Imprint method and method for manufacturing article
In order to realize an imprint method capable of reducing a drawback caused by protrusion of an imprint material, the imprint method includes a first pattern forming process of bringing a mold into contact with an imprint material on a first pattern forming region on a substrate; a first exposure process of exposing an imprint material on the first pattern forming region and making an amount of exposure for the imprint material on a partial region of the first pattern forming region smaller; a second pattern forming process of bringing the mold into contact with an imprint material on a second pattern forming region after the first pattern forming process to form a pattern; and a second exposure process of exposing the imprint material on the second pattern forming region and the imprint material on the partial region of the first pattern forming region.
1. An imprint method comprising:
a first pattern forming process of arranging an imprint material on a first pattern forming region on a substrate and bringing a mold having a pattern into contact with the imprint material on the first pattern forming region on the substrate such that a first pattern is formed on the first pattern forming region and a portion of protruding imprint material is formed outside of the first pattern forming region;
a first exposure process of exposing the imprint material on the first pattern forming region in which the first pattern has been formed by the first pattern forming process and making an amount of exposure for the imprint material on a partial region of the first pattern forming region smaller than an amount of exposure for the imprint material on the other region of the first pattern forming region such that the imprint material on the partial region of the first pattern forming region and the portion of protruding imprint material formed outside of the first pattern forming region are not cured by the first exposure process;
a second pattern forming process, performed after the first pattern forming process, of arranging an imprint material on a second pattern forming region on the substrate and bringing the mold into contact (i) with the imprint material on the second pattern forming region on the substrate to form a second pattern, (ii) with the portion of protruding imprint material formed outside of the first pattern forming region, and (iii) with the imprint material on the partial region of the first pattern forming region, the second pattern forming region and the first pattern forming region being horizontally-adjacent pattern forming regions on the substrate; and
a second exposure process of (i) exposing the imprint material on the second pattern forming region in which the second pattern has been formed by the second pattern forming process and (ii) exposing the uncured imprint material on the partial region of the first pattern forming region.
2. The imprint method according to claim 1 ,
wherein the partial region of the first pattern forming region is a region at an end portion of the first pattern forming region and is adjacent to the second pattern forming region.
3. The imprint method according to claim 1 ,
wherein the partial region of the first pattern forming region is a region that does not correspond to a circuit pattern or an alignment mark disposed on the mold.
4. The imprint method according to claim 1 , wherein the first exposure process uses a blade for shielding exposure light by disposing the blade between a light source and the mold to limit an amount of exposure for the partial region of the first pattern forming region.
5. The imprint method according to claim 1 , further comprising a process of limiting the amount of exposure for the partial region of the first pattern forming region by using a digital micromirror device (DMD).
6. The imprint method according to claim 1 ,
wherein a light shielding material is disposed on the mold to limit the exposure amount for the partial region of the first pattern forming region.
7. The imprint method according to claim 1 ,
wherein the partial region of the first pattern forming region includes an end portion vertically adjacent to pattern forming regions of a next line on the substrate.
8. The imprint method according to claim 1 , further comprising a process of applying auxiliary exposure light to a partial region of a final pattern forming region on the substrate.
9. The method according to claim 1 ,
wherein, in the first exposure process, the imprint material of the partial region of the first pattern forming region is not exposed.
10. The imprint method according to claim 1 ,
wherein the second exposure process further includes (iii) exposing the uncured portion of protruding imprint material formed outside of the first pattern forming region.
11. The imprint method according to claim 1 ,
wherein the second exposure process is performed while the mold is contacted with (i) the imprint material on the second pattern forming region, (ii) the uncured imprint material on the partial region of the first pattern forming region, and (iii) the uncured portion of protruding imprint material formed outside of the first pattern forming region.
12. A method for manufacturing an article comprising:
a first pattern forming process of arranging an imprint material on a first pattern forming region on a substrate and bringing a mold having a pattern into contact with the imprint material on the first pattern forming region on a substrate such that a first pattern is formed on the first pattern forming region and a portion of protruding imprint material is formed outside of the first pattern forming region;
a first exposure process of exposing the imprint material on the first pattern forming region in which the first pattern has been formed by the first pattern forming process and making an amount of exposure for the imprint material on a partial region of the first pattern forming region smaller than an amount of exposure for the imprint material on the other region of the first pattern forming region such that the imprint material on the partial region of the first pattern forming region and the portion of protruding imprint material formed outside of the first pattern forming region are not cured by the first exposure process;
a second pattern forming process, performed after the first pattern forming process, of arranging an imprint material on a second pattern forming region on the substrate and bringing the mold into contact with (i) an imprint material on the second pattern forming region on the substrate to form a second pattern (ii) with the portion of protruding imprint material formed outside of the first pattern forming region, and (iii) with the imprint material on the partial region of the first pattern forming region, the second pattern forming region and the first pattern forming region being horizontally-adjacent pattern forming regions on the substrate;
a second exposure process of (i) exposing the imprint material on the second pattern forming region in which the second pattern has been formed by the second pattern forming process, and (ii) exposing the uncured imprint material on the partial region of the first pattern forming region; and
a development process of developing the substrate on which the first and second patterns have been formed by the first and second pattern forming processes.