non-conformal layer on top portions of the plurality of spacers and on portions of the hardmask layer which are located outward relative to the plurality of spacers;
etching portions of the hardmask layer located between the plurality of spacers;
etching portions of the dielectric layer located between the plurality of spacers to form a plurality of trenches in the dielectric layer;
removing the hardmask layer from the dielectric layer;
forming a bottom capacitor plate over the upper surface of the dielectric layer, the bottom capacitor plate including the plurality of trenches defined therein, wherein the plurality of trenches are configured to provide a desired capacitance density of the MIM capacitor;
providing a top capacitor plate; and
disposing a capacitor insulating layer between the top and bottom capacitor plates and within the plurality of trenches.
2. The method of claim 1 , further comprising:
electrically connecting a first electrode to the bottom capacitor plate; and
electrically connecting a second electrode to the top capacitor plate.
3. The method of claim 1 , wherein the plurality of trenches have a depth adapted to achieve a desired capacitance density of the MIM capacitor.
4. The method of claim 1 , wherein a number of trenches in the plurality of trenches is configured to provide a desired capacitance density of the MIM capacitor.
5. The method of claim 1 , wherein the plurality of trenches are configured to enlarge an area of the MIM capacitor.
6. A method of fabricating a metal-insulator-metal (MIM) capacitor comprising:
providing a dielectric layer;
forming a hardmask layer on an upper surface of the dielectric layer;
forming a plurality of mandrel lines on an upper surface of the hardmask layer;
forming a conformal layer over the plurality of mandrel lines and the hardmask layer;
etching portions of the conformal layer from top portions of the plurality of mandrel lines and from any portion of the hardmask layer that is exposed, wherein other portions of the conformal layer that remain on the hardmask layer form a plurality of spacers;
removing the plurality of mandrel lines;
forming a non-conformal layer on top portions of the plurality of spacers and on top portions of the hardmask layer which are located outward relative to the plurality of spacers;
etching portions of the hardmask layer located between the plurality of spacers;
etching portions of the dielectric layer located between the plurality of spacers to form a plurality of trenches in the dielectric layer;
removing the hardmask layer from the dielectric layer;
forming a bottom capacitor layer over the upper surface of the dielectric layer and within the plurality of trenches;
forming an insulating layer on an upper surface of the bottom capacitor layer;
forming a top capacitor layer on an upper surface of the insulating layer, wherein the top capacitor layer fills the plurality of trenches;
forming a first electrode electrically connected to the bottom capacitor layer; and
forming a second electrode electrically connected to the top capacitor layer.
7. The method of claim 6 , further comprising:
forming a block mask to cover a first portion of an upper surface of the top capacitor layer; and
etching a second portion of the top capacitor layer and the insulating layer which are not covered by the block mask.