Substrate processing system and substrate processing method
A substrate processing system includes: a batch-type processing part that collectively processes a lot including substrates arranged at a first pitch; a single-substrate-type processing part that processes the substrates of the lot one by one; and an interface part that delivers the substrates between the batch-type processing part and the single-substrate-type processing part. The batch-type processing part includes a processing bath that stores a processing solution having a lump shape or a mist shape, a first holder that holds the substrates arranged at the first pitch, and a second holder that receives the substrates arranged at a second pitch from the first holder in the processing solution. The interface part includes a transfer part that transfers the substrates held separately by the first and second holders in the processing solution, from the batch-type processing part to the single-substrate-type processing part.
1 . A substrate processing system comprising:
a loading part into which a cassette configured to accommodate a plurality of substrates is loaded;
a batch-type processing part configured to collectively process a lot including the plurality of substrates;
a single-substrate-type processing part configured to process the plurality of substrates of the lot one by one;
an unloading part from which the cassette configured to accommodate the plurality of substrates is unloaded;
an interface part configured to deliver the plurality of substrates between the batch-type processing part and the single-substrate-type processing part; and
an additional interface part configured to deliver the plurality of substrates between the loading part and the batch-type processing part and including a lot formation part configured to form the lot,
wherein the loading part and the unloading part are provided separately, and the additional interface part, the batch-type processing part, the interface part, and the single-substrate-type processing part are arranged between the loading part and the unloading part in this order in a transfer direction of the plurality of substrates and opposite sides of the transfer direction, and
wherein a transfer device in the batch-type processing part moves only in the transfer direction to deliver the plurality of substrates from the batch-type processing part to the interface part.
2 . The substrate processing system of claim 1 , wherein the interface part includes a transfer part configured to transfer the plurality of substrates from the batch-type processing part to the single-substrate-type processing part.
3 . The substrate processing system of claim 2 , wherein the batch-type processing part includes a processing bath that stores a processing solution having a lump shape or a mist shape in which the lot is immersed; and
wherein the transfer part is configured to transfer the plurality of substrates held in the processing solution from the processing bath of the batch-type processing part to the single-substrate-type processing part.
4 . The substrate processing system of claim 3 , wherein the processing bath is configured to store pure water in which the lot is immersed.
5 . The substrate processing system of claim 1 , wherein the single-substrate-type processing part comprises a solution processing apparatus configured to process the plurality of substrates one by one with a solution.
6 . The substrate processing system of claim 1 , wherein the single-substrate-type processing part comprises a drying apparatus configured to dry the plurality of substrates one by one with a supercritical fluid.
7 . A substrate processing method using the substrate processing system of claim 1 , the substrate processing method comprising:
transferring the plurality of substrates between the loading part and the unloading part in an order of the additional interface part, the batch-type processing part, the interface part, and the single-substrate-type processing.