Semiconductor light-emitting device and photocoupler
A semiconductor light-emitting device includes a GaAs (gallium arsenide) substrate of a cubic crystal, a light-emitting layer and a multi-semiconductor layer. The light-emitting layer being provided on the GaAs substrate. The light-emitting layer includes InGaAs (indium gallium arsenide) represented by a compositional formula InxGa1-xAs (0<x<1). The multi-semiconductor layer being provided on a front surface of the GaAs substrate between the GaAs substrate and the light-emitting layer. The multi-semiconductor layer is tilted with respect to a (100) plane of the cubic crystal. The multi-semiconductor layer includes a first layer and a second layer. The first and second layers are alternately stacked in a direction perpendicular to the front surface of the GaAs substrate. The first layer is different in composition from the second layer.
1. A semiconductor light-emitting device, comprising:
a GaAs (gallium arsenide) substrate of a cubic crystal;
a light-emitting layer provided on the GaAs substrate, the light-emitting layer including InGaAs (indium gallium arsenide) represented by a compositional formula In x Ga 1-x As (0<x<1); and
a multi-semiconductor layer provided on a front surface of the GaAs substrate between the GaAs substrate and the light-emitting layer, the multi-semiconductor layer being tilted with respect to a (100) plane of the cubic crystal,
the multi-semiconductor layer including a first layer and a second layer, the first layer and the second layer being alternately stacked in a direction perpendicular to the front surface of the GaAs substrate, the first layer being different in composition from the second layer.
2. The device according to claim 1 , wherein
the front surface of the GaAs substrate is tilted 8 degrees to 25 degrees with respect to the (100) plane of the cubic crystal.
3. The device according to claim 2 , wherein
the front surface of the GaAs substrate is tilted from the (100) plane in a direction toward a (011) plane, the (011) plane being orthogonal to the (100) plane.
4. The device according to claim 1 , wherein
the GaAs substrate further includes a back surface and a side surface, the back surface being at a side opposite to the front surface, the side surface being connected to the front surface and the back surface, and
at least one of the side surface of the GaAs substrate or a corner connecting the side surface and the back surface of the GaAs substrate includes a crystal dislocation extending in a direction toward the multi-semiconductor layer.
5. The device according to claim 4 , wherein
the crystal dislocation does not reach the light-emitting layer.
6. The device according to claim 4 , wherein
the side surface of the GaAs substrate is a (011) plane of the cubic crystal or a crystal plane equivalent to the (011) plane.
7. The device according to claim 6 , wherein
the crystal dislocation of the GaAs substrate extends along a crystal plane equivalent to a (111) plane of the cubic crystal.
8. The device according to claim 1 , wherein
the multi-semiconductor layer transmits light radiated from the light-emitting layer.
9. The device according to claim 1 , wherein
the first layer of the multi-semiconductor layer is an InAlP (indium aluminum phosphide) layer represented by a compositional formula In y Al 1-y P (0<y<1), and
the second layer is a GaAs layer or a AlGaAs (aluminum gallium arsenide) layer represented by a compositional formula Al v Ga 1-v As (0≤v<1).
10. The device according to claim 1 , wherein
the first layer of the multi-semiconductor layer is an InGaAs layer, and
the second layer is a GaAsP (gallium arsenide phosphide) layer represented by a compositional formula GaAs w P 1-w (0<w<1).
11. The device according to claim 1 , wherein
the light-emitting layer is included in an epitaxial layer,
the epitaxial layer includes an upper surface positioned at a side opposite to the GaAs substrate, and
the epitaxial layer includes a partial recess at an outer edge of the upper surface.
12. A photocoupler, comprising:
a light-emitting device;
a first resin sealing the light-emitting device; and
a second resin covering the first resin and the light-emitting device sealed by the first resin, the second resin having a hardness greater than a hardness of the first resin,
the light-emitting device including a GaAs substrate of a cubic crystal, a light-emitting layer and a multi-semiconductor layer,
the light-emitting layer being provided on the GaAs substrate, and including InGaAs represented by a compositional formula In x Ga 1-x As (0<x<1),
the multi-semiconductor layer being provided on a front surface of the GaAs substrate between the GaAs substrate and the light-emitting layer, the multi-semiconductor layer being tilted with respect to a (100) plane of the cubic crystal,
the multi-semiconductor layer including a first layer and a second layer, the first layer and the second layer being alternately stacked in a direction perpendicular to the front surface of the GaAs substrate, the first layer being different in composition from the second layer.