Granted Patent B2

US 12,426,428 · App. 17/886,850 · Granted Sep 23, 2025

Inventors: Qiming Li (Albuquerque, NM); Qunchao Xu (Shanghai, CN)

Assignee: Jade Bird Display (Shanghai) Limited

H10H29/142

Abstract

Claims (62)

1. A method for fabricating a micro light emitting diode (LED) display panel, comprising:

forming a stack structure on a wafer substrate, the stack structure comprising a first metal layer, a first type of light emitting layer, a second metal layer, and a second type of light emitting layer in an order from bottom to top;

forming a plurality of trenches in the stack structure, the plurality of trenches defining a plurality of micro LED display panel areas;

after forming the plurality of trenches in the stack structure, patterning the second type of light emitting layer and the second metal layer until portions of top surfaces of the first type of light emitting layer are exposed;

after patterning the second type of light emitting layer and the second metal layer, selectively etching the stack structure to expose a side surface of the first metal layer, thereby forming a plurality of first LEDs and a plurality of second LEDs in each of the micro LED display panel areas, each of the first LEDs including the first metal layer and the first type of light emitting layer, and each of the second LEDs including the first metal layer, the first type of light emitting layer, the second metal layer, and the second type of light emitting layer;

removing a portion of the second type of light emitting layer in at least one of the second LEDs, to expose a top portion of the second metal layer in the second LED;

forming a first electrical connector on the exposed top portion and a side wall of the second metal layer in the second LED, and on side walls of the first type of light emitting layer and the first metal layer in the second LED, to electrically connect the first metal layer and the second metal layer in the second LED; and

cutting the wafer substrate to form a plurality of micro LED display panels.

2. The method of claim 1 , wherein the forming the stack structure on the wafer substrate comprises:

sequentially forming the first metal layer and the first type of light emitting layer on the wafer substrate;

forming a first metal bonding layer on top of the first type of light emitting layer;

forming the second type of light emitting layer and a second metal bonding layer on a first base from bottom to top of the first base;

bonding the first metal bonding layer and the second metal bonding layer to form the second metal layer; and

removing the first base.

3. The method of claim 2 , wherein the forming the first metal layer and the first type of light emitting layer on the wafer substrate from bottom to top comprises:

forming a third metal bonding layer on the wafer substrate;

forming the first type of light emitting layer and a fourth metal bonding layer on a second base from bottom to top of the first base;

bonding the third metal bonding layer and the fourth metal bonding layer to form the first metal layer; and

removing the second base.

4. The method of claim 2 , further comprising:

before forming the first metal bonding layer on top of the first type of light emitting layer, thinning the first type of light emitting layer.

5. The method of claim 2 , further comprising:

thinning the second type of light emitting layer.

6. The method of claim 2 , further comprising:

forming micro-gap structures in at least one of the first type of light emitting layer or the second type of light emitting layer.

7. The method of claim 2 , further comprising:

forming micro-gap structures in both of the first type of light emitting layer and the second type of light emitting layer,

wherein the micro-gap structures in the first type of light emitting layer are staggered relative to the micro-gap structures in the second type of light emitting layer.

8. The method of claim 1 , further comprising:

forming a top electrode layer on top of at least one first LED and at least one second LED in each micro LED display panel area.

9. The method of claim 8 , further comprising:

forming an isolation layer covering at least one first LED and at least one second LED;

forming a first opening and a second opening in the isolation layer, the first opening exposing a portion of the first type of light emitting layer in the first LED, and the second opening exposing a portion of the second type of light emitting layer in the second LED; and

forming the top electrode layer on the wafer substrate, the top electrode layer contacting the first type of light emitting layer in the first LED via the first opening and contacting the second type of light emitting layer in the second LED via the second opening.

10. The method of claim 1 , wherein the stack structure further comprises a third metal layer formed on top of the second type of light emitting layer, and a third type of light emitting layer formed on top of the third metal layer,

the method further comprising patterning the third type of light emitting layer and the third metal layer until a portion of the second type of light emitting layer is exposed, and

the selectively etching the stack structure further comprising selectively etching the stack structure to form the plurality of first LEDs, the plurality of second LEDs, and a plurality of third LEDs, each third LED including the first metal layer, the first type of light emitting layer, the second metal layer, the second type of light emitting layer, the third metal layer, and the third type of light emitting layer.

11. The method of claim 10 , wherein the forming the stack structure on the wafer substrate comprises:

forming the first metal layer, the first type of light emitting layer, the second metal layer, the second type of light emitting layer on the wafer substrate from bottom to top;

forming a first metal bonding layer on the second type of light emitting layer;

forming the third type of light emitting layer and a second metal bonding layer on a base from bottom to top of the base;

bonding the first metal bonding layer and the second metal layer to form the third metal layer; and

removing the base.

12. The method of claim 10 , further comprising:

thinning at least one of the first type of light emitting layer, the second type of light emitting layer, or the third type of light emitting layer.

13. The method of claim 10 , further comprising:

forming micro-gap structures in at least one of the first type of light emitting layer, the second type of light emitting layer, or the third type of light emitting layer.

14. The method of claim 10 , further comprising:

forming micro-gap structures in all of the first type of light emitting layer, the second type of light emitting layer, and the third type of light emitting layer,

wherein the micro-gap structures in the first type of light emitting layer are staggered relative to the micro-gap structures in the second type of light emitting layer, and

wherein the micro-gap structures in the second type of light emitting layer are staggered relative to the micro-gap structures in the third type of light emitting layer.

15. The method of claim 10 , further comprising:

electrically connecting the first metal layer, the second metal layer, and the third metal layer in each third LED.

16. The method of claim 15 , wherein the electrically connecting the first metal layer, the second metal layer, and the third metal layer in at least one of the third LEDs comprises:

removing a portion of the third type of light emitting layer in the third LED, so as to expose a top portion of the third metal layer in the third LED; and

forming a second electrical connector on the exposed top and a side wall of the third metal layer in the third LED, and on side walls of the second type of light emitting layer, the second metal layer, the first type of light emitting layer, and the first metal layer in the third LED.

17. The method of claim 10 , further comprising:

forming a top electrode layer on top of at least one first LED, at least one second LED, and at least one third LED in each micro LED display panel area.

18. The method of claim 17 , further comprising:

forming an isolation layer covering at least one first LED, at least one second LED, and at least one third LED;

forming a first opening, a second opening, and a third opening in the isolation layer, the first opening exposing a portion of the first type of light emitting layer in the first LED, the second opening exposing a portion of the second type of light emitting layer in the second LED, and the third opening exposing a portion of the third type of light emitting layer in the third LED; and

forming the top electrode layer on the wafer substrate, the top electrode layer contacting the first type of light emitting layer in the first LED via the first opening, contacting the second type of light emitting layer in the second LED via the second opening, and contacting the third type of light emitting layer in the third LED via the third opening.

Assignments (3)

Continuity (3)

References Cited (49)