Transfer conveyor system for semiconductor inspecting apparatus using moving magnet
A transfer conveyor system for a semiconductor inspecting apparatus using a moving magnet includes a carrier in which a semiconductor wafer or a substrate is seated and accommodated and which is transferred, an armature which is provided to be accommodated in a permanent magnet plate under the carrier, a stator which is disposed to be spaced apart from the armature, is fixedly installed on a guide rail, a sensor unit which is installed at each of two ends of each motor coil, detects whether the armature approaches, senses a variation of the magnetic field, and measures a position of the armature from speed information of the armature, and a carrier monitoring unit which is provided on the carrier and monitors the carrier to detect an abrasion degree, a damage state, or an alignment/misalignment of the carrier in real time.
1. A transfer conveyor system for a semiconductor inspecting apparatus using a moving magnet, comprising:
a carrier in which a semiconductor wafer or a substrate is seated and accommodated and which is transferred;
an armature which is provided to be accommodated in a permanent magnet plate under the carrier and includes a plurality of permanent magnets disposed in a longitudinal direction of the carrier;
a stator which is disposed to be spaced apart from the armature, is fixedly installed on a guide rail, and includes a plurality of motor coils configured to interact with a magnetic field generated by the permanent magnets of the armature;
a sensor unit which is installed at each of two ends of each motor coil, detects whether the armature approaches, senses a variation of the magnetic field, and measures a position of the armature from speed information of the armature; and
a carrier monitoring unit which is provided on the carrier and monitors the carrier to detect an abrasion degree, a damage state, or an alignment/misalignment of the carrier in real time,
wherein the carrier monitoring unit includes:
a speed sensor configured to measure a speed and acceleration;
a pressure sensor configured to measure pressure;
a temperature/humidity sensor configured to detect temperature/humidity of an outer surface of the carrier and temperature/humidity of the carrier;
an inclination angle sensor configured to measure inclination; and
a frequency detection sensor configured to detect a degree of vibration of the carrier from a measurement frequency measured in the carrier.
2. The transfer conveyor system of claim 1 , wherein, in the sensor unit, two Hall sensors are disposed in a multi-layered stack structure.
3. The transfer conveyor system of claim 2 , wherein the Hall sensors are disposed at intervals of 90° to generate sine waves;
a rising and falling period of a signal of the Hall sensor is set as a speed measurement period to calculate a rotational speed of a motor; and
the calculated rotational speed is integrated to measure the position of the armature.
4. The transfer conveyor system of claim 1 , wherein the carrier monitoring unit is packaged in a single body; and
coupling holes are formed in both end portions of the single body.
5. The transfer conveyor system of claim 1 , wherein the carrier monitoring unit further includes:
an impact sensor configured to detect an impact transmitted to the carrier; and
a noise sensor configured to detect noise from a natural frequency.
6. The transfer conveyor system of claim 1 , wherein a parameter value of the measurement frequency is any one of a root mean square (RMS) value, a peak value, and a fast Fourier transform (FFT) conversion value.
7. The transfer conveyor system of claim 1 , wherein, when a sensed parameter value of the measurement frequency exceeds a preset first threshold, the frequency detection sensor outputs a warning alarm.
8. The transfer conveyor system of claim 7 , wherein, when the sensed parameter value of the measurement frequency exceeds a preset second threshold, the frequency detection sensor stops an operation of the carrier.