Micromechanical component for a capacitive pressure sensor device, capacitive pressure sensor device, and a manufacturing method for a capacitive pressure sensor device
A micromechanical component. The micromechanical component includes: a substrate; a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, at least one electrode being mounted on the framed partial surface and/or interlayer; a pressure-sensitive membrane on which an external pressure acts and which brings about a deformation, wherein a self-supporting area of the membrane spans the framed partial surface and/or interlayer, the self-supporting area having at least one movable counterelectrode directed toward the framed partial surface and/or interlayer; and a sealed cavity having a reference pressure, surrounded by the membrane and the frame structure; wherein the self-supporting area of the membrane has local reinforcement structures for increasing a membrane thickness of the self-supporting area, the local reinforcement structures being mounted in particular regions of the self-supporting area where the membrane thickness of the self-supporting area changes.
1 . A micromechanical component for a capacitive pressure sensor device, comprising:
a substrate;
a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, wherein at least one electrode is mounted on the framed partial surface and/or the framed interlayer;
a pressure-sensitive membrane on which an external pressure acts, wherein the pressure-sensitive membrane is stretched via the frame structure in such a way that a self-supporting area of the pressure-sensitive membrane spans the framed partial surface and/or the framed interlayer, wherein an action of the external pressure brings about a deformation of the pressure-sensitive membrane on an outer side of the self-supporting area, wherein the outer side is directed away from the partial surface and/or the interlayer, wherein the self-supporting area of the pressure-sensitive membrane has at least one movable counter electrode directed toward the framed partial surface and/or the framed interlayer; and
a sealed cavity having a reference pressure, which is surrounded by the pressure-sensitive membrane and the frame structure;
wherein the self-supporting area of the pressure-sensitive membrane has local reinforcement structures or increasing a membrane thickness of the self-supporting area, wherein the local reinforcement structures are mounted in particular regions of the self-supporting area where a membrane thickness of the self-supporting area changes.
2 . The micromechanical component according to claim 1 , wherein the local reinforcement structures are arranged on the outer side of the self-supporting area of the pressure-sensitive membrane, or are arranged on an inner side of the self-supporting area of the pressure-sensitive membrane which is directed toward the partial surface and/or the interlayer, or are arranged on the outer side of the self-supporting area and on the inner side of the self-supporting area of the membrane.
3 . The micromechanical component according to claim 2 , wherein the local reinforcement structures are arranged on the outer side of the self-supporting area of the pressure-sensitive membrane and are formed with an approximately rectangular cross-section, and wherein the local reinforcement structures on the outer side of the self-supporting area of the pressure-sensitive membrane are defined based on a first parameter and a second parameter, wherein the first parameter specifies a thickness of the reinforcement structure, and the second parameter describes an overlap of the reinforcement structure, wherein the overlap extends from the particular region of the self-supporting area of the pressure-sensitive membrane toward the reduced membrane thickness of the self-supporting area.
4 . The micromechanical component according to claim 3 , wherein the first parameter t correlates with the membrane thickness of the self-supporting area, and the second parameter o correlates with a deformable membrane length L of the self-supporting area, and wherein the first parameter t is in a range of t=0 to t=0.5T, and the second parameter o is in a range of o=0 to o=0.2L.
5 . The micromechanical component according to claim 2 , wherein the local reinforcement structures are arranged on the inner side of the self-supporting area of the pressure-sensitive membrane in the particular regions where the membrane thickness of the self-supporting area changes and edges are respectively formed on the self-supporting area, wherein the local reinforcement structures on the inner side of the self-supporting area of the pressure-sensitive membrane are defined based on a third parameter and a fourth parameter, wherein the third parameter specifies a first extension of the local reinforcement structure along a first direction of an edge of the self-supporting area, and the fourth parameter describes a second extension of the local reinforcement structure along a second direction of the edge of the self-supporting area.
6 . The micromechanical component according to claim 5 , wherein the local reinforcement structures are formed with an approximately triangular cross-section on the inner side of the self-supporting area of the pressure-sensitive membrane, and wherein the third parameter c h and the fourth parameter cv each correlate with the membrane thickness T of the self-supporting area of the pressure-sensitive membrane, wherein the third parameter c h and the fourth parameter cv are each in a range of c h =0 to c h =0.5T and c v =0 to c v =0.5T.
7 . The micromechanical component according to claim 5 , wherein the local reinforcement structures are formed with an approximately domed cross-section on the inner side of the self-supporting area of the pressure-sensitive membrane.
