Source/drain regions in integrated circuit structures
Disclosed herein are source/drain regions in integrated circuit (IC) structures, as well as related methods and components. For example, in some embodiments, an IC structure may include: a channel region including a semiconductor material; and a source/drain region at a side face of the channel region, wherein the source/drain region includes a semiconductor portion and a contact metal, and the semiconductor portion is between the contact metal and the semiconductor material.
1. An integrated circuit (IC) structure, comprising:
a first channel region including a first semiconductor material;
a second channel region including a second semiconductor material; a
a source/drain region between the first channel region and the second channel region, wherein the source/drain region includes a first semiconductor region proximate to the first channel region, a second semiconductor region proximate to the second channel region, a third semiconductor region, and a contact metal at least partially between the first semiconductor region and the second semiconductor region;
a dielectric layer that is physically in contact with the third semiconductor region; and
a substrate,
wherein the first semiconductor region is between a portion of the contact metal and the first channel region, the second semiconductor region is between the portion of the contact metal and the second channel region, the first semiconductor region abuts a first surface of the contact metal, the second semiconductor region abuts a second surface of the contact metal, the first surface and the second surface of the contact metal are opposing, the third semiconductor region is between the first semiconductor region and the second semiconductor region, and the dielectric layer is between the contact metal and the substrate.
2. The IC structure of claim 1 , wherein the first semiconductor material is stressed.
3. The IC structure of claim 1 , wherein the first semiconductor material includes a semiconductor fin.
4. The IC structure of claim 1 , wherein the first channel region includes multiple semiconductor wires.
5. The IC structure of claim 1 , wherein the contact metal includes titanium.
6. The IC structure of claim 1 , wherein the contact metal includes an element, and the element includes zirconium, tantalum, tin, molybdenum, manganese, niobium, hafnium, iron, indium, gold, silver, palladium, platinum, chromium, copper, or cobalt.
7. The IC structure of claim 6 , wherein the element is present in the contact metal at an amount between 10 atomic-percent and 20 atomic-percent.
8. The IC structure of claim 1 , wherein the contact metal is stressed.
9. The IC structure of claim 2 , wherein the first semiconductor material has a stress between −500 megapascals and −1500 megapascals, or between 500 megapascals and 1500 megapascals.
10. The IC structure of claim 1 , wherein a cross section of a combination of the first semiconductor region, the second semiconductor region, and the third semiconductor region has a U shape.
11. An integrated circuit (IC) structure, comprising:
a first channel region including a first semiconductor material;
a second channel region including a second semiconductor material; and
a source/drain region between the first channel region and the second channel region, wherein the source/drain region includes a first semiconductor region proximate to the first channel region, a second semiconductor region proximate to the second channel region, a third semiconductor region, and a contact metal at least partially between the first semiconductor region and the second semiconductor region; and
a dielectric layer that is physically in contact with the third semiconductor region and is below the third semiconductor region,
wherein the first semiconductor region is between a portion of the contact metal and the first channel region, the second semiconductor region is between the portion of the contact metal and the second channel region, the first semiconductor region abuts a first surface of the contact metal, the second semiconductor region abuts a second surface of the contact metal, the first surface and the second surface of the contact metal are opposing, the third semiconductor region is between the first semiconductor region and the second semiconductor region, and the contact metal extends above the first semiconductor region and the second semiconductor region.
12. The IC structure of claim 11 , wherein the contact metal is stressed.
13. The IC structure of claim 11 , wherein the first semiconductor material and the second semiconductor material are stressed.
14. The IC structure of claim 11 , wherein the first semiconductor region includes an epitaxial layer.
15. The IC structure of claim 11 , wherein the contact metal includes titanium.
16. The IC structure of claim 11 , wherein the contact metal includes an element, and the element includes zirconium, tantalum, tin, molybdenum, manganese, niobium, hafnium, iron, indium, gold, silver, palladium, platinum, chromium, copper, or cobalt.
17. The IC structure of claim 16 , wherein the element is present in the contact metal at an amount between 10 atomic-percent and 20 atomic-percent.
18. The IC structure of claim 13 , wherein the first semiconductor material or the semiconductor material has a stress between −500 megapascals and −1500 megapascals, or between 500 megapascals and 1500 megapascals.
19. The IC structure of claim 11 , wherein a cross section of a combination of the first semiconductor region, the second semiconductor region, and the third semiconductor region has a U shape.