Method of fabricating semiconductor structure
A package structure including a first semiconductor die, a second semiconductor die, first conductive pillars and a first insulating encapsulation is provided. The first semiconductor die includes a semiconductor substrate, an interconnect structure and a first redistribution circuit structure. The semiconductor substrate includes a first portion and a second portion disposed on the first portion. The interconnect structure is disposed on the second portion, the first redistribution circuit structure is disposed on the interconnect structure, and the lateral dimension of the first portion is greater than the lateral dimension of the second portion. The second semiconductor die is disposed on the first semiconductor die. The first conductive pillars are disposed on the first redistribution circuit structure of the first semiconductor die. The first insulating encapsulation is disposed on the first portion. The first insulating encapsulation laterally encapsulates the second semiconductor die, the first conductive pillars and the second portion.
1. A method, comprising:
placing semiconductor dies to a semiconductor wafer;
forming grooves on the semiconductor wafer, wherein a semiconductor substrate of the semiconductor wafer is revealed by the grooves;
laterally encapsulating the semiconductor dies and filling the grooves with an insulating encapsulation; and
performing a sawing process to saw the insulating encapsulation and the semiconductor wafer along the grooves, wherein a maximum lateral dimension of the grooves is greater than a cutting with of the sawing process.
2. The method as claimed in claim 1 , wherein the grooves are formed after placing the semiconductor dies to the semiconductor wafer, and the grooves are formed through a non-contact cutting process.
3. The method as claimed in claim 1 , wherein the grooves are formed through a laser grooving process, and the sawing process comprises a blade saw process.
4. The method as claimed in claim 3 , wherein the laser grooving process and the blade saw process are subsequently performed on a first surface of the semiconductor wafer on which the semiconductor dies are placed.
5. The method as claimed in claim 3 , wherein the laser grooving process is performed on a first surface of the semiconductor wafer on which the semiconductor dies are placed, the blade saw process is performed from a second surface of the semiconductor wafer, and the first surface is opposite to the second surface.
6. A method, comprising:
mounting a first semiconductor die over a semiconductor wafer comprising conductive pillars formed thereon;
performing a pre-cut process to form grooves on the semiconductor wafer; and
forming an insulating material over the semiconductor wafer to fill the grooves as well as laterally encapsulate the first semiconductor die and the first conductive pillars; and
performing a sawing process to cut the insulating material and the semiconductor wafer along the grooves, wherein the insulating material filled in the grooves is partially removed after performing the sawing process.
7. The method as claimed in claim 6 ,
after performing the sawing process, a singulated structure comprising a second semiconductor die, the first semiconductor die and a first insulating encapsulation is formed, wherein the first insulating encapsulation is disposed on the second semiconductor die and laterally encapsulates the first semiconductor die.
8. The method as claimed in claim 7 , wherein the second semiconductor die comprises a semiconductor substrate and an interconnect structure, the semiconductor substrate comprises a first portion and a second portion disposed on the first portion, the interconnect structure is disposed on the second portion, and a first lateral dimension of the first portion is greater than a second lateral dimension of the second portion.
9. The method as claimed in claim 7 further comprising:
forming second conductive pillars aside the singulated structure;
laterally encapsulating the second conductive pillars and the singulated structure with a second insulating encapsulation; and
forming a redistribution circuit structure over the singulated structure, the second conductive pillars and the second insulating encapsulation.
10. The method as claimed in claim 9 , wherein the second semiconductor die is spaced apart from the second insulating encapsulation by the first insulating encapsulation.
11. The method as claimed in claim 6 , wherein the grooves are formed through a non-contact cutting process performed along scribe lines of the semiconductor wafer.
12. The method as claimed in claim 6 , wherein the grooves are formed through a laser grooving process performed along scribe lines of the semiconductor wafer, the sawing process comprises a blade saw process performed along the scribe lines of the semiconductor wafer, and a first cutting width of the laser grooving process is wider than a second cutting width of the blade saw process.
13. The method as claimed in claim 12 , wherein the laser grooving process and the blade saw process are subsequently performed on a first surface of the semiconductor wafer on which the first semiconductor die is placed.
14. The method as claimed in claim 12 , wherein the laser grooving process is performed on a first surface of the semiconductor wafer on which the first semiconductor die is placed, the blade saw process is performed from a second surface of the semiconductor wafer, and the first surface is opposite to the second surface.
15. A method, comprising:
forming first conductive pillars and mounting a first semiconductor die on a semiconductor wafer;
performing a first cutting process to form grooves on the semiconductor wafer; and
filling the grooves as well as laterally encapsulating the semiconductor die and the first conductive pillars with an insulating material; and
performing a second cutting process to partially remove the insulating material and cut the semiconductor wafer along the grooves to form a singulated structure, wherein a first cutting width of the first cutting process is greater than a second cutting width of the second cutting process.
16. The method as claimed in claim 15 further comprising:
laterally encapsulating the singulated structure with a second insulating encapsulation; and
forming a first redistribution circuit structure over the singulated structure and the second insulating encapsulation; and
after performing the second cutting process and prior to forming the first redistribution circuit structure, forming second conductive pillars aside the singulated structure, wherein the second conductive pillars are laterally encapsulated by the second insulating encapsulation, and the second conductive pillars are electrically connected to the first redistribution circuit structure.
17. The method as claimed in claim 16 further comprising:
forming first conductive terminals on the first redistribution circuit structure.
18. The method as claimed in claim 16 further comprising a second redistribution circuit structure over the singulated structure and the second insulating encapsulation, wherein the first redistribution circuit structure and the second redistribution circuit structure are disposed at opposite sides of the singulated structure respectively.
19. The method as claimed in claim 18 further comprising:
forming second conductive terminals on the second redistribution circuit structure.
20. The method as claimed in claim 15 further comprising:
forming a passive component on the first redistribution circuit structure.