Sample holder
A sample holder of the present disclosure includes an aluminum nitride substrate and an internal electrode provided on the aluminum nitride substrate. The aluminum nitride substrate includes a plurality of aluminum nitride particles and aluminum oxynitride particles located in crystal grain boundaries of the plurality of aluminum nitride particles. Titanium is solid-solved in the aluminum oxynitride particles.
1 . A sample holder comprising:
an aluminum nitride substrate comprising a plurality of aluminum nitride particles and aluminum oxynitride particles located at crystal grain boundaries between the plurality of aluminum nitride particles; and
an internal electrode provided in the aluminum nitride substrate,
wherein titanium is solid-solved in the aluminum oxynitride particles.
2 . The sample holder according to claim 1 ,
wherein the aluminum oxynitride particles are located proximate to the internal electrode.
3 . The sample holder according to claim 2 ,
wherein the aluminum oxynitride particles are in contact with the internal electrode.
4 . The sample holder according to claim 1 ,
wherein the aluminum oxynitride particles are present more on an internal electrode side of the sample holder than a wafer placement surface side of the sample holder.
5 . The sample holder according to claim 1 ,
wherein the aluminum oxynitride particles have a portion where the titanium is segregated into a portion that is in contact with one or more aluminum nitride particles of the plurality of aluminum nitride particles.
6 . The sample holder according to claim 1 ,
wherein one or more aluminum nitride particles of the plurality of aluminum nitride particles have a portion where the titanium is segregated into a portion that is in contact with the aluminum oxynitride particles.
7 . The sample holder according to claim 1 ,
wherein the internal electrode contains aluminum nitride.
8 . The sample holder according to claim 1 ,
wherein the internal electrode is an electrostatic adsorption electrode, and
the aluminum nitride substrate further comprises a heater electrode, and further comprises, around the heater electrode, aluminum oxynitride particles in which titanium is solid-solved.