Semiconductor device
The semiconductor device according to the present disclosure has features (1) to (3) below. The feature (1) is that “a lower surface of an on-chip bonding material has a shape matching a surface shape of a main current wiring connection region in plan view”. The feature (2) is that “an emitter sense wiring is directly connected to a side surface of the main current wiring connection region”. The feature (3) is that “an IGBT chip has an ineffective region in which the IGBT does not function in a region below an emitter sense pad and the emitter sense wiring”.
1 . A semiconductor device comprising:
a semiconductor chip having a switching element therein; and
a surface electrode provided on a surface of the semiconductor chip and through which main current flows during operation of the switching element, wherein
the switching element has a control electrode, and the switching element is operated and controlled by applying a control voltage with potential of the surface electrode as reference potential to the control electrode,
the semiconductor device further comprising:
an insulating film provided on the surface electrode, wherein
the insulating film has an opening region, and a region in the opening region in the surface electrode serves as a wiring connection region,
the semiconductor device further comprising:
a chip bonding material that has a lower surface and is electrically connected to the surface electrode by contacting the lower surface with a surface of the wiring connection region;
a sense pad provided independently of the surface electrode on a surface of the semiconductor chip; and
a sense wiring provided on a surface of the semiconductor chip and electrically connecting the surface electrode and the sense pad, wherein
potential of the sense pad is control reference potential of the switching element,
the lower surface of the chip bonding material has a shape matching a surface shape of the wiring connection region in plan view,
the sense wiring is connected to the wiring connection region, and
the semiconductor chip has an ineffective region in which the switching element does not function in a region below the sense pad and the sense wiring.
2 . The semiconductor device according to claim 1 , wherein
the semiconductor chip further includes a current detection element that is provided independently of the switching element and performs switching operation equivalent to the switching element, and the current detection element is provided in a current detection element formation region of the semiconductor chip, and
the semiconductor device further includes
a current detection pad that is provided on the current detection element formation region of the semiconductor chip independently of the surface electrode and through which detection current flows during operation of the current detection element.
3 . The semiconductor device according to claim 1 , wherein
the switching element is an IGBT.
4 . The semiconductor device according to claim 1 , wherein
the switching element is formed of a wide band gap semiconductor.
5 . A semiconductor device comprising:
a semiconductor chip having a switching element therein; and
a surface electrode provided on a surface of the semiconductor chip and through which main current flows during operation of the switching element, wherein
the switching element has a control electrode, and the switching element is operated and controlled by applying a control voltage with potential of the surface electrode as reference potential to the control electrode,
the semiconductor device further comprising:
a chip wire that is electrically connected to the surface electrode by contacting at a chip connection point on a surface of the surface electrode; and
a sense connection member that is electrically connected to the surface electrode by contacting at a sense connection point of the surface electrode, wherein
potential of the sense connection point is control reference potential of the switching element, a region including the chip connection point in the surface electrode is defined as a wiring connection region, and a position farthest from the wiring connection region in the surface electrode is defined as an electrode remote position,
the sense connection point satisfies a connection point arrangement condition that a connection point is provided at a position close to the chip connection point between the chip connection point and the electrode remote position,
the sense connection member includes:
a sense pad provided independently of the surface electrode on a surface of the semiconductor chip; and
a sense wiring provided on a surface of the semiconductor chip and electrically connecting the surface electrode and the sense pad,
the sense connection point exists on a side surface of the wiring connection region,
the sense wiring is electrically connected to the surface electrode by being in contact with the surface electrode at the sense connection point, and
the semiconductor chip has an ineffective region in which the switching element does not function in a region below the sense pad and the sense wiring.
6 . The semiconductor device according to claim 5 , wherein
the chip wire includes a plurality of chip wires, and
the sense connection point satisfies the connection point arrangement condition in a relationship with at least one chip wire among the plurality of chip wires.