Cantilever array
According to one embodiment, a cantilever array includes a plurality of cantilever pairs. Each of the cantilever pairs includes a first cantilever and a second cantilever facing the first cantilever while having a gap, and which are arrayed in a direction orthogonal to a facing direction. Positions of the gaps of the cantilever pairs shift from each other when viewing in an array direction.
1 . A cantilever array comprising:
a plurality of cantilever pairs each of which includes a first cantilever and a second cantilever facing the first cantilever while having a gap, and which are arrayed in a direction orthogonal to a facing direction,
wherein positions of the gaps of the cantilever pairs shift from each other when viewing in an array direction; and
a third cantilever that does not face the second cantilever and a fourth cantilever that does not face the first cantilever,
wherein a first sensing electrode is formed at a root of each of the first cantilevers,
wherein a second sensing electrode is formed at a root of each of the second cantilevers,
wherein a first reference electrode corresponding to the first sensing electrode is formed in a first supporting portion that supports the third cantilever, and
wherein a second reference electrode corresponding to the second sensing electrode is formed in a second supporting portion that supports the fourth cantilever.
2 . The cantilever array of claim 1 , wherein lengths of the first cantilever and the second cantilever of each of the plurality of cantilever pairs are different from each other.
3 . The cantilever array of claim 2 , wherein the lengths of the first cantilever and the second cantilever of each of the plurality of cantilever pairs are decided in accordance with resonance frequencies.
4 . The cantilever array of claim 1 , wherein widths of the gaps are larger than an interval of the array of the cantilever pairs.
5 . The cantilever array of claim 1 , wherein
the first reference electrode is an electrode having the same shape as a shape of a portion connected to a wiring of the first sensing electrode, and
the second reference electrode is an electrode having the same shape as a shape of a portion connected to a wiring of the second sensing electrode.
6 . The cantilever array of claim 1 , further comprising a processing circuit configured to process, as sensor outputs, a difference between a signal output from each of the first sensing electrodes and a signal output from the first reference electrode and a difference between a signal output from each of the second sensing electrodes and a signal output from the second reference electrode.
7 . The cantilever array of claim 1 , wherein
a plurality of first electrode elements connected in series are formed at a root of each of the first cantilevers, and
a plurality of second electrode elements connected in series are formed at a root of each of the second cantilevers.
8 . The cantilever array of claim 7 , wherein
each of the first electrode elements is arranged between the root of the first cantilever and a position of ½ of a length of the first cantilever, and
each of the second electrode elements is arranged between the root of the second cantilever and a position of ½ of a length of the second cantilever.
9 . The cantilever array of claim 1 , wherein at least one groove is formed at a root of each of the first cantilevers and the second cantilevers.
10 . The cantilever array of claim 1 , wherein a plurality of grooves are formed at a root of each of the first cantilevers and the second cantilevers.
11 . The cantilever array of claim 1 , wherein each of the first cantilevers and the second cantilevers is one of a piezoelectric cantilever and an electrostatic cantilever.