Method for producing a bonding pad for a micromechanical sensor element

1. A method for producing a bonding pad for a micromechanical sensor element, comprising the following steps:

supplying a layered structure having a micromechanical functional layer on a top face of the layered structure;

depositing a first metal layer of a first thickness onto a top face of the functional layer, and depositing a second metal layer of a second thickness onto the first metal layer, wherein either only the first layer or only the second layer is formed in a border region extending around a bonding pad region;

covering a protective layer over a top face of the second metal layer in the bonding pad region and over the first or second metal layer in an inner peripheral portion of the border region, the inner peripheral portion adjoining the bonding pad region;

etching the first or second layer at least in an outer peripheral portion of the border region down to the top face of the functional layer to provide an exposed outer portion of the border region, wherein the inner peripheral portion of the border region remains covered with the first layer;

removing the protective layer;

carrying out an etching process in the exposed outer portion of the border region starting from the top face of the layered structure, wherein a bonding pad region having the bonding pad is released from a surrounding bonding frame region, wherein the second layer is used as an etching mask; and

removing the first or second metal layer from the inner peripheral portion of the border region using an unmasked etching process so as to obtain a bonding pad having a peripheral edge region, wherein the edge region is inwardly set back from a peripheral side face of the bonding pad region of the functional layer.

2. The method as recited in claim 1 , wherein, before the bonding frame region is released, a cap element is fastened to the top face of the functional layer next to the bonding pad by way of a bonding border, and wherein a top face of the cap element is covered with a second protective layer.

3. The method as recited in claim 1 , wherein the bonding pad includes a plurality of bonding pads, and wherein a bonding border for connecting a cap element to the functional layer is produced next to the bonding pads at the same time as the bonding pads using the first and/or second layer.

4. The method as recited in claim 1 , wherein the border is formed having a width of around 1.5 μm to 3 μm.

5. The method as recited in claim 1 , wherein the first metal layer is deposited at a thickness that is at least 20% greater than the second metal layer.

6. The method as recited in claim 1 , wherein the second metal layer is deposited at a thickness that is at least 20% greater than the first metal layer.

7. The method as recited in claim 1 , wherein the first metal layer is deposited at a thickness of around 1 μm.

8. The method as recited in claim 1 , wherein the second metal layer is deposited at a thickness of around 0.5 μm.

9. The method as recited in claim 1 , wherein the second metal layer or the first metal layer is removed from the border region using a dry ion beam etching process, wherein the first or second metal layer is non-selectively stripped using a plasma having an argon ion beam.

10. The method as recited in claim 1 , wherein the first metal layer and the second metal layer are deposited from the same material or from different materials.

11. The method as recited in claim 1 , wherein the first metal layer and/or the second metal layer consists of aluminum or at least includes aluminum.

12. The method as recited in claim 1 , wherein the first layer includes titanium or consists of titanium, and wherein the second layer includes aluminum or consists of aluminum.

13. The method as recited in claim 1 , wherein the bonding pad includes a plurality of bonding pads, and wherein, for the purpose of separating micromechanical sensor elements from an array of sensor elements, a film is applied to a top face of the sensor elements and to the bonding pads of the sensor elements, wherein the sensor elements are separated from one another, and wherein the film is then removed from the sensor elements again.

14. A micromechanical sensor element, comprising:

at least one bonding pad, the at least one bonding pad having been produced by the steps of the method of claim 1 .