Light detection apparatus, light detection system, electronic equipment, and mobile body
Provided is a light detection apparatus with high functionality. The light detection apparatus includes an effective region provided with a photoelectric converter that detects irradiation light and performs photoelectric conversion, and a peripheral region provided adjacent to the effective region. The photoelectric converter has a stacked structure including a first photoelectric conversion unit, a second photoelectric conversion unit, and a first optical filter. The first photoelectric conversion unit detects light in a first wavelength range of the irradiation light and performs photoelectric conversion. The second photoelectric conversion unit is provided so as to overlap with the first photoelectric conversion unit, detects light in a second wavelength range of the irradiation light, and performs photoelectric conversion. The first optical filter is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the light in the second wavelength range transmits more easily than the light in the first wavelength range. The peripheral region is provided with a second optical filter through which the light in the second wavelength range transmits more easily than the light in the first wavelength range.
1. A light detection apparatus, comprising:
an effective region provided with a photodetector that is configured to:
detect irradiation light; and
perform photoelectric conversion; and
a peripheral region provided adjacent to the effective region; wherein
the photodetector has a stacked structure including
a first photoelectric conversion unit that os configured to:
detect light in a first wavelength range of the irradiation light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, wherein the second photoelectric conversion unit is configured to:
detect light in a second wavelength range of the irradiation light; and
perform photoelectric conversion, and
a first optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the light in the second wavelength range transmits more easily than the light in the first wavelength range, and
the peripheral region is provided with a second optical filter through which the light in the second wavelength range transmits more easily than the light in the first wavelength range.
2. The light detection apparatus according to claim 1 , wherein the first optical filter and the second optical filter are provided at a same layer level.
3. The light detection apparatus according to claim 1 , wherein the first optical filter and the second optical filter include substantially a same material.
4. The light detection apparatus according to claim 1 , wherein
the effective region is provided with a plurality of photodetectors,
the first optical filter in each of the plurality of photodetectors is surrounded by a first light shielding member along a plane perpendicular to a thickness direction, the first light shielding member blocking at least the light in the second wavelength range, and
both of the first optical filter and the second optical filter include an organic material.
5. The light detection apparatus according to claim 4 , wherein a plurality of the first optical filters have substantially a same shape and substantially a same size.
6. The light detection apparatus according to claim 4 , wherein
the peripheral region is provided with a plurality of the second optical filters, and
each of the plurality of second optical filters is surrounded by a second light shielding member along the plane perpendicular to the thickness direction, the second light shielding member blocking at least the light in the second wavelength range.
7. The light detection apparatus according to claim 6 , wherein a first arrangement interval between a plurality of first light shielding members is substantially equal to a second arrangement interval between a plurality of the second light shielding members.
8. The light detection apparatus according to claim 6 , wherein the plurality of second optical filters have substantially a same shape and substantially a same size.
9. The light detection apparatus according to claim 8 , wherein the first optical filter and the second optical filter are provided at a same layer level.
10. The light detection apparatus according to claim 6 , further comprising a light shielding film provided so as to overlap with the second light shielding member.
11. The light detection apparatus according to claim 10 , wherein the light shielding film includes a metal material.
12. The light detection apparatus according to claim 11 , wherein the light shielding film reflects the light in the first wavelength range.
13. The light detection apparatus according to claim 1 , wherein the peripheral region is provided so as to surround the effective region.
14. The light detection apparatus according to claim 1 , wherein
the effective region is further provided with a first wiring layer that is provided between the first optical filter and the second photoelectric conversion unit, and
the peripheral region is further provided with a second wiring layer that is provided at a same layer level as the first wiring layer.
15. The light detection apparatus according to claim 14 , wherein
the peripheral region is further provided with a pad opening and a pad exposed to a bottom of the pad opening, and
the second wiring layer includes an end face exposed to a sidewall face of the pad opening.
16. The light detection apparatus according to claim 1 , wherein
the peripheral region is provided with a recess, and
the recess is filled with a resin material.
