Non-transitory storage medium, optical inspection system, processing apparatus for optical inspection system, and optical inspection method
According to an embodiment, a non-transitory storage medium stores an optical inspection program. The optical inspection program causes a processor to execute generating a wavelength selection portion-removed image by removing, from a captured image of an object surface imaged through a wavelength selection portion configured to select at least two different wavelength spectra from incident light, an image of the wavelength selection portion included in the captured image.
1 . A non-transitory storage medium storing an optical inspection program, the optical inspection program causing a processor to execute generating a wavelength selection portion-removed image by removing an image of the wavelength selection portion included in a captured image from the captured image of an object surface imaged through a wavelength selection portion configured to select at least two different wavelength spectra from incident light.
2 . The medium according to claim 1 , wherein the removing the image of the wavelength selection portion included in the captured image includes:
generating the captured image in a frequency space by Fourier transform;
generating the wavelength selection portion-removed image in the frequency space by setting a value of a frequency component corresponding to the wavelength selection portion to be constant or 0 in the captured image in the frequency space; and
generating the wavelength selection portion-removed image in a real space by performing inverse Fourier transform on the wavelength selection portion-removed image in the frequency space.
3 . The medium according to claim 1 , wherein the removing the image of the wavelength selection portion included in the captured image includes applying a spatial high-pass filter to the captured image.
4 . The medium according to claim 1 , wherein the wavelength selection portion includes a cyclic pattern.
5 . The medium according to claim 4 , wherein the removing the image of the wavelength selection portion included in the captured image includes:
generating the captured image in a frequency space by Fourier transform;
generating the wavelength selection portion-removed image in the frequency space by setting a value of a frequency component corresponding to the wavelength selection portion to be constant or 0 at or near two points of the captured image in the frequency space; and
generating the wavelength selection portion-removed image in a real space by performing inverse Fourier transform on the wavelength selection portion-removed image in the frequency space.
6 . The medium according to claim 1 , wherein the processor is caused to execute acquiring information of the object surface based on the wavelength selection portion-removed image.
7 . A processing apparatus for an optical inspection system, comprising:
a non-transitory storage medium storing an optical inspection program according to claim 1 ; and
a processor configured to read out, from the non-transitory storage medium, the program stored in the non-transitory storage medium and execute the program.
8 . A processing apparatus for an optical inspection system, comprising a processor configured to generate a wavelength selection portion-removed image by removing an image of the wavelength selection portion included in a captured image from the captured image of an object surface imaged through a wavelength selection portion configured to select at least two different wavelength spectra from incident light.
9 . The apparatus according to claim 8 , wherein the processor is configured to acquire information of the object surface based on the wavelength selection portion-removed image.
10 . An optical inspection system comprising:
a processing apparatus according to claim 8 ; and
an imaging portion configured to acquire the captured image.
11 . The system according to claim 10 , further comprising an illumination portion configured to emit parallel light to a section including an optical axis of the imaging portion.
12 . An optical inspection method comprising generating a wavelength selection portion-removed image by removing an image of the wavelength selection portion included in a captured image from the captured image of an object surface imaged through a wavelength selection portion configured to select at least two different wavelength spectra from incident light.
13 . The method according to claim 12 , further comprising acquiring information of the object surface based on the wavelength selection portion-removed image.
14 . The method according to claim 12 , wherein the removing the image of the wavelength selection portion included in the captured image includes:
generating the captured image in a frequency space by Fourier transform;
generating the wavelength selection portion-removed image in the frequency space by setting a value of a frequency component corresponding to the wavelength selection portion to be constant or 0 in the captured image in the frequency space; and
generating the wavelength selection portion-removed image in a real space by performing inverse Fourier transform on the wavelength selection portion-removed image in the frequency space.