IP Library › Granted Patent US 12,405,390
Granted Patent B2
US 12,405,390 · App. 17/794,774 · Granted Sep 2, 2025

Control apparatus, system, method, and program

Inventors: Takuto Sakumura (Tokyo, JP); Yasukazu Nakaye (Tokyo, JP); Tetsuya Ozawa (Tokyo, JP); Kazuyuki Matsushita (Tokyo, JP)
Assignee: Rigaku Corporation
G01T1/17G01T1/247
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Quick Facts
Patent No.
US 12,405,390
App. No.
17/794,774
Granted
Sep 2, 2025
Kind
B2
Abstract

A control apparatus, system, method and program that enable simultaneous measurement of counts of multiple energy ranges in an efficient configuration are provided. A control apparatus 200 for controlling an X-ray detector 100 and outputting a measurement result comprises a setting section 220 configured to set the energy range of X-rays to be detected for each unit region of the X-ray detector 100 , a data management section 250 configured to acquire a count value of the set energy range for each unit region as measurement data by a result of the X-ray measurement, and an outputting section 270 configured to output the measurement data. Thus, counting of multiple energy ranges can simultaneously be measured.

Claims (43)

1. An X-ray measurement system comprising:

an X-ray measurement apparatus having an X-ray detector; and

a control apparatus for controlling the X-ray detector and outputting a measurement result, wherein

the control apparatus comprising or configured to set an energy range of X-rays to be detected for each unit region of the X-ray detector, the X-ray detector being capable of setting only a single energy range for each unit area, acquire a count value of the set energy, range for each unit region as measurement data by a result of the X-ray measurement, and output the measurement data,

the process or s a pair of upper and lower limits of different energy ranges for respective unit regions in at least two or more unit regions, and

the processor performs at least one of the zero point shift and gain change of a signal input by X-ray detection for each unit region with respect to a global threshold constant in all the regions to set the energy range.

2. The X-ray measurement system according to claim 1 , wherein the processor performs the zero point shift by changing setting of a DA converter in the X-ray detector.

3. The X-ray measurement system according to claim 1 , wherein the processor sets the energy range in each of one or a plurality of aggregation regions which are formed by aggregation of the unit regions adjacent to each other in the X-ray detector and having an arbitrary size and shape.

4. The X-ray measurement system according to claim 1 , wherein the processor sets each of a plurality of types of energy ranges to be distributed to each unit region on the receiving surface.

5. The X-ray measurement system according to claim 4 , the processor sets a repeating unit region including one unit region of all types of the energy range to be periodically repeated.

6. The X-ray measurement system according to claim 1 , wherein one type of an X-ray source is used even for the set different energy ranges for the respective unit regions.

7. The X-ray measurement system according to claim 1 , wherein

the processor sets the pair of upper and lower limits of different energy ranges for the respective unit regions in the at least two or more unit regions to set two or more energy ranges for one type of X-ray source.

8. The X-ray measurement system according to claim 1 , wherein

one area measures Kα radiation, the other area measures Kβ radiation.

9. The X-ray measurement system according to claim 1 , wherein

the processor sets the pair of upper and lower limits of different energy ranges for the respective unit regions in the at least two or more unit regions to set two or more energy ranges for one type of X-ray source, and

one area measures Kα radiation, the other area measures Kβ radiation.

10. A control apparatus for controlling an X-ray detector and outputting a measurement result, comprising:

a processor configured to set an energy range of X-rays to be detected for each unit region of the X-ray detector,

acquire a count value of the set energy range for each unit region as measurement data by a result of the X-ray measurement, and

output the measurement data, wherein

the processor sets a pair of upper and lower limits of different energy ranges in at least two or more unit regions, wherein

the X-ray detector is capable of acquiring images with settings synchronized with movement,

the processor allocates each energy range for each line perpendicular to the movement direction of the X-ray detector in the acquisition of images with settings synchronized with movement, each of the lines being configured of the unit regions, and

the processor outputs count values of all detection regions reconstructed for each of the set energy ranges.

11. A method for simultaneously measuring X-rays of different energies, comprising steps of:

setting an energy range of X-rays to be detected for each unit region of an X-ray detector, said setting only a single energy range for each unit area,

performing X-ray measurement using the X-ray detector,

acquiring a count value as measurement data in the set energy range for each unit region by a result of the X-ray measurement,

outputting the measurement data, wherein

a pair of upper and lower limits of different energy ranges for each respective unit region is set in at least two or more unit regions in setting the energy ranges, and

performing at least one of the zero point shift and gain change of a signal input by X-ray detection for each unit region with respect to a global threshold constant in all the regions to set the energy range.

12. The method according to claim 11 , wherein the X-ray detector is a two-dimensional detector, and in the detecting step, a sample is irradiated with X-rays of a specific wavelength and scattered X-rays are detected by the X-ray detector, thereby diffraction X-rays and fluorescent X-rays are detected simultaneously.

13. The method according to claim 11 , wherein the X-ray detector is a two-dimensional detector, and in the detecting step, a sample is irradiated with white X-rays and scattered X-rays are detected by the X-ray detector.

14. The method according to claim 11 , wherein one type of an X-ray source is used even for the set different energy ranges for the respective unit regions.

15. A non-transitory computer readable recording medium having recorded thereon a program for controlling an X-ray detector and outputting measurement results, the program making a computer execute processes of:

setting an energy range of X-rays to be detected for each unit region of an X-ray detector, said setting only a single energy range for each unit area,

acquiring a count value as measurement data in the set energy range for each unit region by a result of X-ray measurement,

outputting the measurement data, wherein

a pair of upper and lower limits of different energy ranges for respective unit region is set in at least two or more unit regions in setting the energy ranges, and

performing at least one of the zero point shift and gain change of a signal input by X-ray detection for each unit region with respect to a global threshold constant in all the regions to set the energy range.

16. The non-transitory computer readable recording medium according to claim 15 , wherein one type of an X-ray source is used even for the set different energy ranges for the respective unit regions.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 22, 2022
From: SAKUMURA, TAKUTO; NAKAYE, YASUKAZU; OZAWA, TETSUYA; MATSUSHITA, KAZUYUKI
To: RIGAKU CORPORATION
Reel/Frame 060595/0325 →
Priority Claims (1)
JP 2020-011214 · Jan 27, 2020 · national
Continuity (1)
Related Publication 20230115151A1 · Apr 13, 2023
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