Shield ring mounting using compliant hardware
A system for mounting the shield ring to the pedestal in a plasma chamber is disclosed. The mounting system includes compliant hardware. A fastener with a compliant component, such as an O-ring, is first secured to the pedestal. The shield ring has a top surface, a bottom surface and walls extending downward from the inner and outer diameter of the shield ring. Bores are located on the bottom surface of the shield ring. The bores of the shield ring are aligned with the fasteners and the shield ring is then pressed down onto the fasteners. As the shield ring is being pressed down, the walls of the bores force the compliant hardware to yield. When in place, the compliant hardware supplies the requisite compression force to hold the shield ring in place. The compliant hardware may be implemented in various manners.
1. A plasma doping system, comprising:
a plasma chamber;
a pedestal disposed in the plasma chamber having a plurality of holes;
a platen disposed on the pedestal;
a shield ring surrounding the platen, wherein a bottom surface of the shield ring comprises a plurality of bores; and
a plurality of fasteners, each secured to a respective one of the plurality of holes in the pedestal and each including a compliant component;
wherein each of the plurality of fasteners is disposed within a respective one of the plurality of bores in the shield ring.
2. The plasma doping system of claim 1 , wherein the compliant component is electrically conductive.
3. The plasma doping system of claim 1 , wherein the compliant component is in contact with the shield ring.
4. The plasma doping system of claim 1 , wherein the plurality of fasteners each comprises a head and a shaft, and wherein the head comprises a radial recess, and wherein the compliant component is disposed in the radial recess.
5. The plasma doping system of claim 4 , wherein the compliant component is an O-ring or a spiral wound shield gasket.
6. The plasma doping system of claim 1 , further comprising a shield ring insert disposed in a respective one of the plurality of bores, wherein an outer surface of the shield ring insert is in contact with interior walls of the respective one of the plurality of bores and wherein the compliant component is in contact with an inner surface of the shield ring insert.
7. The plasma doping system of claim 1 , wherein the plurality of fasteners each comprises a head and a shaft, and wherein an outer surface of the shaft is threaded and wherein the plurality of holes in the pedestal are threaded.
8. The plasma doping system of claim 1 , wherein interior walls of the plurality of bores are smooth.
9. The plasma doping system of claim 1 , wherein interior walls of the plurality of bores comprise an indentation that corresponds to a location of the compliant component.
10. The plasma doping wherein the compliant component comprises sheet metal comprising a plurality of spokes, wherein each spoke is bent at at least one joint.
11. The plasma doping system of claim 1 , wherein each bore is formed with an indentation such that a diameter of the bore at a bottom surface is smaller than a diameter of the bore at at least one other location.
12. An assembly for use on a pedestal in a plasma doping chamber comprising:
a shield ring shaped as an annular ring, wherein a bottom surface of the shield ring comprises a plurality of bores; and
a plurality of fasteners, each having a head and a shaft, wherein the shaft is adapted to be secured to the pedestal, and wherein the head is configured to hold a compliant component;
wherein each of the plurality of fasteners is disposed within a respective one of the plurality of bores in the shield ring, such that each compliant component is compressed in a respective one of the plurality of bores.
13. The assembly of claim 12 , wherein the head comprises a radial recess and the compliant component is disposed in the radial recess.
14. The assembly of claim 13 , wherein the compliant component is an O-ring or a spiral wound shield gasket.
15. The assembly of claim 12 , wherein the compliant component is in contact with interior walls of the respective one of the plurality of bores.
16. The assembly of claim 12 , further comprising a shield ring insert disposed in a respective one of the plurality of bores, wherein an outer surface of the shield ring insert is in contact with interior walls of the respective one of the plurality of bores and wherein the compliant component is in contact with an inner surface of the shield ring insert.
17. The assembly of claim 12 , wherein the compliant component comprises sheet metal comprising a plurality of spokes, wherein each spoke is bent at at least one joint.
18. The assembly of claim 12 , wherein each bore is formed with an indentation such that a diameter of the bore at a bottom surface is smaller than a diameter of the bore at at least one other location.