Memory and method for forming same
A method for forming a memory includes: forming a bit line structure and a capacitor contact layer, where the bit line structure includes a bit line, a bit line cap layer and a bit line isolation layer, and the capacitor contact layer covers part of a side wall of the bit line isolation layer; forming a stop layer covering the side wall of the bit line isolation layer; forming a capacitor landing layer covering a top surface of the capacitor contact layer; and etching the bit line isolation layer by using the stop layer as an etch stop layer to form an air gap in the bit line isolation layer. Probability of occurrence of a short circuit between the capacitor landing layer and a bit line is reduced.
1. A method for forming a memory, comprising:
forming a base substrate, the base substrate comprising a substrate, the substrate comprising a bit line structure and a capacitor contact layer adjacent to the bit line structure, the bit line structure comprising a bit line, a bit line cap layer positioned on a top surface of the bit line, and a bit line isolation layer covering a side wall of the bit line and a side wall of part of the bit line cap layer, the capacitor contact layer covering part of a side wall of the bit line isolation layer;
forming a stop layer at least covering the side wall of the bit line isolation layer;
forming a capacitor landing layer covering a top surface of the capacitor contact layer; and etching the bit line isolation layer by using the stop layer as an etch stop layer to form an air gap in the bit line isolation layer.
2. The method for forming the memory according to claim 1 , wherein the forming the base substrate comprises:
providing the substrate, the substrate comprising a bit line contact region and a capacitor contact region adjacent to the bit line contact region;
forming the bit line structure on the substrate, the bit line structure comprising the bit line in contact with the bit line contact region, the bit line cap layer positioned on the top surface of the bit line, and the bit line isolation layer covering the side wall of the bit line cap layer and the side wall of the bit line; and
forming, on the substrate, the capacitor contact layer in contact with the capacitor contact region, the capacitor contact layer covering part of the side wall of the bit line isolation layer, and the top surface of the capacitor contact layer being positioned below the top surface of the bit line isolation layer.
3. The method for forming the memory according to claim 1 , wherein the bit line isolation layer comprises a first isolation sublayer covering the side wall of the bit line cap layer and the side wall of the bit line, a second isolation sublayer covering the first isolation sublayer, and a third isolation sublayer covering the second isolation sublayer; the forming the stop layer at least covering the side wall of the bit line isolation layer comprises:
etching a part of the third isolation sublayer, a part of the second isolation sublayer, and a part of the capacitor contact layer to expose the first isolation sublayer and reduce a height of the capacitor contact layer;
forming the stop layer covering a side wall of the first isolation sublayer, a top surface of the second isolation sublayer, and a top surface and a side wall of the third isolation sublayer.
4. The method for forming the memory according to claim 3 , wherein the forming the stop layer covering the side wall of the first isolation sublayer, the top surface of the second isolation sublayer, and the top surface and the side wall of the third isolation sublayer comprises:
forming the stop layer covering a top surface of the bit line cap layer, the side wall and a top surface of the first isolation sublayer, the top surface of the second isolation sublayer, the top surface and the side wall of the third isolation sublayer, and the top surface of the capacitor contact layer;
forming a barrier layer covering a surface of the stop layer; and
removing the barrier layer and the stop layer covering the top surface of the bit line cap layer, the top surface of the first isolation sublayer, and the top surface of the capacitor contact layer.
5. The method for forming the memory according to claim 4 , wherein the forming the capacitor landing layer covering the top surface of the capacitor contact layer comprises:
forming a conductive material layer covering the top surface of the capacitor contact layer, a surface of the barrier layer, and a top surface of the bit line structure;
etching the conductive material layer to form an opening at least exposing the second isolation sublayer, the opening being configured to divide the conductive material layer into the plurality of capacitor landing layers.
6. The method for forming the memory according to claim 5 , wherein the etching the conductive material layer comprises:
etching the conductive material layer, the first isolation sublayer, the second isolation sublayer, the third isolation sublayer, the stop layer, and the barrier layer to form the opening exposing the first isolation sublayer, the second isolation sublayer, the third isolation sublayer, the stop layer, the barrier layer, and the bit line cap layer.
7. The method for forming the memory according to claim 5 , wherein the forming the air gap in the bit line isolation layer comprises:
etching the second isolation sublayer along the opening by using the stop layer as the etch stop layer to form the air gap positioned between the first isolation sublayer and the third isolation sublayer.
8. The method for forming the memory according to claim 7 , wherein an etching selectivity between the stop layer and the second isolation sublayer is greater than 100.
9. The method for forming the memory according to claim 1 , wherein a thickness of the stop layer ranges from 0.1 nm to 10 nm.