Suspended components and functional frames
According to embodiments of the present disclosure, a micro-system comprises a frame, a component attached to and supported by the frame, and an electrically functional micro-device disposed on or in the frame and electrically connected to the component. The component can be exclusively supported by the frame. The frame can comprise the micro-device and can comprise the same materials and layer structure as the component. The component, frame, and micro-device can comprise a piezoelectric material. The component can be an acoustic resonator and the micro-device can be a capacitor.
1 . A micro-system, comprising:
a frame;
a component attached to and supported by the frame; and
an electrically functional micro-device disposed on or in the frame and electrically connected to the component,
wherein the component is separate and spaced apart from the micro-device.
2 . The micro-system of claim 1 , wherein the component is exclusively supported by the frame.
3 . The micro-system of claim 1 , wherein the micro-device comprises one or more capacitors.
4 . The micro-system of claim 3 , wherein the one or more capacitors comprise no less than 20% of the frame.
5 . The micro-system of claim 1 , wherein the micro-device is native to the frame.
6 . The micro-system of claim 1 , wherein the micro-device is non-native to, and disposed on, the frame.
7 . The micro-system of claim 6 , wherein the micro-device is a micro-transferred micro-device printed onto the frame and comprises a broken or separated tether.
8 . The micro-system of claim 1 , wherein two or more of the frame, the micro-device, and the component comprise a same material.
9 . The micro-system of claim 1 , wherein each two or more of the frame, the micro-device, and the component comprises two or more same layers disposed in a common order.
10 . The micro-system of claim 1 , wherein the component is a piezoelectric micro-device or a silicon micro-device.
11 . The micro-system of claim 10 , wherein the component is an acoustic resonator.
12 . The micro-system of claim 1 , wherein the component comprises potassium sodium niobate (KNN, KNaNbO 3 ).
13 . The micro-system of claim 1 , wherein (i) the micro-device is operable to control or is responsive to the component, (ii) is a portion of an electrical circuit that includes both the micro-device and the component, or (iii) both (i) and (ii).
14 . The micro-system of claim 1 , comprising a cantilever support that physically attaches the component to the frame.
15 . The micro-system of claim 14 , comprising an electrode disposed on the component that extends over the cantilever support onto the frame.
16 . The micro-system of claim 15 , wherein the electrode is electrically connected to the micro-device.
17 . The micro-system of claim 1 , wherein the frame comprises at least a portion of a tether.
18 . The micro-system of claim 1 , comprising a cap disposed over the frame and component and adhered to the frame.
19 . A micro-system wafer, comprising:
a source wafer comprising a sacrificial layer, wherein the sacrificial layer comprises a sacrificial portion adjacent to an anchor; and
a micro-system according to claim 1 disposed entirely over the sacrificial portion.
20 . A micro-system wafer, comprising:
a source wafer comprising an anchor; and
a micro-system according to claim 1 suspended over a space between the micro-system and the source wafer by a tether attaching the frame to the anchor.