8 . A capacitive pressure sensor device, comprising:
a micromechanical component for a capacitive pressure sensor device, including:
a substrate,
a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, wherein at least one electrode is mounted on the framed partial surface and/or the framed interlayer,
a pressure-sensitive membrane on which an external pressure acts, wherein the pressure-sensitive membrane is stretched via the frame structure in such a way that a self-supporting area of the pressure-sensitive membrane spans the framed partial surface and/or the framed interlayer, wherein an action of the external pressure brings about a deformation of the pressure-sensitive membrane on an outer side of the self-supporting area, wherein the outer side is directed away from the partial surface and/or the interlayer, wherein the self-supporting area of the pressure-sensitive membrane has at least one movable counterelectrode directed toward the framed partial surface and/or the framed interlayer, and
a sealed cavity having a reference pressure, which is surrounded by the pressure-sensitive membrane and the frame structure,
wherein the self-supporting area of the pressure-sensitive membrane has local reinforcement structures or increasing a membrane thickness of the self-supporting area, wherein the local reinforcement structures are mounted in particular regions of the self-supporting area where a membrane thickness of the self-supporting area changes; and
an electronic signal processing unit configured to generate a measurement signal via the external pressure acting on the micromechanical component, based on an evaluation of a voltage applied between the at least one electrode and the at least one movable counterelectrode, or of a capacitance.
9 . A manufacturing method for a micromechanical component having local reinforcement structures on an outer side of a self-supporting area of a membrane for a capacitive pressure sensor device, comprising the following steps:
providing a substrate, an interlayer, a frame structure on top of and/or on the substrate, the frame structure framing a partial surface of the substrate and/or the interlayer applied to the substrate, at least one electrode, and a cavity to be formed from at least one insulation layer in a further course of the method;
performing a structuring process;
applying an electrically conductive layer, wherein the electrically conductive layer follows a topography generated by the structuring process;
performing a further structuring process to form the local reinforcement structures;
applying a further electrically conductive layer; and
forming a pressure-sensitive membrane from the further electrically conductive layer using the frame structure, in such a way that a self-supporting area of the pressure-sensitive membrane spans the framed partial surface and/or the framed interlayer, so that an action of an external pressure brings about a deformation of the pressure-sensitive membrane on an outer side of the self-supporting area;
wherein the outer side is directed away from the partial surface and/or the interlayer, and wherein the self-supporting area of the pressure-sensitive membrane has at least one movable counterelectrode directed toward the framed partial surface and/or the framed interlayer, and
wherein the local reinforcement structures are formed on a surface of the further electrically conductive layer.
10 . A manufacturing method for a micromechanical component having local reinforcement structures on an inner side of a self-supporting area of a membrane for a capacitive pressure sensor device, comprising the following steps:
providing a substrate, an interlayer, a frame structure on top of and/or on the substrate, the frame structure framing a partial surface of the substrate and/or the interlayer applied to the substrate, at least one electrode, and a cavity to be formed from at least one insulation layer in a further course of the method;
performing a structuring process to form local reinforcement structures;
performing a further structuring process to generate the local reinforcement structures;
applying an electrically conductive layer, wherein the electrically conductive layer follows a topography generated by the structuring process; and
forming a pressure-sensitive membrane from the electrically conductive layer using the frame structure, so that a self-supporting area of the pressure-sensitive membrane spans the framed partial surface and/or the framed interlayer so that an action of an external pressure brings about a deformation of the pressure-sensitive membrane on an outer side of the self-supporting area;
wherein the outer side is directed away from the partial surface and/or the interlayer;
wherein the self-supporting area of the pressure-sensitive membrane has at least one movable counterelectrode directed toward the framed partial surface and/or the framed interlayer; and
wherein the electrically conductive layer has the local reinforcement structures.
11 . A manufacturing method for a micromechanical component having local first reinforcement structures on an inner side and local second reinforcement structures on an outer side of a self-supporting area of a membrane for a capacitive pressure sensor device, the method comprising the following steps:
providing a substrate, an interlayer, a frame structure on top of and/or on the substrate, the frame structure framing a partial surface of the substrate and/or the interlayer applied to the substrate, at least one electrode, and a cavity to be formed from at least one insulation layer in a further course of the method;
performing a structuring process to form the local first reinforcement structures;
performing a further structuring process to generate the local first reinforcement structures;
applying an electrically conductive layer, wherein the electrically conductive layer follows a topography generated by the structuring process;
performing a further structuring process to form the local second reinforcement structures;
applying a further electrically conductive layer, wherein the further electrically conductive layer follows a topography generated by the structuring process; and
forming a pressure-sensitive membrane from the further electrically conductive layer using the frame structure, in such a way that a self-supporting area of the pressure-sensitive membrane spans the framed partial surface and/or the framed interlayer so that an action of an external pressure brings about a deformation of the pressure-sensitive membrane on an outer side of the self-supporting area, wherein the outer side is directed away from the partial surface and/or the interlayer, and wherein the self-supporting area of the pressure-sensitive membrane has at least one movable counterelectrode directed toward the framed partial surface and/or the framed interlayer, and wherein the local second reinforcement structures are formed on a surface of the further electrically conductive layer.