Semiconductor device structure and methods of forming the same
View Patent ↗A semiconductor device structure, along with methods of forming such, are described. The structure includes a source/drain region and a first conductive feature disposed below the source/drain region. The first conductive feature is electrically connected to the source/drain region. The structure further includes a second conductive feature disposed over the source/drain region, and the second conductive feature is electrically connected to the source/drain region. The structure further includes a third conductive feature disposed on and in contact with a first portion of the second conductive feature and a dielectric layer disposed on and in contact with a second portion of the second conductive feature.
1. A method, comprising:
forming a source/drain region over a substrate;
forming a first conductive feature electrically connected to the source/drain region;
flipping over the substrate;
depositing a hard mask layer on a dielectric layer;
forming a second conductive feature in the dielectric layer and the hard mask layer, wherein the second conductive feature is electrically connected to the source/drain region;
forming an opening in the dielectric layer to expose at least a portion of the second conductive feature;
depositing a blocking layer on the exposed portion of the second conductive feature;
depositing a barrier layer on the dielectric layer;
removing the blocking layer; and
depositing a third conductive feature on the barrier layer, wherein the third conductive feature is in contact with the second conductive feature.
2. The method of claim 1 , wherein the barrier layer is formed on the hard mask layer.
3. The method of claim 2 , further comprising forming a fourth conductive feature in contact with the second conductive feature and the third conductive feature.
4. The method of claim 3 , wherein the blocking layer is deposited on side surfaces and top surface of the second conductive feature.
5. The method of claim 4 , wherein the third conductive feature is in contact with the side surfaces of the second conductive feature.
6. A method, comprising:
forming a source/drain region over a substrate;
flipping over the substrate;
depositing a hard mask layer on the substrate;
forming a first conductive feature in the hard mask layer and the substrate, wherein the first conductive feature is electrically connected to the source/drain region;
forming an opening in the hard mask layer to expose an upper portion of the first conductive feature, wherein the upper portion comprises a top surface and side surfaces;
depositing a blocking layer on the exposed upper portion of the first conductive feature;
depositing a barrier layer on the hard mask layer;
removing the blocking layer to expose the upper portion of the first conductive feature; and
depositing a second conductive feature in the opening, wherein the second conductive feature is in contact with the side surfaces of the upper portion of the first conductive feature.
7. The method of claim 6 , wherein the barrier layer is deposited on a top surface and side surfaces of the hard mask layer.
8. The method of claim 7 , further comprising performing a planarization process to remove a portion of the second conductive feature and a portion of the barrier layer deposited on the top surface of the hard mask layer.
9. The method of claim 8 , wherein a top surface of the second conductive feature is coplanar with the top surface of the upper portion of the first conductive feature.
10. The method of claim 6 , wherein the barrier layer is deposited on the substrate, and the second conductive feature is deposited on the barrier layer.
11. The method of claim 6 , wherein the first and second conductive features include a same material.
12. The method of claim 6 , wherein the first and second conductive features include different materials.
13. The method of claim 6 , wherein the blocking layer comprises one or more self-assembled monolayers.
14. The method of claim 13 , wherein the one or more self-assembled monolayers comprise an azole group-containing compound or a compound terminated with an alkyne group.
15. A method, comprising:
forming a source/drain region over a substrate;
flipping over the substrate;
depositing a hard mask over an isolation region;
forming a first conductive feature in the hard mask layer, wherein the first conductive feature is electrically connected to the source/drain region;
forming an opening to expose an upper portion of the first conductive feature;
depositing a first blocking layer on the exposed upper portion of the first conductive feature;
depositing a first barrier layer on the hard mask layer and the isolation region;
removing the first blocking layer;
depositing a second conductive feature in the opening;
forming a dielectric layer on the hard mask layer; and
depositing a third conductive feature on the first and second conductive features.
16. The method of claim 15 , further comprising depositing a second blocking layer on the first and second conductive features.
17. The method of claim 16 , further comprising depositing a second barrier layer on the dielectric layer and removing the second blocking layer.
18. The method of claim 17 , wherein the third conductive feature is in contact with the second barrier layer.
19. The method of claim 1 , wherein the exposed portion of the second conductive feature comprises a top surface and side surfaces.
20. The method of claim 15 , wherein the upper portion of the first conductive feature comprises a top surface and side surfaces.