Transistor, memory device and manufacturing method of memory device
A transistor includes a first semiconductor layer, a second semiconductor layer, a semiconductor nanosheet, a gate electrode and source and drain electrodes. The semiconductor nanosheet is physically connected to the first semiconductor layer and the second semiconductor layer. The gate electrode wraps around the semiconductor nanosheet. The source and drain electrodes are disposed at opposite sides of the gate electrode. The first semiconductor layer surrounds the source electrode, the second semiconductor layer surrounds the drain electrode, and the semiconductor nanosheet is disposed between the source and drain electrodes.
1. A transistor, comprising:
a first semiconductor layer, a second semiconductor layer and a semiconductor nanosheet physically connected to the first semiconductor layer and the second semiconductor layer;
a gate electrode, wrapping around the semiconductor nanosheet; and
source and drain electrodes at opposite sides of the gate electrode, wherein the first semiconductor layer surrounds the source electrode, the second semiconductor layer surrounds the drain electrode, and the semiconductor nanosheet is disposed between the source and drain electrodes, wherein the first semiconductor layer is disposed on opposite surfaces and sidewall surfaces of the source electrode, and the second semiconductor layer is disposed on opposite surfaces and sidewall surfaces of the drain electrode.
2. The transistor of claim 1 , further comprising a memory layer between the gate electrode and the semiconductor nanosheet, wherein a surface of the gate electrode is substantially coplanar with surfaces of the memory layer, the first semiconductor layer and the second semiconductor layer.
3. The transistor of claim 2 , further comprising a dielectric layer surrounded by the memory layer, wherein a surface of the dielectric layer is substantially coplanar with the surfaces of the memory layer, the first semiconductor layer, the second semiconductor layer and the gate electrode.
4. The transistor of claim 1 , further comprising a memory layer between the gate electrode and the semiconductor nanosheet and a dielectric layer surrounded by the memory layer, wherein a surface of the dielectric layer is substantially coplanar with surfaces of the memory layer and the gate electrode.
5. The transistor of claim 4 , wherein the first semiconductor layer is disposed between the memory layer and the source electrode, and the second semiconductor layer is disposed between the memory layer and the drain electrode.
6. The transistor of claim 1 , further comprising a dielectric layer below the source and drain electrodes, wherein the gate electrode has a first width in the dielectric layer and a second width between the source and drain electrodes, and the second width is smaller than the first width.
7. A memory device, comprising:
a plurality of memory cells, comprising:
plural pairs of source and drain electrodes separated from each other;
a plurality of semiconductor nanosheets, wherein each semiconductor nanosheet is disposed between each pair of source and drain electrodes;
a gate electrode, continuously wrapping around the semiconductor nanosheets, wherein the gate electrode is continuously disposed between the plural pairs of source and drain electrodes; and
a memory layer, between the gate electrode and the semiconductor nanosheets, wherein the gate electrode has a cross shape at an intersection of the plural pairs of source and drain electrodes.
8. The memory device of claim 7 , further comprising a plurality of semiconductor layers respectively surrounding the plural pairs of source and drain electrodes, wherein the semiconductor layers are physically connected to the semiconductor nanosheets, respectively.
9. The memory device of claim 8 , wherein a surface of the gate electrode is substantially coplanar with surfaces of the memory layer and the semiconductor layers.
10. The memory device of claim 7 , further comprising a first dielectric layer and a second dielectric layer on the first dielectric layer, wherein the memory cells are disposed on the first dielectric layer, and a first surface of the second dielectric layer is substantially coplanar with first surfaces of the memory layer and the gate electrode.
11. The memory device of claim 10 , wherein the memory layer is further disposed between the first dielectric layer and the second dielectric layer.
12. The memory device of claim 10 , wherein the gate electrode and the second dielectric layer are extended along a first direction respectively, and the gate electrode and the second dielectric layer are arranged along a second direction substantially perpendicular to the first direction.
13. The memory device of claim 10 , wherein the second dielectric layer is in direct contact with the gate electrode.
14. The memory device of claim 10 , wherein the second dielectric layer has a cross shape at an intersection of the plural pairs of source and drain electrodes.
15. The transistor of claim 7 , wherein the memory layer includes a ferroelectric material.
16. A manufacturing method of a memory device, comprising:
forming a first semiconductor material over a first dielectric layer;
forming a first conductive material on the first semiconductor material;
patterning the first conductive material to form plural pairs of source and drain electrodes separated from each other;
forming a second semiconductor material on the plural pairs of source and drain electrodes and the first semiconductor material;
removing portions of the first semiconductor material, the second semiconductor material and the first dielectric layer respectively between each pair of source and drain electrodes, to form a plurality of semiconductor nanosheets respectively between each pair of source and drain electrodes and a plurality of first trenches respectively below the semiconductor nanosheets; and
forming a memory layer and a gate electrode to wrap around the semiconductor nanosheets.
17. The method of claim 16 , wherein removing the portions of the first semiconductor material, the second semiconductor material and the first dielectric layer between each pair of source and drain electrodes comprises:
removing the first semiconductor material, the second semiconductor material and the first dielectric layer respectively disposed between the source and drain electrodes of each pair, to form the semiconductor nanosheets and the first trenches; and
removing the first semiconductor material, the second semiconductor material and the first dielectric layer between the plural pairs of source and drain electrodes, to form second trenches, wherein the first trenches and the second trenches are alternately arranged.
18. The method of claim 17 , wherein the first semiconductor material, the second semiconductor material and the first dielectric layer between the plural pairs of source and drain electrodes are entirely removed.
19. The method of claim 17 , wherein forming the memory layer and the gate electrode comprises:
forming a memory material over the semiconductor nanosheets and the plural pairs of source and drain electrodes; and
forming a conductive material over the memory material to wrap the semiconductor nanosheets and fill the first trenches.
20. The method of claim 19 , wherein the memory material and the conductive material further form in the second trenches, and the method further comprises replacing the conductive material in the second trenches with a dielectric material.