IP Library › Granted Patent US 12,489,420
Granted Patent B2
US 12,489,420 · App. 18/242,066 · Granted Dec 2, 2025

Tunable ferroelectric acoustic resonator structure

Inventors: Nadim Khlat (Cugnaux, FR); Milad Zolfagharloo Koohi (Longwood, FL)
Assignee: Qorvo US, Inc.
H03H9/24
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Quick Facts
Patent No.
US 12,489,420
App. No.
18/242,066
Granted
Dec 2, 2025
Kind
B2
Abstract

A ferroelectric acoustic resonator structure is provided. The tunable ferroelectric acoustic resonator structure includes a pair of ferroelectric acoustic resonator networks coupled in parallel between a signal input and a signal output. The ferroelectric acoustic resonator networks are tuned by a pair of pulse voltages to resonate in a desired series resonance frequency. However, the pair of pulse voltages can change an equivalent capacitance to therefore cause a parallel resonance frequency of the tunable ferroelectric acoustic resonator structure to shift. Herein, the pair of pulse voltages are determined to cause one of the ferroelectric acoustic resonator networks to increase the equivalent capacitance and to cause another one of the ferroelectric acoustic resonator networks to decrease the equivalent capacitance by an equal amount. As a result, it is possible to keep the overall equivalent capacitance, and therefore the parallel resonance frequency, of the tunable ferroelectric acoustic resonator structure unchanged.

Claims (60)

1 . A tunable ferroelectric acoustic resonator structure comprising:

a resonator network configured to present an equivalent capacitance between a signal input and a signal output in a parallel resonance frequency, the resonator network comprising:

a first ferroelectric acoustic resonator network configured to cause a first variation in the equivalent capacitance in response to receiving a first pulse voltage; and

a second ferroelectric acoustic resonator network configured to cause a second variation in the equivalent capacitance in response to receiving a second pulse voltage; and

a control circuit configured to:

determine the first pulse voltage and the second pulse voltage such that the first variation cancels the second variation to thereby keep the equivalent capacitance unchanged; and

apply the determined first pulse voltage and the determined second pulse voltage to the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network, respectively.

2 . The tunable ferroelectric acoustic resonator structure of claim 1 , wherein the control circuit is further configured to determine the first pulse voltage and the second pulse voltage to cause the first variation and the second variation to have an equal amount but different polarities.

3 . The tunable ferroelectric acoustic resonator structure of claim 1 , wherein:

the first ferroelectric acoustic resonator network comprises a pair of first ferroelectric acoustic resonators coupled in series between the signal input and the signal output; and

the second ferroelectric acoustic resonator network comprises a pair of second ferroelectric acoustic resonators coupled in series between the signal input and the signal output.

4 . The tunable ferroelectric acoustic resonator structure of claim 3 , wherein the control circuit is further configured to:

apply the determined first pulse voltage to a first intermediate node located in between the pair of first ferroelectric acoustic resonators; and

apply the determined second pulse voltage to a second intermediate node located in between the pair of second ferroelectric acoustic resonators.

5 . The tunable ferroelectric acoustic resonator structure of claim 4 , wherein the control circuit is coupled to the first intermediate node and the second intermediate node via a first resistor and a second resistor, respectively.

6 . The tunable ferroelectric acoustic resonator structure of claim 1 , wherein:

the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network have an identical polarity; and

the control circuit is further configured to:

determine the first pulse voltage as a positive pulse voltage; and

determine the second pulse voltage as a negative pulse voltage.

7 . The tunable ferroelectric acoustic resonator structure of claim 1 , wherein:

the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network have opposite polarities; and

the control circuit is further configured to determine each of the first pulse voltage and the second pulse voltage as a positive pulse voltage.

8 . The tunable ferroelectric acoustic resonator structure of claim 1 , wherein the control circuit is further configured to apply the determined first pulse voltage and the determined second pulse voltage to the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network, respectively, to thereby cause each of the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network to resonate at a series resonance frequency to pass a signal from the signal input to the signal output.

9 . The tunable ferroelectric acoustic resonator structure of claim 8 , further comprising a predetermined lookup table (LUT) correlating the first pulse voltage and the second pulse voltage with the series resonance frequency.

