Method of supplying chemical liquid
A method includes moving a drum containing a chemical liquid into a chamber of a chemical liquid supplying system. The drum is connected with a testing pipe. The chemical liquid is pumped from the drum to the testing pipe. A condition of the chemical liquid flowing through the testing pipe is monitored. Whether the chemical liquid is supplied to a processing tool is determined based on the condition of the chemical liquid.
1. A method, comprising:
moving a drum containing a chemical liquid into a chamber of a chemical liquid supplying system;
connecting the drum with a testing pipe;
pumping the chemical liquid from the drum to the testing pipe;
monitoring a condition of the chemical liquid flowing through the testing pipe; and
determining whether the chemical liquid is supplied to a processing tool based on the condition of the chemical liquid.
2. The method of claim 1 , further comprising:
closing a front door of the chamber to form an air-tight enclosure in the chamber.
3. The method of claim 1 , further comprising:
identifying the drum by scanning an RFID (radio-frequency identification) tag attached on the drum to reorganize what chemical liquid is intended to be stored in the drum.
4. The method of claim 1 , further comprising:
prior to connecting the drum with the testing pipe, producing an image of an outlet nozzle of the drum to determine a position of the outlet nozzle.
5. The method of claim 1 , further comprising:
creating an exhaust flow from the chamber prior to pumping the chemical liquid from the drum to the testing pipe.
6. The method of claim 5 , further comprising:
monitoring a condition of the exhaust flow.
7. The method of claim 1 , wherein a time period between pumping the chemical liquid from the drum to the testing pipe and monitoring the condition of the chemical liquid flowing through the testing pipe is about 1 minute to about 3 minutes.
8. A method comprising:
transporting a drum containing a chemical liquid in front of a front door of a chamber of a chemical liquid supplying system;
opening the front door of the chamber;
moving the drum into the chamber;
after moving the drum into the chamber, closing the front door of the chamber;
pumping the chemical liquid to a testing pipe in the chamber;
monitoring a condition of the chemical liquid flowing in the testing pipe; and
determining if the chemical liquid is acceptable for a process in a processing tool based on the condition of the chemical liquid.
9. The method of claim 8 , further comprising:
when the chemical liquid is not acceptable for the process in the processing tool, moving the drum out of the chamber.
10. The method of claim 8 , further comprising:
when the chemical liquid is acceptable for the process in the processing tool, supplying the chemical liquid to the processing tool.
11. The method of claim 8 , further comprising:
after closing the front door of the chamber, producing an exhaust flow from the chamber.
12. The method of claim 11 , wherein producing the exhaust flow from the chamber is performed prior to pumping the chemical liquid to the testing pipe in the chamber.
13. The method of claim 8 , further comprising:
re-circulating the chemical liquid from the testing pipe back to the drum.
14. A method, comprising:
moving a drum containing a chemical liquid into a chamber of a chemical liquid supplying system through a front door of the chemical liquid supplying system;
connecting the drum with a testing pipe;
pumping the chemical liquid from the drum to the testing pipe;
monitoring a condition of the chemical liquid flowing through the testing pipe; and
determining whether the chemical liquid is supplied to a processing tool based on the condition of the chemical liquid.
15. The method of claim 14 , further comprising:
closing the front door of the chamber.
16. The method of claim 14 , further comprising:
identifying the drum by scanning an RFID (radio-frequency identification) tag attached on the drum to reorganize what chemical liquid is intended to be stored in the drum.
17. The method of claim 14 , further comprising:
creating an exhaust flow from the chamber prior to pumping the chemical liquid from the drum to the testing pipe.
18. The method of claim 17 , further comprising:
monitoring a condition of the exhaust flow.
19. The method of claim 14 , further comprising:
re-circulating the chemical liquid from the testing pipe back to the drum.
20. The method of claim 14 , wherein a time period between pumping the chemical liquid from the drum to the testing pipe and monitoring the condition of the chemical liquid flowing through the testing pipe is about 1 minute to about 3 minutes.