Image sensor operating in a photovoltaic mode
An image sensor includes a sensor substrate and a circuit substrate. The sensor substrate includes a plurality of sensor substrate-side pixels. Each of the sensor substrate-side pixels includes a photodiode configured to operate in a photovoltaic mode, a reset transistor configured to reset the photodiode, and a pixel source follower transistor connected to an output of the photodiode. The circuit substrate includes circuit substrate-side pixels corresponding to the respective sensor substrate-side pixels of the sensor substrate. Each of the circuit substrate-side pixels includes a peak hold circuit configured to hold a peak of an output of the pixel source follower transistor by receiving the output of the pixel source follower transistor, and a readout source follower transistor configured to read out a voltage held in a holding capacitor. The sensor substrate-side pixels and the respective corresponding circuit substrate-side pixels are connected to each other.
1. An image sensor, comprising:
a sensor substrate; and
a circuit substrate, wherein
the sensor substrate includes a plurality of sensor substrate-side pixels,
each of the sensor substrate-side pixels includes a photodiode configured to operate in a photovoltaic mode, a reset transistor configured to reset the photodiode, and a pixel source follower transistor connected to an output of the photodiode,
the circuit substrate includes circuit substrate-side pixels corresponding to the respective sensor substrate-side pixels of the sensor substrate,
each of the circuit substrate-side pixels includes a peak hold circuit configured to hold a peak of an output of the pixel source follower transistor by receiving the output of the pixel source follower transistor, and a readout source follower transistor configured to read out a voltage held in a holding capacitor,
the peak hold circuit includes a peak hold transistor configured to allow a current corresponding to the output of the pixel source follower transistor to flow therethrough, a switch transistor configured to turn on/off an output of the peak hold transistor, and the holding capacitor configured to hold an output of the switch transistor, and
the sensor substrate-side pixels and the respective corresponding circuit substrate-side pixels are connected to each other.
2. The image sensor according to claim 1 , wherein a line on a side of the sensor substrate from a source of the pixel source follower transistor is connected to a gate of the peak hold transistor on a side of the circuit substrate through a pixel contact.
3. The image sensor according to claim 2 , wherein a protective transistor is connected to a line connecting the pixel contact on the circuit substrate and a gate of the peak hold transistor.
4. The image sensor according to claim 1 , wherein
the pixel source follower transistor performs source follower operation in a state where number of carrier charges on a channel of the pixel source follower transistor is one or zero, and
a current in the source follower operation is greater than Idrk 2 /Ideq, where Idrk is a dark current in the pixel source follower transistor, and Ideq is an equivalent dark current converted at an output end of a photodiode.
5. The image sensor according to claim 1 , further comprising:
a vertical scan circuit configured to drive the sensor substrate-side pixels on the sensor substrate and the circuit substrate-side pixels on the circuit substrate;
an analog-to-digital converter configured to convert an analog signal output from each of the sensor substrate-side pixels into a digital signal; and
a horizontal scan circuit configured to serially output the digital signals obtained by the analog-to-digital converter.
6. The image sensor according to claim 1 , further comprising:
a vertical scan circuit configured to drive the sensor substrate-side pixels on the sensor substrate and the circuit substrate-side pixels on the circuit substrate;
an analog-to-digital converter configured to convert an analog signal output from each of the circuit substrate-side pixels into a digital signal; and
a horizontal scan circuit configured to serially output the digital signals obtained by the analog-to-digital converter.
7. The image sensor according to claim 1 , wherein
the sensor substrate-side pixels are arranged in a matrix on the sensor substrate,
the circuit substrate-side pixels are arranged in a matrix on the circuit substrate, and
outputs of the readout source follower transistors of the circuit substrate-side pixels in each column are connected to one output line extending in a vertical direction.