IP Library Granted Patent US 12,411,270
Granted Patent B2
US 12,411,270 · App. 17/890,113 · Granted Sep 9, 2025

Optical diffuser

Inventors: Simon Guillaumet (Grenoble, FR); Benjamin Vianne (Le Cheylas, FR); Stephane Zoll (Froges, FR)
Assignee: STMicroelectronics (Crolles 2) SAS
G02B5/0278G02B5/0242G02B5/0268
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Quick Facts
Patent No.
US 12,411,270
App. No.
17/890,113
Granted
Sep 9, 2025
Kind
B2
Abstract

The present description concerns an optical diffuser including a first layer having an electrically-conductive track formed therein, and a second layer, having the first layer resting thereon resting thereon, and having at least two electrically-conductive pillars extending across the entire thickness of the second layer formed therein. The second layer includes at least one first region located under the conductive track comprising no pillar.

Claims (31)

1. An optical diffuser comprising:

a first layer having an electrically-conductive track; and

a second layer, said first layer being on the second layer, the second layer having at least two electrically-conductive pillars extending across the entire thickness of said second layer, the second layer including at least one first region that is located under said conductive track and that includes no pillar.

2. The optical diffuser according to claim 1 , wherein said first region is located under said conductive track and extends along a periphery of said conductive track.

3. The optical diffuser according to claim 1 , wherein said first region is under said conductive track and at a maximum distance of 1.2 micrometers from said conductive track.

4. The optical diffuser according to claim 1 , wherein each of said pillars is inscribed within a right circular cylinder having a diameter in a range from 100 to 500 nanometers.

5. The optical diffuser according to claim 1 , wherein said pillars are arranged in a grating and spaced apart from one another by a pitch.

6. The optical diffuser according to claim 5 , wherein the pitch is greater than or equal to 400 nanometers.

7. The optical diffuser according to claim 1 , wherein said pillars are made of a material selected from a group of materials including: amorphous silicon, polysilicon, and a material having an optical index different from that of a material of the second layer.

8. The optical diffuser according to claim 1 , wherein the electrically-conductive track includes a conductive portion made of a first material surrounded with an encapsulation layer made of a second material.

9. The optical diffuser according to claim 8 , wherein the conductive portion has a width in a range from 200 to 400 nanometers.

10. The optical diffuser according to claim 8 , wherein the conductive portion has a width in the order of 320 nanometers.

11. The optical diffuser according to claim 8 , wherein the encapsulation layer has a width ranging between 400 and 800 nanometers.

12. The optical diffuser according to claim 8 , wherein the encapsulation layer has a width in the order of 570 nm.

13. The optical diffuser according to claim 8 , wherein the first material is selected from a group of materials including: copper and indium-tin oxide.

14. The optical diffuser according to claim 8 , wherein the second material is silicon nitride.

15. A method of manufacturing an optical diffuser, the method comprising;

forming a first layer;

forming an electrically-conductive track in the first layer;

forming a second layer, the first layer being on the second layer; and

forming at least two electrically-conductive pillars in the second layer, the pillars extending across the entire thickness of the second layer, the second layer including at least one first region that is located under the conductive track and that includes no pillar.

16. The method of claim 15 , wherein the second layer includes a first material having a first optical index, and the pillars include a second material having a second optical index different from the first material.

17. An optical diffuser, comprising:

a first layer have a first surface and a second surface opposite to the first surface;

a plurality of conductive pillars in the first layer and extending from the first surface to the second surface of the first layer, the plurality of conductive pillars being spaced from each other by portions of the first layer;

a second layer on the second surface of the first layer; and

a conductive track in the second layer and spaced from the second surface of the first layer by the second layer, the conductive track directly overlying the portions of the first layer.

18. The optical diffuser of claim 17 , wherein the conductive track includes a conductive core and an encapsulation layer on the conductive core.

19. The optical diffuser of claim 17 , wherein each of the plurality of conductive pillars is spaced from at least one of the portions of the first layer by a distance greater than or equal to 1.2 micrometers.

20. The optical diffuser of claim 17 , further comprising:

a transparent layer on the second layer, the conductive track being spaced from the transparent layer by the second layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 21, 2022
From: ZOLL, STEPHANE
To: STMICROELECTRONICS (CROLLES 2) SAS
Reel/Frame 061497/0942 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2022
From: GUILLAUMET, SIMON; VIANNE, BENJAMIN
To: STMICROELECTRONICS (CROLLES 2) SAS
Reel/Frame 061064/0389 →
Priority Claims (1)
FR 2108931 · Aug 26, 2021 · national
Continuity (1)
Related Publication 20230068198A1 · Mar 2, 2023
References Cited (5)
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US 20160018572A1 · Katsuta et al. · 2016 [cited by applicant]
US 20170192137A1 · Sakano et al. · 2017 [cited by applicant]
US 20250048760A1 · Ho · 2025 [cited by examiner]
FR 3102298A1 · 2021 [cited by applicant]