10 . The tunable ferroelectric acoustic resonator structure of claim 9 , wherein the control circuit is further configured to determine the first pulse voltage and the second pulse voltage from the predetermined LUT based on the series resonance frequency.

11 . The tunable ferroelectric acoustic resonator structure of claim 1 , further comprising a pair of switches each coupled to a respective one of the signal input and the signal output, wherein the control circuit is further configured to:

close the pair of switches concurrent to applying the first pulse voltage and the second pulse voltage to the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network, respectively; and

open the pair of switches concurrent to removing the first pulse voltage and the second pulse voltage from the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network, respectively.

12 . The tunable ferroelectric acoustic resonator structure of claim 1 , further comprising a pair of shunt inductors each coupled to a respective one of the signal input and the signal output, wherein the pair of shunt inductors are configured to provide a direct-current (DC) connection to a ground for polarizing the resonator network with the first pulse voltage and the second pulse voltage.

13 . A resonator network configured to resonate at a series resonance frequency to pass a signal from a signal input to a signal output and present an equivalent capacitance between the signal input and the signal output in a parallel resonance frequency, the resonator network comprising:

a first ferroelectric acoustic resonator network configured to:

receive a first pulse voltage for tuning the first ferroelectric acoustic resonator network to the series resonance frequency; and

cause a first variation in the equivalent capacitance in response to receiving the first pulse voltage; and

a second ferroelectric acoustic resonator network configured to:

receive a second pulse voltage for tuning the second ferroelectric acoustic resonator network to the series resonance frequency; and

cause a second variation in the equivalent capacitance in response to receiving the second pulse voltage;

wherein the first pulse voltage and the second pulse voltage are determined to cause the first variation to cancel the second variation to thereby keep the equivalent capacitance unchanged.

14 . The resonator network of claim 13 , wherein the first pulse voltage and the second pulse voltage are determined to cause the first variation and the second variation to have an equal amount but different polarities.

15 . The resonator network of claim 13 , wherein:

the first ferroelectric acoustic resonator network comprises a pair of first ferroelectric acoustic resonators coupled in series between the signal input and the signal output; and

the second ferroelectric acoustic resonator network comprises a pair of second ferroelectric acoustic resonators coupled in series between the signal input and the signal output.

16 . The resonator network of claim 15 , wherein:

the first ferroelectric acoustic resonator network is further configured to receive the first pulse voltage at a first intermediate node located in between the pair of first ferroelectric acoustic resonators; and

the second ferroelectric acoustic resonator network is further configured to receive the second pulse voltage at a second intermediate node located in between the pair of second ferroelectric acoustic resonators.

17 . The resonator network of claim 13 , wherein:

the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network have an identical polarity;

the first pulse voltage is a positive pulse voltage; and

the second pulse voltage is a negative pulse voltage.

18 . The resonator network of claim 13 , wherein:

the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network have opposite polarities; and

each of the first pulse voltage and the second pulse voltage is a positive pulse voltage.

19 . A wireless device comprising a tunable ferroelectric acoustic resonator structure, the tunable ferroelectric acoustic resonator structure comprises:

a resonator network configured to present an equivalent capacitance between a signal

input and a signal output in a parallel resonance frequency, the resonator network comprising:

a first ferroelectric acoustic resonator network configured to cause a first variation in the equivalent capacitance in response to receiving a first pulse voltage; and

a second ferroelectric acoustic resonator network configured to cause a second variation in the equivalent capacitance in response to receiving a second pulse voltage; and

a control circuit configured to:

determine the first pulse voltage and the second pulse voltage such that the first variation cancels the second variation to thereby keep the equivalent capacitance unchanged; and

apply the determined first pulse voltage and the determined second pulse voltage to the first ferroelectric acoustic resonator network and the second ferroelectric acoustic resonator network, respectively.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 5, 2023
From: KHLAT, NADIM; KOOHI, MILAD ZOLFAGHARLOO
To: QORVO US, INC.
Reel/Frame 064792/0960 →
Continuity (3)
Provisional Application 63476525 · Dec 21, 2022
Provisional Application 63406791 · Sep 15, 2022
Related Publication 20240097650A1 · Mar 21, 2024
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