Pressure sensor assembly
In the following, a sensor assembly is described. According to an exemplary embodiment, the sensor assembly has a housing enclosing a pressure chamber filled with a medium, the housing having a first housing part and a second housing part, the first housing part being connected to the second housing part to seal the pressure chamber in a pressure-tight manner A sensor chip is arranged in the pressure chamber, substantially surrounded by the medium, and configured to measure a pressure of the medium. The sensor assembly also includes a plurality of connection pins which are fed through the first housing part (carrier) by pressure-tight bushings and which are electrically connected to the sensor chip. The sensor assembly also has stress relieving structures which are configured to mechanically decouple the first housing part and a pressure-sensitive element of the sensor chip.
1. A sensor assembly, comprising:
a housing enclosing a pressure chamber filled with a medium, the housing having a first housing part and a second housing part, the first housing part being connected to the second housing part to seal the pressure chamber in a pressure-tight manner;
a sensor chip arranged in the pressure chamber, surrounded by the medium, and configured to measure a pressure of the medium;
a plurality of connection pins fed through the first housing part by pressure-tight bushings and electrically connected to the sensor chip; and
stress relieving structures configured to mechanically decouple the first housing part and a pressure-sensitive element of the sensor chip.
2. The sensor assembly of claim 1 , wherein the sensor chip has a capacitive or piezoresistive MEMS as the pressure-sensitive element, and wherein the medium is a gas.
3. The sensor assembly of claim 1 , wherein the sensor chip is in direct contact with the medium.
4. The sensor assembly of claim 1 , wherein the pressure-sensitive element comprises a reference chamber integrated inside the sensor chip.
5. The sensor assembly of claim 1 , wherein the stress relieving structures are integrated into the connection pins and/or the sensor chip.
6. The sensor assembly of claim 1 , wherein the stress relieving structures are attached to the connection pins.
7. The sensor assembly of claim 1 , wherein the stress relieving structures comprise trenches in the sensor chip that surround the pressure-sensitive element and attenuate or prevent transmission of mechanical stresses to the pressure-sensitive element.
8. The sensor assembly of claim 1 , wherein the stress relieving structures comprise spring elements which are a component of the connection pins.
9. The sensor assembly of claim 8 , wherein the spring elements are formed by a helical conductor section of the connection pins.
10. The sensor assembly of claim 8 , wherein the spring elements are formed by a tapering of the connection pins.
11. The sensor assembly of claim 1 , wherein the stress relieving structures comprise bond wires that connect the connection pins to the sensor chip such that the sensor chip is only suspended on the bond wires and is a distance from an inner surface of the first housing part.
12. The sensor assembly of claim 1 , wherein the sensor chip is a distance from an inner surface of the first housing part and is mounted exclusively on the connection pins.
13. The sensor assembly of claim 1 , wherein the connection pins are mechanically and electrically connected to corresponding connection pads of the sensor chip.
14. The sensor assembly of claim 1 , further comprising:
a protective cap which bounds part of the pressure chamber,
wherein the sensor chip is located between the first housing part and the protective cap.
15. The sensor assembly of claim 14 , wherein the protective cap contains a flame arrester and/or humidity protection.
16. The sensor assembly of claim 1 , wherein the sensor chip has a stack of at least one glass substrate and one silicon substrate.
17. The sensor assembly of claim 1 , wherein the sensor chip is completely surrounded by the medium, except for surface regions of the chip that are connected to the connection pins.
18. A sensor assembly, comprising:
a housing enclosing a pressure chamber filled with a medium, the housing having a first housing part and a second housing part, the first housing part being connected to the second housing part to seal the pressure chamber in a pressure-tight manner;
a sensor chip arranged in the pressure chamber and configured to measure a pressure of the medium directly in contact with the medium;
a plurality of connection pins fed through the first housing part by pressure-tight bushings and electrically connected to the sensor chip; and
stress relieving structures configured to mechanically decouple the first housing part and a pressure-sensitive element of the sensor chip,
wherein the stress relieving structures comprise an elastic adhesive layer which connects the sensor chip to the second housing part.
19. The sensor assembly of claim 18 , wherein the connection pins are part of a plug connector.
20. The sensor assembly of claim 1 , wherein the connection pins are part of a plug connector.