Granted Patent B2

US 12,379,571 · App. 17/425,589 · Granted Aug 5, 2025

Inventors: Daiki Suzuki (Hamamatsu, JP); Yoshihisa Warashina (Hamamatsu, JP)

Assignee: HAMAMATSU PHOTONICS K.K.

G02B7/182G02B26/085H01F7/081G02B26/10

Abstract

Claims (44)

1. An optical module comprising:

a mirror unit having a movable mirror part including a coil;

a magnet part having upper and bottom surfaces and a side surface extending from the upper surface to the bottom surface and configured to generate a magnetic field acting on the movable mirror part; and

a holding member configured to hold the magnet part,

wherein the magnet part has a Halbach structure including a first magnet applied with a force in a first direction toward the bottom surface from the upper surface and a second magnet applied with a force in a second direction toward the upper surface from the bottom surface,

wherein the holding member integrally holds the magnet part against a force acting on the first magnet in the first direction and a force acting on the second magnet in the second direction,

wherein the holding member has a restriction part supporting the upper surface of the magnet part, a bottom wall part supporting the bottom surface of the magnet part, and a side wall part supporting the side surface of the magnet part and connecting the restriction part and the bottom wall part,

wherein the mirror unit is supported on the upper surface by the holding member, and

wherein a relaxation layer for relaxing stress from the magnet part is provided between the upper surface and the mirror unit.

2. The optical module according to claim 1 ,

wherein the restriction part is positioned to restrict movement of the magnet part in the second direction, and

wherein the mirror unit is supported by the restriction part.

3. The optical module according to claim 2 ,

wherein the restriction part constitutes at least a part of the relaxation layer.

4. The optical module according to claim 3 ,

wherein the restriction part fills a space between the upper surface and the mirror unit and constitutes an entirety of the relaxation layer.

5. The optical module according to claim 3 ,

wherein the restriction part extends from a connection portion between the upper surface and the side surface toward an inward side of the upper surface and has an inner edge on the upper surface, and

wherein the relaxation layer is constituted of the restriction part and an air layer formed in a space defined by the inner edge.

6. The optical module according to claim 2 ,

wherein the holding member has a side wall part supporting the side surface, and

wherein the restriction part is formed integrally with the side wall part.

7. The optical module according to claim 2 ,

wherein the holding member has a side wall part supporting the side surface,

wherein the restriction part is provided on the upper surface such that the upper surface is covered when viewed in a direction intersecting the upper surface and has a contact part coming into contact with the upper surface, and

wherein the contact part is connected to the side wall part.

8. The optical module according to claim 7 ,

wherein a thickness of the contact part in a direction intersecting the upper surface is smaller than a thickness of the side wall part in a direction along the upper surface.

9. The optical module according to claim 7 ,

wherein the relaxation layer includes the contact part and an air layer formed on the upper surface and the contact part.

10. The optical module according to claim 1 ,

wherein the mirror unit is supported by the holding member at a position not overlapping the first magnet when viewed in a direction intersecting the upper surface.

11. The optical module according to claim 1 ,

wherein the relaxation layer includes a portion having a Young's modulus lower than a Young's modulus of the magnet part.

12. The optical module according to claim 1 ,

wherein the relaxation layer is configured to form a space between the upper surface of the magnet part and the mirror unit.

13. The optical module according to claim 12 ,

wherein the relaxation layer has a first surface that faces the magnet part and a second surface opposite the first surface, that is spaced away from the mirror unit.

14. The optical module according to claim 13 ,

wherein the relaxation layer includes a support part protruding from the second surface toward the mirror unit, and

wherein the mirror unit contacts the support part.

15. The optical module according to claim 12 , further comprising a pair of restriction parts that contact the mirror unit, wherein the space is formed between the pair of restriction parts.

16. The optical module according to claim 1 ,

wherein the mirror unit is disposed on a part of the restriction part.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (64)