IP Library Granted Patent US 12,519,087
Granted Patent B2
US 12,519,087 · App. 18/484,571 · Granted Jan 6, 2026

Package structure with underfill

Inventors: Chen-Hsuan Tsai (Taitung, TW); Tsung-Fu Tsai (Changhua, TW); Shih-Ting Lin (Taipei, TW); Szu-Wei Lu (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H01L25/0657H01L23/481H01L24/11H01L25/50H01L2224/0401
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Quick Facts
Patent No.
US 12,519,087
App. No.
18/484,571
Granted
Jan 6, 2026
Kind
B2
Abstract

A package structure is provided. The package structure includes a substrate and a semiconductor chip over the substrate. The package structure also includes a protective film laterally surrounding the semiconductor chip. The package structure further includes an underfill element between the semiconductor chip and the protective film. A portion of the underfill element is directly below the protective film.

Claims (33)

1 . A package structure, comprising:

a substrate;

a semiconductor chip over the substrate;

a protective film laterally surrounding the semiconductor chip; and

an underfill element between the semiconductor chip and the protective film, wherein a portion of the underfill element is directly below the protective film, the protective film has a first weight percentage of fillers, the underfill element has a second weight percentage of fillers, and the first weight percentage of fillers is greater than the second weight percentage of fillers.

2 . The package structure as claimed in claim 1 , wherein the protective film comprises first fillers, the underfill element comprises second fillers, and the first fillers have a greater average size than that of the second fillers.

3 . The package structure as claimed in claim 1 , wherein the underfill element is in direct contact with the protective film.

4 . The package structure as claimed in claim 1 , wherein a top of the semiconductor chip is closer to the substrate than a top of the protective film.

5 . The package structure as claimed in claim 1 , wherein the protective film has a first interior sidewall and a second interior sidewall, and the first interior sidewall and the second interior sidewall are in direct contact with the underfill element.

6 . The package structure as claimed in claim 5 , wherein the semiconductor chip is closer to the second interior sidewall than the first interior sidewall.

7 . The package structure as claimed in claim 1 , wherein a portion of the underfill element is between the semiconductor chip and the substrate.

8 . The package structure as claimed in claim 1 , wherein a sidewall of the protective film has convex or concave surface curvature.

9 . The package structure as claimed in claim 1 , wherein the protective film has asymmetric opposite sidewalls, the asymmetric opposite sidewalls are non-planar, and the asymmetric opposite sidewalls have different profiles.

10 . The package structure as claimed in claim 1 , further comprising:

a second semiconductor chip over the semiconductor chip, wherein the underfill element surrounds the second semiconductor chip.

11 . A package structure, comprising:

a substrate;

a semiconductor chip over the substrate;

an underfill element laterally surrounding the semiconductor chip; and

a protective film laterally surrounding the underfill element and the semiconductor chip, wherein a sidewall of the protective film has convex or concave surface curvature, the protective film has a first interior sidewall and a second interior sidewall, and the second interior sidewall is closer to the semiconductor chip than the first interior sidewall.

12 . The package structure as claimed in claim 11 , wherein the protective film has a first weight percentage of fillers, the underfill element has a second weight percentage of fillers, and the first weight percentage of fillers is greater than the second weight percentage of fillers.

13 . The package structure as claimed in claim 11 , wherein the protective film has asymmetric opposite sidewalls, the asymmetric opposite sidewalls are non-planar, and the asymmetric opposite sidewalls have different profiles.

14 . The package structure as claimed in claim 11 , wherein a portion of the underfill element is directly under the protective film.

15 . The package structure as claimed in claim 11 , wherein the protective film comprises first fillers, the underfill element comprises second fillers, and the first fillers have a greater average size than that of the second fillers.

16 . A package structure, comprising:

a substrate;

a semiconductor chip over the substrate;

a protective film laterally surrounding the semiconductor chip; and

an underfill element between the semiconductor chip and the protective film, wherein the protective film has asymmetric opposite sidewalls, the asymmetric opposite sidewalls are non-planar, and the asymmetric opposite sidewalls have different profiles.

17 . The package structure as claimed in claim 16 , wherein a top of the semiconductor chip is closer to the substrate than a top of the protective film.

18 . The package structure as claimed in claim 16 , wherein the protective film is in direct contact with the underfill element.

19 . The package structure as claimed in claim 16 , wherein the protective film comprises first fillers, the underfill element comprises second fillers, and the first fillers have a greater average size than that of the second fillers.

20 . The package structure as claimed in claim 16 , wherein a portion of the underfill element extends under the protective film.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 11, 2023
From: TSAI, CHEN-HSUAN; TSAI, TSUNG-FU; LIN, SHIH-TING; LU, SZU-WEI
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 065180/0234 →
Continuity (3)
Continuation 17234196 · Apr 19, 2021
Continuation 16383929 · Apr 15, 2019
Related Publication 20240055410A1 · Feb 15, 2024
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