Electrostatic chuck
An embodiment provides an electrostatic chuck including: an adsorption area in which an electrode pattern is disposed and to which an object is adsorbed; an outer area around the adsorption area; and a detection pattern disposed in the outer area and surrounding at least a portion of the adsorption area.
1 . An electrostatic chuck comprising:
an adsorption area in which an electrode pattern is disposed and to which an object is adsorbed, wherein the electrode pattern includes an electrode;
an outer area around the adsorption area; and
a detection pattern disposed in the outer area and surrounding at least a portion of the adsorption area, wherein the detection pattern includes a detection line connected to, and integrally formed with, the electrode.
2 . The electrostatic chuck of claim 1 , further comprising
a power source which applies a voltage to the electrode,
wherein the detection line is connected to the power source.
3 . An electrostatic chuck comprising:
an adsorption area in which an electrode pattern is disposed and to which an object is adsorbed, wherein the electrode pattern includes a first electrode and a second electrode;
an outer area around the adsorption area;
a detection pattern disposed in the outer area and surrounding at least a portion of the adsorption area, wherein the detection pattern includes a first detection line and a second detection line,
the first detection line is connected to the first electrode, and
the second detection line is connected to the second electrode.
4 . The electrostatic chuck of claim 3 , wherein
the first detection line is integrally formed with the first electrode as a single unitary and indivisible part, and
the second detection line is integrally formed with the second electrode as a single unitary and indivisible part.
5 . The electrostatic chuck of claim 3 , further comprising
a power source which applies a voltage to the first electrode and the second electrode,
wherein the first detection line and the second detection line are connected to the power source.
6 . The electrostatic chuck of claim 5 , wherein
the first electrode receives a voltage of a first polarity from the power source through the first detection line, and
the second electrode receives a voltage having a second polarity opposite to the first polarity from the power source through the second detection line.
7 . The electrostatic chuck of claim 3 , wherein
the first detection line surrounds a lower left side of the adsorption area, and
the second detection line surrounds a lower right side of the adsorption area.
8 . The electrostatic chuck of claim 3 , wherein
the first detection line surrounds an upper left side, a left side, and a lower left side of the adsorption area, and
the second detection line surrounds an upper right side, a right side, and a lower right side of the adsorption area.
9 . The electrostatic chuck of claim 1 , further comprising
suction holes defined in the adsorption area and which provides vacuum force.
10 . An electrostatic chuck comprising:
an adsorption area in which an electrode pattern including electrodes for inducing electrostatic force is disposed;
an outer area around the adsorption area; and
a detection pattern disposed in the outer area and including a detection line surrounding at least a portion of the adsorption area, wherein the detection line is integrally formed with at least one selected from the electrodes as a single unitary and indivisible part.
11 . The electrostatic chuck of claim 10 , wherein
the detection line is connected to at least one selected from the electrodes.
12 . The electrostatic chuck of claim 10 , further comprising
a power source which applies a voltage to the electrodes,
wherein the detection line is connected to the power source.
13 . The electrostatic chuck of claim 10 , wherein
the electrodes include a first electrode and a second electrode to which voltages of different polarities are respectively applied,
the detection pattern includes a first detection line and a second detection line,
the first detection line is connected to the first electrode, and
the second detection line is connected to the second electrode.
14 . The electrostatic chuck of claim 13 , further comprising
a power source which applies a voltage to the first electrode and the second electrode,
wherein the first electrode receives a positive voltage from the power source through the first detection line, and
the second electrode receives a negative voltage from the power source through the second detection line.
15 . The electrostatic chuck of claim 13 , wherein
the first detection line surrounds a lower left side of the adsorption area, and
the second detection line surrounds a lower right side of the adsorption area.
16 . The electrostatic chuck of claim 10 , wherein
a portion of the detection line disposed between the adsorption area and an edge of the electrostatic chuck and extending parallel to the edge is spaced apart from the edge.
17 . The electrostatic chuck of claim 10 , wherein
a portion of the detection line disposed between the adsorption area and an edge of the electrostatic chuck and extending parallel to the edge is in contact with the edge.