17. A light detection system, comprising:
a light-emitting apparatus that is configured to emit infrared light; and
a light detection apparatus, wherein
the light detection apparatus includes
an effective region provided with a photodetector that is configured to detect visible light from outside and the infrared light from the light-emitting apparatus, and
a peripheral region provided adjacent to the effective region,
the photodetector has a stacked structure including
a first photoelectric conversion unit that is configured to:
detect the visible light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, detects the infrared light, and performs photoelectric conversion, and
a first optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the infrared light transmits more easily than the visible light, and
the peripheral region is provided with a second optical filter through which the infrared light transmits more easily than the visible light.
18. Electronic equipment, comprising:
an optical unit;
a signal processing unit; and
a light detection apparatus, wherein
the light detection apparatus includes
an effective region provided with a photoelectric converter that is configured to:
detect irradiation light; and
perform photoelectric conversion, and
a peripheral region provided adjacent to the effective region,
the photoelectric converter has a stacked structure including
a first photoelectric conversion unit that is configured to:
detect light in a first wavelength range of the irradiation light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, wherein the second photoelectric conversion unit is configured to:
detect light in a second wavelength range of the irradiation light; and
perform photoelectric conversion, and
a first optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the light in the second wavelength range transmits more easily than the light in the first wavelength range, and
the peripheral region is provided with a second optical filter through which the light in the second wavelength range transmits more easily than the light in the first wavelength range.
19. A mobile body, comprising
a light detection system including a light-emitting apparatus that is configured to emit irradiation light and a light detection apparatus, wherein
the light detection apparatus includes
an effective region provided with a photoelectric converter that is configured to:
detect the irradiation light; and
perform photoelectric conversion, and
a peripheral region provided adjacent to the effective region, wherein the photoelectric converter has a stacked structure including
a first photoelectric conversion unit that is configured to:
detect light in a first wavelength range of the irradiation light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, wherein the second photoelectric conversion unit is configured to:
detect light in a second wavelength range of the irradiation light; and
perform photoelectric conversion, and
a first optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the light in the second wavelength range transmits more easily than the light in the first wavelength range, and
the peripheral region is provided with a second optical filter through which the light in the second wavelength range transmits more easily than the light in the first wavelength range.
20. A light detection apparatus, comprising:
an effective region provided with a photodetector that is configured to detect irradiation light; and
a peripheral region provided adjacent to the effective region and provided with a black level reference element that is configured to detect a black level reference value, wherein
the photodetector includes
a first photoelectric conversion unit that is configured to:
detect light in a first wavelength range of the irradiation light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, wherein the second photoelectric conversion unit is configured to:
detect light in a second wavelength range of the irradiation light; and
perform photoelectric conversion, and
an optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the light in the second wavelength range transmits more easily than the light in the first wavelength range, and
the black level reference element includes
a third photoelectric conversion unit that is configured to:
detect the light in the first wavelength range of the irradiation light; and
perform photoelectric conversion,
a fourth photoelectric conversion unit that is provided so as to overlap with the third photoelectric conversion unit, wherein the fourth photoelectric conversion unit is configured to:
detect the light in the second wavelength range of the irradiation light; and
perform photoelectric conversion,
a first light shielding unit that is provided opposite to the fourth photoelectric conversion unit as seen from the third photoelectric conversion unit, wherein the first light shielding unit is configured to suppress transmission of the irradiation light, and
a second light shielding unit that is provided between the third photoelectric conversion unit and the fourth photoelectric conversion unit, wherein the second light shielding unit is configured to suppress transmission of the irradiation light.
21. The light detection apparatus according to claim 20 , wherein at least one of the first light shielding unit and the second light shielding unit includes a metal layer including a metal material.
22. The light detection apparatus according to claim 21 , wherein the metal material includes at least one of Al (aluminum), W (tungsten), Ta (tantalum), TaN (tantalum nitride), Ti (titanium), and Cu (copper).
23. The light detection apparatus according to claim 20 , wherein the peripheral region is provided so as to surround the effective region.
24. The light detection apparatus according to claim 20 , wherein
the first photoelectric conversion unit and the third photoelectric conversion unit are integrally provided so as to extend from the effective region to the peripheral region at a first layer level, and
the second photoelectric conversion unit and the fourth photoelectric conversion unit are integrally provided so as to extend from the effective region to the peripheral region at a second layer level.
