IP Library › Granted Patent US 12,529,844
Granted Patent B2
US 12,529,844 · App. 18/773,556 · Granted Jan 20, 2026

Apparatus for optical coupling

Inventors: Feng-Wei Kuo (Hsinchu County, TW); Chewn-Pu Jou (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
G02B6/1223G02B6/0083G02B6/12007G02B6/14G02B6/29325G02B6/30
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Quick Facts
Patent No.
US 12,529,844
App. No.
18/773,556
Granted
Jan 20, 2026
Kind
B2
Abstract

Disclosed are apparatuses for optical coupling and a system for communication. In one embodiment, an apparatus for optical coupling having an optical coupling region is disclosed. The apparatus for optical coupling includes a substrate and a core layer disposed on the substrate. The core layer includes a plurality of holes located in the optical coupling region. An effective refractive index of the core layer gradually decrease from a first end of the optical coupling region to a second end of the optical coupling region.

Claims (36)

1 . An apparatus for optical coupling, having an optical coupling region and comprising:

a core layer comprising a plurality of holes separated from each other and located in the optical coupling region,

wherein the plurality of holes are arranged along a plurality of lines extending from a first end of the optical coupling region to a second end of the optical coupling region,

wherein lines among the plurality of lines adjacent to a central portion of the optical coupling region are straight lines,

wherein lines among the plurality of lines adjacent to a peripheral portion of the optical coupling region are curved lines, and

wherein in a cross-section plane perpendicular to the substrate and passing through both the first end and the second end, widths and intervals of the plurality of holes gradually increase from the first end to the second end.

2 . The apparatus for optical coupling as claimed in claim 1 , wherein the plurality of holes have the same depth.

3 . The apparatus for optical coupling as claimed in claim 1 , wherein a material of the core layer comprises silicon.

4 . The apparatus for optical coupling as claimed in claim 1 , wherein a maximum thickness of the core layer is larger than or equal to 250 nm and smaller than or equal to 350 nm.

5 . The apparatus for optical coupling as claimed in claim 1 , wherein a maximum depth of each of the plurality of holes is larger than or equal to 70 nm and smaller than or equal to 270 nm.

6 . The apparatus for optical coupling as claimed in claim 1 , wherein the widths of the plurality of holes are larger than or equal to 100 nm and smaller than or equal to 1000 nm.

7 . The apparatus for optical coupling as claimed in claim 1 , wherein intervals of the plurality of holes are larger than or equal to 200 nm and smaller than or equal to 500 nm.

8 . The apparatus for optical coupling as claimed in claim 1 , wherein pitches of the plurality of holes are larger than or equal to 300 nm and smaller than or equal to 800 nm.

9 . The apparatus for optical coupling as claimed in claim 1 , further comprising:

a cladding layer disposed on the core layer and filled in the plurality of holes.

10 . The apparatus for optical coupling as claimed in claim 1 , wherein intervals of the plurality of holes gradually increase from the first end to the second end.

11 . The apparatus for optical coupling as claimed in claim 1 , further comprising:

a substrate on which the core layer is disposed.

12 . An apparatus for optical coupling, having an optical coupling region and comprising:

a core layer comprising a plurality of holes separated from each other and located in the optical coupling region,

wherein the plurality of holes are arranged along a plurality of lines,

wherein the plurality of lines are parallel lines extending along a first direction pointing from a first end of the optical coupling region to a second end of the optical coupling region,

wherein the plurality of lines are arranged along a second direction perpendicular to the first direction, and

wherein in a cross-section plane perpendicular to the substrate and passing through both the first end and the second end, widths and intervals of the holes increase from the first end to the second end.

13 . The apparatus for optical coupling as claimed in claim 12 , wherein a maximum thickness of the core layer is larger than or equal to 250 nm and smaller than or equal to 350 nm.

14 . The apparatus for optical coupling as claimed in claim 12 , wherein a maximum depth of each of the plurality of holes is larger than or equal to 70 nm and smaller than or equal to 270 nm.

15 . The apparatus for optical coupling as claimed in claim 12 , wherein the plurality of lines are straight virtual lines.

16 . An apparatus for optical coupling, having an optical coupling region and comprising:

a core layer comprising a plurality of holes separated from each other and located in the optical coupling region,

wherein the plurality of holes are arranged along a plurality of lines extending from a first end of the optical coupling region to a second end of the optical coupling region,

wherein the plurality of lines converge near the first end and diverge near the second end, and

wherein in a cross-section plane perpendicular to the substrate and passing through both the first end and the second end, widths and intervals of the holes increase from the first end to the second end.

17 . The apparatus for optical coupling as claimed in claim 16 , wherein a maximum thickness of the core layer is larger than or equal to 250 nm and smaller than or equal to 350 nm.

18 . The apparatus for optical coupling as claimed in claim 16 , wherein a maximum depth of each of the plurality of holes is larger than or equal to 70 nm and smaller than or equal to 270 nm.

19 . The apparatus for optical coupling as claimed in claim 16 , wherein the plurality of lines are straight virtual lines.

20 . The apparatus for optical coupling as claimed in claim 16 , wherein the widths of the plurality of holes are larger than or equal to 100 nm and smaller than or equal to 1000 nm.

Continuity (3)
Continuation 18360820 · Jul 28, 2023
Continuation 17075698 · Oct 21, 2020
Related Publication 20240369762A1 · Nov 7, 2024
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