Laminated member
The present invention relates to a laminated member including: a glass member having a linear transmittance at a wavelength of 850 nm of 80% or more; a bonding layer including a resin and lying on the glass member; and a Si—SiC member lying on the bonding member, in which the Si—SiC member has an average linear expansion coefficient α at from 20° C. to 200° C. of from 2.85 ppm/° C. to 4.00 ppm/° C.
1. A laminated member, comprising:
a glass member having a linear transmittance at a wavelength of 850 nm of 80% or more and a thickness in a range of 3 mm to 40 mm;
a bonding layer comprising a resin and formed on the glass member; and
a Si—SiC member formed on the bonding layer and having a thickness in a range of 0.5 to 15mm, such that the Si—SiC member has an average linear expansion coefficient α at 20 to 200° C. of 2.85 to 4.00 ppm/° C.
2. The laminated member according to claim 1 , wherein the glass member has an average linear expansion coefficient δ at 20 to 200° C. of to 1.50 to 5.00 ppm/° C.
3. The laminated member according to claim 1 , wherein the glass member has a composition comprising 55.0 to 85.0 mol % of SiO 2 , 1.5 to 14.5 mol % of Al 2 O 3 , 3.0 to 14.0 mol % of B 2 O 3 , and 0 to 3.5 mol % of P 2 O 5 , as represented by mole percent based on oxides, and has a total content of the SiO 2 , the Al 2 O 3 , the B 2 O 3 , and the P 2 O 5 in a range of 70.0 to 97.0% as represented by mole percent based on oxides.
4. The laminated member according to claim 3 , wherein the glass member has a content of the B 2 O 3 in a range of 8.5 mol % or less.
5. The laminated member according to claim 1 , wherein the glass member comprises from has a composition comprising 0 to 13.0 mol % of Na 2 O, as represented by mole percent based on oxides.
6. The laminated member according to claim 1 , wherein the glass member has a composition comprising 0.0001 to 0.0115 mol % of Fe 2 O 3 , as represented by mole percent based on oxides.
7. The laminated member according to claim 1 , wherein the glass member has the linear transmittance of 90% or more at a wavelength of 850 nm.
8. The laminated member according to claim 1 , wherein the glass member has a thickness of 5 mm or more, and the Si—SiC member has a thickness of 1.5 mm or more.
9. The laminated member according to claim 1 , wherein the Si—SiC member has a thermal conductivity in a range of 190 to 300 W/m·K at 20° C.
10. The laminated member according to claim 1 , wherein the laminated member has an absolute value |α−β| of 2.00 ppm/° C. or less, where the absolute value |α−β| is a value obtained by subtracting an average linear expansion coefficient β of the glass member at 20 to 200° C. from the average linear expansion coefficient a of the Si—SiC member at 20 to 200° C.
11. The laminated member according to claim 1 , wherein the Si—SiC member has a Young's modulus in a range of 300 to 420 GPa.
12. The laminated member according to claim 1 , wherein the Si—SiC member has a content ratio of a metallic Si in a range of 8 to 60 mass %.
13. The laminated member according to claim 1 , wherein the resin has a heat resistance temperature in a range of 120 to 300° C.
14. The laminated member according to claim 1 , wherein the bonding layer has an average linear expansion coefficient γ at 20 to 200° C. in a range of 2 to 200 ppm/° C.
15. The laminated member according to claim 1 , wherein the laminated member has a density in a range of 2.40 to 2.85 g/cm 3 .
16. The laminated member according to claim 1 , wherein the laminated member has an amount of bending of 0.25 mm or less.
17. The laminated member according to claim 1 , further comprising:
a second bonding layer lying on the Si—SiC member; and
a second Si—SiC member bonded to the Si—SiC member via the second bonding layer.
18. The laminated member according to claim 2 , wherein the glass member has a composition comprising 55.0 to 85.0 mol % of SiO 2 , 1.5 to 14.5 mol % of Al 2 O 3 , 3.0 to 14.0 mol % of B 2 O 3 , and 0 to 3.5 mol % of P 2 O 5 , as represented by mole percent based on oxides, and has a total content of the SiO 2 , the Al 2 O 3 , the B 2 O 3 , and the P 2 O 5 in a range of 70.0 to 97.0% as represented by mole percent based on oxides.
19. The laminated member according to claim 18 , wherein the glass member has a content of the B 2 O 3 in a range of 8.5 mol % or less.
20. The laminated member according to claim 2 , wherein the glass member has a composition comprising 0 to 13.0 mol % of Na 2 O, as represented by mole percent based on oxides.