25. A light detection system, comprising:
a light-emitting apparatus that is configured to emit infrared light; and
a light detection apparatus, wherein
the light detection apparatus includes
an effective region provided with a photodetector that is configured to detect visible light from outside and the infrared light from the light-emitting apparatus, and
a peripheral region provided adjacent to the effective region and provided with a black level reference element that is configured to detect a black level reference value,
the photodetector has a first stacked structure including
a first photoelectric conversion unit that is configured to:
detect the visible light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, wherein the second photoelectric conversion unit is configured to:
detects the infrared light; and
perform photoelectric conversion, and
an optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the infrared light transmits more easily than the visible light, and
the black level reference element has a second stacked structure including
a third photoelectric conversion unit that is configured to:
detect the visible light; and
perform photoelectric conversion,
a fourth photoelectric conversion unit that is provided so as to overlap with the third photoelectric conversion unit, wherein the fourth photoelectric conversion unit is configured to:
detect the infrared light; and
perform photoelectric conversion,
a first light shielding unit that is provided opposite to the fourth photoelectric conversion unit as seen from the third photoelectric conversion unit, wherein the first light shielding unit is configured to suppress transmission of the visible light and transmission of the infrared light, and
a second light shielding unit that is provided between the third photoelectric conversion unit and the fourth photoelectric conversion unit, wherein the second light shielding unit is configured to suppress transmission of the visible light and transmission of the infrared light.
26. Electronic equipment comprising:
an optical unit;
a signal processing unit; and
a light detection apparatus, wherein
the light detection apparatus includes
an effective region provided with a photodetector that is configured to detect irradiation light, and
a peripheral region provided adjacent to the effective region and provided with a black level reference element that is configured to detect a black level reference value,
the photodetector has a first stacked structure including
a first photoelectric conversion unit that is configured to:
detect light in a first wavelength range of the irradiation light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, wherein the second photoelectric conversion unit is configured to:
detect light in a second wavelength range of the irradiation light; and
perform photoelectric conversion, and
an optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the light in the second wavelength range transmits more easily than the light in the first wavelength range, and
the black level reference element includes a second stacked structure including
a third photoelectric conversion unit that is configured to:
detect the light in the first wavelength range of the irradiation light; and
perform photoelectric conversion,
a fourth photoelectric conversion unit that is provided so as to overlap with the third photoelectric conversion unit, wherein the fourth photoelectric conversion unit is configured to:
detect the light in the second wavelength range of the irradiation light; and
perform photoelectric conversion,
a first light shielding unit that is provided opposite to the fourth photoelectric conversion unit as seen from the third photoelectric conversion unit and suppresses transmission of the irradiation light, and
a second light shielding unit that is provided between the third photoelectric conversion unit and the fourth photoelectric conversion unit, wherein the second light shielding unit is configured to suppress transmission of the irradiation light.
27. A mobile body, comprising
a light detection system including a light-emitting apparatus that is configured to emit irradiation light, and a light detection apparatus, wherein
the light detection apparatus includes
an effective region provided with a photoelectric converter that is configured to detect the irradiation light, and
a peripheral region provided adjacent to the effective region and provided with a black level reference element that is configured to detect a black level reference value,
a photodetector has a first stacked structure including
a first photoelectric conversion unit that is configured to:
detect light in a first wavelength range of the irradiation light; and
perform photoelectric conversion,
a second photoelectric conversion unit that is provided so as to overlap with the first photoelectric conversion unit, wherein the second photoelectric conversion unit is configured to:
detect light in a second wavelength range of the irradiation light, and performs photoelectric conversion; and
an optical filter that is provided between the first photoelectric conversion unit and the second photoelectric conversion unit and through which the light in the second wavelength range transmits more easily than the light in the first wavelength range, and
the black level reference element has a second stacked structure including
a third photoelectric conversion unit that detects the light in the first wavelength range of the irradiation light and performs photoelectric conversion,
a fourth photoelectric conversion unit that is provided so as to overlap with the third photoelectric conversion unit, wherein the fourth photoelectric conversion unit is configured to:
detect the light in the second wavelength range of the irradiation light; and
perform photoelectric conversion,
a first light shielding unit that is provided opposite to the fourth photoelectric conversion unit as seen from the third photoelectric conversion unit, wherein the first light shielding unit is configured to suppress transmission of the irradiation light, and
a second light shielding unit that is provided between the third photoelectric conversion unit and the fourth photoelectric conversion unit, wherein the second light is configured to suppress transmission of the irradiation light.