Ceramic sintered body and plasma-generating electrode
A ceramic sintered body contains a first particular element consisting of five or six elements selected from among titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from yttrium (Y) and aluminum (Al); and elemental carbon (C). The total amount of the first particular element, the second particular element, and elemental carbon is 98 at % or more. The ceramic sintered body has a plurality of microstructures having respective compositions different from one another. One of the plurality of microstructures includes a solid solution containing at least three members of the first particular element.
1 . A ceramic sintered body, which comprises
a first particular element consisting of five or six elements selected from among the group consisting of titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W);
a second particular element consisting of one element selected from the group consisting of yttrium (Y) and aluminum (Al); and
elemental carbon (C), wherein
a total amount of the first particular element, the second particular element, and elemental carbon is 98 at % or more;
the ceramic sintered body has a plurality of microstructures having respective compositions different from one another;
one of the plurality of microstructures includes a solid solution containing at least three members of the first particular element.
2 . The ceramic sintered body according to claim 1 ,
wherein another one of the plurality of microstructures has undergone spinodal decomposition.
3 . The ceramic sintered body according to claim 2 ,
wherein another one of the plurality of microstructures includes a solid solution containing at least two members of the first particular element.
4 . The ceramic sintered body according to claim 2 ,
which contains the second particular element in an amount of 3,000 at. ppm or less.
5 . The ceramic sintered body according to claim 2 ,
which contains elemental carbon in an amount of 45 at % or more and 55 at % or less.
6 . The ceramic sintered body according to claim 2 ,
which contains elemental iron (Fe) in an amount of 800 at. ppm or less.
7 . A plasma-generating electrode, comprising:
a ceramic sintered body as recited in claim 2 .
8 . The ceramic sintered body according to claim 1 ,
wherein another one of the plurality of microstructures includes a solid solution containing at least two members of the first particular element.
9 . The ceramic sintered body according to claim 1 ,
which contains the second particular element in an amount of 3,000 at. ppm or less.
10 . The ceramic sintered body according to claim 1 ,
which contains elemental carbon in an amount of 45 at % or more and 55 at % or less.
11 . The ceramic sintered body according to claim 1 ,
which contains elemental iron (Fe) in an amount of 800 at. ppm or less.
12 . A plasma-generating electrode, comprising:
a ceramic sintered body as recited in claim 1 .