Composite microneedle structure based on integrated circuit chip
View Patent ↗A composite microneedle structure based on an integrated circuit chip includes a microstrip line, at least one microprobe and at least one integrated circuit chip. The microprobe includes a hard needle and a soft needle, the soft needle is fixed to an upper surface of the hard needle by a fixed structural member, and the integrated circuit chip is provided at a tail of the microprobe; the integrated circuit chip and the soft needle of the microprobe are fixed to form an electrical connection, and the microstrip line and one end of the integrated circuit chip are fixed to form the electrical connection.
1. A composite microneedle structure based on an integrated circuit chip, comprising:
a microstrip line;
at least one microprobe; and
at least one integrated circuit chip, wherein
the microprobe comprises a hard needle and a soft needle, the soft needle is fixed to an upper surface of the hard needle by a fixed structural member, and the integrated circuit chip is provided at a tail of the microprobe; the integrated circuit chip and the soft needle of the microprobe are fixed to form an electrical connection, and the microstrip line and one end of the integrated circuit chip are fixed to form the electrical connection;
the hard needle is provided with a hard needle tail and at least one hard needle microelectrode formed on the hard needle tail, and the soft needle is provided with a soft needle tail and at least one soft needle microelectrode formed on the soft needle tail; the soft needle tail is fixed to the hard needle tail, and the soft needle microelectrode is fixed to the hard needle microelectrode;
the fixed structural member comprises a first fixing member for fixing the soft needle microelectrode and the hard needle microelectrode, and second fixing members for fixing the soft needle tail and the hard needle tail; and
the second fixing members are a plurality of plug structures provided at intervals along a width direction of the hard needle at the hard needle tail, the plug structure comprises two coaxial cylinders with a larger upper part and a smaller lower part, a plug hole is provided at the soft needle tail corresponding to the plug structure, and a plurality of central symmetrical figures are provided outward along an edge of the plug hole on the soft needle tail, and an upper cylinder diameter of the plug structure is larger than a diameter of the plug hole.
2. The composite microneedle structure based on the integrated circuit chip according to claim 1 , wherein the first fixing member is a plurality of hook structures provided at intervals along a length direction of the hard needle microelectrode, the hook structure is provided with a first part and a second part, two ends of the second part are respectively connected to the first part and a surface of the hard needle microelectrode, and the first part is parallel to the surface of the hard needle microelectrode; the soft needle microelectrode is provided between the first part and the surface of the hard needle microelectrode, and the second part and the surface of the hard needle microelectrode are at a preset angle.
3. The composite microneedle structure based on the integrated circuit chip according to claim 2 , wherein the preset angle between the second part of the hook structure and the surface of the hard needle microelectrode is an acute angle.
4. The composite microneedle structure based on the integrated circuit chip according to claim 2 , wherein an opening for the hook structure to pass through is provided at a position corresponding to the hook structure on the soft needle microelectrode, and decoupling structures for the hook structure to detach from the soft needle is provided on the opening; the first part of the hook structure, the second part of the hook structure and the surface of the hard needle microelectrode form an open slot facing a needle tip of the hard needle, and the decoupling structure is provided at one end away from a needle tip of the soft needle.
5. The composite microneedle structure based on the integrated circuit chip according to claim 4 , wherein the decoupling structures comprise decoupling parts extending from an edge of the opening into the opening, a spacing between the decoupling parts is smaller than a width of the second part of the hook structure, and the decoupling parts are symmetrically provided about an axis of the opening; a gap is provided between a side edge of the decoupling parts and a side edge of a corresponding opening.
6. The composite microneedle structure based on the integrated circuit chip according to claim 1 , wherein a connection between the soft needle tail and the integrated circuit chip is provided between the second fixing member and the soft needle microelectrode.
7. The composite microneedle structure based on the integrated circuit chip according to claim 1 , wherein the integrated circuit chip comprises a soft needle connecting section for connecting to the soft needle and a microstrip line connecting section for connecting to the microstrip line, and the microstrip line connecting section is provided at one side of the soft needle connecting section; the integrated circuit chip is electrically connected to the soft needle of the microprobe by face-down bonding, and the microstrip line is electrically connected to the integrated circuit chip by the face-down bonding.