IP Library Granted Patent US 12,489,378
Granted Patent B2
US 12,489,378 · App. 17/924,698 · Granted Dec 2, 2025

Superhydrophobic modified film and modification method, and triboelectric nanogenerator (TENG) composed thereof and preparation method

Inventors: Jianfeng Ping (Hangzhou, CN); Qi Zhang (Hangzhou, CN); Yibin Ying (Hangzhou, CN)
Assignee: ZHEJIANG UNIVERSITY
H02N1/04
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Quick Facts
Patent No.
US 12,489,378
App. No.
17/924,698
Granted
Dec 2, 2025
Kind
B2
Abstract

A superhydrophobic modified film and modification method, and a triboelectric nanogenerator (TENG) composed thereof and a preparation method are disclosed. A polyethylene (PE) film is etched and deposited with an inductively coupled plasma (ICP) etcher in sequence. A nano-textured structure is formed on an upper surface of the PE film and a fluorocarbon layer is further deposited for modification. An upper electrode of the film is constructed by sticking a piece of ultra-thin copper tape on a superhydrophobic surface of the superhydrophobic modified film, and a lower electrode of the film is constructed by spin-coating a conductive polymer on a lower surface of the film after O 2 plasma treatment. Thus, the TENG with high output and a double-electrode working mode based on the superhydrophobic modified greenhouse film is constructed. According to the modification method, the nano-textured structure is constructed on the surface of the film.

Claims (41)

1 . A preparation method for a greenhouse film-based triboelectric nanogenerator (TENG), comprising:

i) preparing a superhydrophobic modified film with a superhydrophobic property on an upper surface of the superhydrophobic modified film;

ii) preparing a lower electrode;

iii) preparing an upper electrode; and

iv) connecting the upper electrode and the lower electrode;

wherein the greenhouse film-based TENG comprises the superhydrophobic modified film, the lower electrode, and the upper electrode, wherein the lower electrode is arranged on a lower surface of the superhydrophobic modified film, the upper electrode is arranged on the upper surface of the superhydrophobic modified film, and the superhydrophobic modified film is modified by a superhydrophobic modification method for a greenhouse film;

wherein the superhydrophobic modification method comprises:

1) placing a polyethylene (PE) film in an inductively coupled plasma (ICP) etcher;

2) etching an upper surface of the PE film for a first predetermined time by the ICP etcher, wherein a nano-textured structure is formed on the upper surface of the PE film; and

3) depositing the upper surface of the PE film for a second predetermined time by the ICP etcher, wherein a fluorocarbon layer is deposited on the nano-textured structure to complete a modification and take out the PE film;

wherein step ii) comprises:

adding a 15% v/v dimethyl sulfoxide (DMSO) solution to a poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT:PSS) solution, and stirring vigorously at a room temperature for 6 h to obtain a conductive polymer solution;

cleaning the lower surface of the superhydrophobic modified film, and conducting an O 2 plasma treatment for 5 min;

spin-coating the conductive polymer solution on the lower surface of the superhydrophobic modified film after the O 2 plasma treatment through a square mold; and

drying at the room temperature to prepare the lower electrode on the lower surface of the superhydrophobic modified film.

2 . The preparation method according to claim 1 , wherein in step 2) of the superhydrophobic modification method, the upper surface of the PE film is etched at a set ICP power of 100 W and a radio frequency (RF) power of 50 W under the presence of O 2 and CHF 3 at an air pressure of 30 mTorr for 10 min.

3 . The preparation method according to claim 2 , wherein in step 2) of the superhydrophobic modification method, O 2 and CHF 3 have a flow ratio of 1:3.

4 . The preparation method according to claim 1 , wherein in step 3) of the superhydrophobic modification method, the upper surface of the PE film is deposited at a set ICP power of 100 W and an RF power of 50 W under the presence of C 4 F 8 at an air pressure of 30 mTorr for 30 s.

5 . The preparation method according to claim 4 , wherein in step 3) of the superhydrophobic modification method, a flow rate of the C 4 F 8 is set as 50 sccm.

6 . The preparation method according to claim 1 , wherein in the greenhouse film-based TENG, the greenhouse film-based TENG is for a raindrop energy collection, the greenhouse film-based TENG is constructed on the greenhouse film, and during rainfall, raindrops contact the upper electrode on the upper surface of the superhydrophobic modified film to generate a continuous electrical output through a process of contact electrification and electrostatic induction.

7 . A preparation method for a greenhouse film-based TENG, comprising:

i) preparing a superhydrophobic modified film with a superhydrophobic property on an upper surface of the superhydrophobic modified film;

ii) preparing a lower electrode;

iii) preparing an upper electrode; and

iv) connecting the upper electrode and the lower electrode;

wherein the greenhouse film-based TENG comprises the superhydrophobic modified film, the lower electrode, and the upper electrode, wherein the lower electrode is arranged on a lower surface of the superhydrophobic modified film, the upper electrode is arranged on the upper surface of the superhydrophobic modified film, and the superhydrophobic modified film is modified by a superhydrophobic modification method for a greenhouse film;

wherein the superhydrophobic modification method comprises:

1) placing a polyethylene (PE) film in an inductively coupled plasma (ICP) etcher;

2) etching an upper surface of the PE film for a first predetermined time by the ICP etcher, wherein a nano-textured structure is formed on the upper surface of the PE film; and

3) depositing the upper surface of the PE film for a second predetermined time by the ICP etcher, wherein a fluorocarbon layer is deposited on the nano-textured structure to complete a modification and take out the PE film;

wherein step iii) comprises: sticking a piece of thin conductive copper tape on the upper surface of the superhydrophobic modified film at a center line of the lower electrode to prepare the upper electrode on the upper surface of the superhydrophobic modified film.

8 . A preparation method for a greenhouse film-based TENG, comprising:

i) preparing a superhydrophobic modified film with a superhydrophobic property on an upper surface of the superhydrophobic modified film;

ii) preparing a lower electrode;

iii) preparing an upper electrode; and

iv) connecting the upper electrode and the lower electrode with two pieces of copper tape, respectively to lead out an output electrical signal,

wherein the greenhouse film-based TENG comprises the superhydrophobic modified film, the lower electrode, and the upper electrode, wherein the lower electrode is arranged on a lower surface of the superhydrophobic modified film, the upper electrode is arranged on the upper surface of the superhydrophobic modified film, and the superhydrophobic modified film is modified by a superhydrophobic modification method for a greenhouse film;

wherein the superhydrophobic modification method comprises:

1) placing a polyethylene (PE) film in an inductively coupled plasma (ICP) etcher;

2) etching an upper surface of the PE film for a first predetermined time by the ICP etcher, wherein a nano-textured structure is formed on the upper surface of the PE film; and

3) depositing the upper surface of the PE film for a second predetermined time by the ICP etcher, wherein a fluorocarbon layer is deposited on the nano-textured structure to complete a modification and take out the PE film.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 11, 2022
From: PING, JIANFENG; ZHANG, QI; YING, YIBIN
To: ZHEJIANG UNIVERSITY
Reel/Frame 061931/0021 →
Priority Claims (2)
CN 202110309075.8 · Mar 23, 2021 · national
CN 202110309081.3 · Mar 23, 2021 · national
Continuity (1)
Related Publication 20230180680A1 · Jun 15, 2023
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